JPS6339853U - - Google Patents

Info

Publication number
JPS6339853U
JPS6339853U JP13307086U JP13307086U JPS6339853U JP S6339853 U JPS6339853 U JP S6339853U JP 13307086 U JP13307086 U JP 13307086U JP 13307086 U JP13307086 U JP 13307086U JP S6339853 U JPS6339853 U JP S6339853U
Authority
JP
Japan
Prior art keywords
ion beam
ion
exb
mass separator
species
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13307086U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0539555Y2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986133070U priority Critical patent/JPH0539555Y2/ja
Publication of JPS6339853U publication Critical patent/JPS6339853U/ja
Application granted granted Critical
Publication of JPH0539555Y2 publication Critical patent/JPH0539555Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Welding Or Cutting Using Electron Beams (AREA)
JP1986133070U 1986-08-29 1986-08-29 Expired - Lifetime JPH0539555Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986133070U JPH0539555Y2 (cs) 1986-08-29 1986-08-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986133070U JPH0539555Y2 (cs) 1986-08-29 1986-08-29

Publications (2)

Publication Number Publication Date
JPS6339853U true JPS6339853U (cs) 1988-03-15
JPH0539555Y2 JPH0539555Y2 (cs) 1993-10-07

Family

ID=31033047

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986133070U Expired - Lifetime JPH0539555Y2 (cs) 1986-08-29 1986-08-29

Country Status (1)

Country Link
JP (1) JPH0539555Y2 (cs)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61220263A (ja) * 1985-03-27 1986-09-30 Hitachi Ltd イオンマイクロビ−ム装置
JPS62103949A (ja) * 1985-10-30 1987-05-14 Jeol Ltd 集束イオンビ−ム装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61220263A (ja) * 1985-03-27 1986-09-30 Hitachi Ltd イオンマイクロビ−ム装置
JPS62103949A (ja) * 1985-10-30 1987-05-14 Jeol Ltd 集束イオンビ−ム装置

Also Published As

Publication number Publication date
JPH0539555Y2 (cs) 1993-10-07

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