JPS62128633U - - Google Patents
Info
- Publication number
- JPS62128633U JPS62128633U JP1569486U JP1569486U JPS62128633U JP S62128633 U JPS62128633 U JP S62128633U JP 1569486 U JP1569486 U JP 1569486U JP 1569486 U JP1569486 U JP 1569486U JP S62128633 U JPS62128633 U JP S62128633U
- Authority
- JP
- Japan
- Prior art keywords
- stepped portion
- storage jig
- vertical storage
- semiconductor wafer
- approximately
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 235000012431 wafers Nutrition 0.000 claims 7
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986015694U JPH0715138Y2 (ja) | 1986-02-07 | 1986-02-07 | 縦型収納治具 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986015694U JPH0715138Y2 (ja) | 1986-02-07 | 1986-02-07 | 縦型収納治具 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62128633U true JPS62128633U (cs) | 1987-08-14 |
| JPH0715138Y2 JPH0715138Y2 (ja) | 1995-04-10 |
Family
ID=30806862
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986015694U Expired - Lifetime JPH0715138Y2 (ja) | 1986-02-07 | 1986-02-07 | 縦型収納治具 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0715138Y2 (cs) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01239853A (ja) * | 1988-03-18 | 1989-09-25 | Tel Sagami Ltd | 籠形ボート |
| JPH02114938U (cs) * | 1989-03-03 | 1990-09-14 | ||
| JPH02122431U (cs) * | 1989-03-20 | 1990-10-08 | ||
| DE4340288A1 (de) * | 1992-11-27 | 1994-06-01 | Toshiba Ceramics Co | Vertikales Schiffchen und Verfahren zu seiner Herstellung |
| DE4340287A1 (de) * | 1992-11-30 | 1994-06-09 | Toshiba Ceramics Co | Vertikales Schiffchen |
| DE4342976A1 (de) * | 1992-12-17 | 1994-06-23 | Toshiba Ceramics Co | Vertikale Vorrichtung zur Wärmebehandlung von Halbleitern |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4812671U (cs) * | 1971-06-21 | 1973-02-12 | ||
| JPS51879A (en) * | 1974-06-21 | 1976-01-07 | Hitachi Ltd | Cvd sochi |
| JPS60124031U (ja) * | 1984-01-27 | 1985-08-21 | 富士通株式会社 | 縦型炉 |
-
1986
- 1986-02-07 JP JP1986015694U patent/JPH0715138Y2/ja not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4812671U (cs) * | 1971-06-21 | 1973-02-12 | ||
| JPS51879A (en) * | 1974-06-21 | 1976-01-07 | Hitachi Ltd | Cvd sochi |
| JPS60124031U (ja) * | 1984-01-27 | 1985-08-21 | 富士通株式会社 | 縦型炉 |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01239853A (ja) * | 1988-03-18 | 1989-09-25 | Tel Sagami Ltd | 籠形ボート |
| JPH02114938U (cs) * | 1989-03-03 | 1990-09-14 | ||
| JPH02122431U (cs) * | 1989-03-20 | 1990-10-08 | ||
| DE4340288A1 (de) * | 1992-11-27 | 1994-06-01 | Toshiba Ceramics Co | Vertikales Schiffchen und Verfahren zu seiner Herstellung |
| DE4340287A1 (de) * | 1992-11-30 | 1994-06-09 | Toshiba Ceramics Co | Vertikales Schiffchen |
| DE4342976A1 (de) * | 1992-12-17 | 1994-06-23 | Toshiba Ceramics Co | Vertikale Vorrichtung zur Wärmebehandlung von Halbleitern |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0715138Y2 (ja) | 1995-04-10 |