JPS6338324U - - Google Patents
Info
- Publication number
- JPS6338324U JPS6338324U JP13186986U JP13186986U JPS6338324U JP S6338324 U JPS6338324 U JP S6338324U JP 13186986 U JP13186986 U JP 13186986U JP 13186986 U JP13186986 U JP 13186986U JP S6338324 U JPS6338324 U JP S6338324U
- Authority
- JP
- Japan
- Prior art keywords
- resistor
- polycrystalline silicon
- plasma cvd
- nitride film
- coated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 150000004767 nitrides Chemical class 0.000 claims description 2
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Formation Of Insulating Films (AREA)
Description
第１図は、本考案の縦断面図で、第２図は従来
方式による断面図である。
１……エピタキシヤル基板、２……ベース層、
３……エミツタ層、４……フイールド酸化膜、５
……多結晶シリコン抵抗、６……アルミ配線、７
……プラズマＣＶＤ窒化膜。
FIG. 1 is a longitudinal sectional view of the present invention, and FIG. 2 is a sectional view of the conventional method. 1...Epitaxial substrate, 2...Base layer,
3... Emitter layer, 4... Field oxide film, 5
... Polycrystalline silicon resistor, 6 ... Aluminum wiring, 7
...Plasma CVD nitride film.
Claims (1)
て、前記抵抗を含む素子表面をプラズマＣＶＤ窒
化膜で被覆したことを特徴とする半導体装置。 1. A semiconductor device having a polycrystalline silicon resistor, characterized in that a surface of an element including the resistor is coated with a plasma CVD nitride film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13186986U JPS6338324U (en) | 1986-08-27 | 1986-08-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13186986U JPS6338324U (en) | 1986-08-27 | 1986-08-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6338324U true JPS6338324U (en) | 1988-03-11 |
Family
ID=31030721
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13186986U Pending JPS6338324U (en) | 1986-08-27 | 1986-08-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6338324U (en) |
-
1986
- 1986-08-27 JP JP13186986U patent/JPS6338324U/ja active Pending