JPS6338330U - - Google Patents
Info
- Publication number
- JPS6338330U JPS6338330U JP13053186U JP13053186U JPS6338330U JP S6338330 U JPS6338330 U JP S6338330U JP 13053186 U JP13053186 U JP 13053186U JP 13053186 U JP13053186 U JP 13053186U JP S6338330 U JPS6338330 U JP S6338330U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor manufacturing
- manufacturing jig
- semiconductor
- arrangement direction
- wafer arrangement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 15
- 238000004519 manufacturing process Methods 0.000 claims description 10
- 235000012431 wafers Nutrition 0.000 claims description 5
Landscapes
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13053186U JPS6338330U (cs) | 1986-08-27 | 1986-08-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13053186U JPS6338330U (cs) | 1986-08-27 | 1986-08-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6338330U true JPS6338330U (cs) | 1988-03-11 |
Family
ID=31028120
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13053186U Pending JPS6338330U (cs) | 1986-08-27 | 1986-08-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6338330U (cs) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61111557A (ja) * | 1984-11-06 | 1986-05-29 | Mitsubishi Electric Corp | 半導体ウエハの移し替え装置 |
-
1986
- 1986-08-27 JP JP13053186U patent/JPS6338330U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61111557A (ja) * | 1984-11-06 | 1986-05-29 | Mitsubishi Electric Corp | 半導体ウエハの移し替え装置 |
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