JPS62114444U - - Google Patents

Info

Publication number
JPS62114444U
JPS62114444U JP203986U JP203986U JPS62114444U JP S62114444 U JPS62114444 U JP S62114444U JP 203986 U JP203986 U JP 203986U JP 203986 U JP203986 U JP 203986U JP S62114444 U JPS62114444 U JP S62114444U
Authority
JP
Japan
Prior art keywords
carrier
grooves
hold
workbench
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP203986U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP203986U priority Critical patent/JPS62114444U/ja
Publication of JPS62114444U publication Critical patent/JPS62114444U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
  • Warehouses Or Storage Devices (AREA)
JP203986U 1986-01-13 1986-01-13 Pending JPS62114444U (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP203986U JPS62114444U (cs) 1986-01-13 1986-01-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP203986U JPS62114444U (cs) 1986-01-13 1986-01-13

Publications (1)

Publication Number Publication Date
JPS62114444U true JPS62114444U (cs) 1987-07-21

Family

ID=30780505

Family Applications (1)

Application Number Title Priority Date Filing Date
JP203986U Pending JPS62114444U (cs) 1986-01-13 1986-01-13

Country Status (1)

Country Link
JP (1) JPS62114444U (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0650344U (ja) * 1991-02-07 1994-07-08 コマツ電子金属株式会社 ウェーハ容器傾け台
JP2013008920A (ja) * 2011-06-27 2013-01-10 Mitsubishi Electric Corp ウェハカセット

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0650344U (ja) * 1991-02-07 1994-07-08 コマツ電子金属株式会社 ウェーハ容器傾け台
JP2013008920A (ja) * 2011-06-27 2013-01-10 Mitsubishi Electric Corp ウェハカセット

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