JPS62154646U - - Google Patents
Info
- Publication number
- JPS62154646U JPS62154646U JP4219886U JP4219886U JPS62154646U JP S62154646 U JPS62154646 U JP S62154646U JP 4219886 U JP4219886 U JP 4219886U JP 4219886 U JP4219886 U JP 4219886U JP S62154646 U JPS62154646 U JP S62154646U
- Authority
- JP
- Japan
- Prior art keywords
- holding
- view
- groove
- semiconductor
- facing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 12
- 235000012431 wafers Nutrition 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 2
- 239000000969 carrier Substances 0.000 description 1
Landscapes
- Packaging Frangible Articles (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4219886U JPH0249725Y2 (cs) | 1986-03-22 | 1986-03-22 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4219886U JPH0249725Y2 (cs) | 1986-03-22 | 1986-03-22 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62154646U true JPS62154646U (cs) | 1987-10-01 |
JPH0249725Y2 JPH0249725Y2 (cs) | 1990-12-27 |
Family
ID=30857883
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4219886U Expired JPH0249725Y2 (cs) | 1986-03-22 | 1986-03-22 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0249725Y2 (cs) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01160833U (cs) * | 1988-04-12 | 1989-11-08 | ||
JPH03143837A (ja) * | 1989-10-26 | 1991-06-19 | Oki Electric Ind Co Ltd | ウエハ搬送処理装置とそれを用いた搬送処理方法 |
-
1986
- 1986-03-22 JP JP4219886U patent/JPH0249725Y2/ja not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01160833U (cs) * | 1988-04-12 | 1989-11-08 | ||
JPH03143837A (ja) * | 1989-10-26 | 1991-06-19 | Oki Electric Ind Co Ltd | ウエハ搬送処理装置とそれを用いた搬送処理方法 |
Also Published As
Publication number | Publication date |
---|---|
JPH0249725Y2 (cs) | 1990-12-27 |