JPS6339796B2 - - Google Patents

Info

Publication number
JPS6339796B2
JPS6339796B2 JP27200984A JP27200984A JPS6339796B2 JP S6339796 B2 JPS6339796 B2 JP S6339796B2 JP 27200984 A JP27200984 A JP 27200984A JP 27200984 A JP27200984 A JP 27200984A JP S6339796 B2 JPS6339796 B2 JP S6339796B2
Authority
JP
Japan
Prior art keywords
shield
exhaust port
plate
cryopump
panel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP27200984A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61149589A (ja
Inventor
Hiroyuki Yamakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP27200984A priority Critical patent/JPS61149589A/ja
Publication of JPS61149589A publication Critical patent/JPS61149589A/ja
Publication of JPS6339796B2 publication Critical patent/JPS6339796B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP27200984A 1984-12-25 1984-12-25 クライオポンプ Granted JPS61149589A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27200984A JPS61149589A (ja) 1984-12-25 1984-12-25 クライオポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27200984A JPS61149589A (ja) 1984-12-25 1984-12-25 クライオポンプ

Publications (2)

Publication Number Publication Date
JPS61149589A JPS61149589A (ja) 1986-07-08
JPS6339796B2 true JPS6339796B2 (cg-RX-API-DMAC7.html) 1988-08-08

Family

ID=17507865

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27200984A Granted JPS61149589A (ja) 1984-12-25 1984-12-25 クライオポンプ

Country Status (1)

Country Link
JP (1) JPS61149589A (cg-RX-API-DMAC7.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006314864A (ja) * 2005-05-10 2006-11-24 Mitsubishi Electric Corp 排気トラップ装置

Also Published As

Publication number Publication date
JPS61149589A (ja) 1986-07-08

Similar Documents

Publication Publication Date Title
JP2731276B2 (ja) ２段式の冷凍機により作動されるクライオポンプ
JPS6339796B2 (cg-RX-API-DMAC7.html)
US5301511A (en) Cryopump and cryopanel having frost concentrating device
CA2145654A1 (en) Remote Region Vacuum Regulator
IE821649L (en) Sputtering system.
JPS5583143A (en) Exhaust system for electron beam equipment
FR2379308A1 (fr) Filtre du type a plaques comprenant des agencements de plaque perfectionnes
JPS59133365A (ja) 真空装置
SU883551A1 (ru) Криогенный форвакуумный конденсационный насос
JPH05275050A (ja) スパッタイオンポンプ
JPS606085A (ja) クライオポンプ装置
SU631672A2 (ru) Охлаждаема ловушка
JPS61123775A (ja) クライオポンプ
JPS5641342A (en) Electrode material for sputtering ion pump
JPH01188764A (ja) 高真空用ガスケツト
JPS6164877A (ja) 薄膜成膜装置
JPH0447180A (ja) クライオポンプ
JPS56110584A (en) Muffler for enclosed compressor
JPS6352110B2 (cg-RX-API-DMAC7.html)
JPS6011093Y2 (ja) スパツタリング装置
蔡添浩 et al. HISTOCHEMICAL AND IMMUNOHISTOCHEMICAL STUDY OF EXTRAMAMMARY PACET'S DISEASE
Hara et al. The glomerular mesangium in hypertension: a morphometrical comparison of nephrosclerosis with mesangioproliferative glomerulonephritis on renal biopsies
GB709819A (en) Cold traps for vacuum systems
SU618621A1 (ru) Обжигова машина
SU892018A1 (ru) Криогенный конденсационный насос

Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term