JPS6338319U - - Google Patents

Info

Publication number
JPS6338319U
JPS6338319U JP12948486U JP12948486U JPS6338319U JP S6338319 U JPS6338319 U JP S6338319U JP 12948486 U JP12948486 U JP 12948486U JP 12948486 U JP12948486 U JP 12948486U JP S6338319 U JPS6338319 U JP S6338319U
Authority
JP
Japan
Prior art keywords
projection
lens
projection lens
projection exposure
heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12948486U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12948486U priority Critical patent/JPS6338319U/ja
Publication of JPS6338319U publication Critical patent/JPS6338319U/ja
Pending legal-status Critical Current

Links

JP12948486U 1986-08-27 1986-08-27 Pending JPS6338319U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12948486U JPS6338319U (enrdf_load_stackoverflow) 1986-08-27 1986-08-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12948486U JPS6338319U (enrdf_load_stackoverflow) 1986-08-27 1986-08-27

Publications (1)

Publication Number Publication Date
JPS6338319U true JPS6338319U (enrdf_load_stackoverflow) 1988-03-11

Family

ID=31026094

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12948486U Pending JPS6338319U (enrdf_load_stackoverflow) 1986-08-27 1986-08-27

Country Status (1)

Country Link
JP (1) JPS6338319U (enrdf_load_stackoverflow)

Similar Documents

Publication Publication Date Title
JPS6338319U (enrdf_load_stackoverflow)
US2135074A (en) Photographic enlarger
JPS5971342U (ja) 光量調整装置
JPS5845533U (ja) 照度分布測定装置
JPH0468518U (enrdf_load_stackoverflow)
JPS58144831U (ja) 投影型露光装置
JPS5950439U (ja) 半導体露光装置
JPH02131334U (enrdf_load_stackoverflow)
JPS606149U (ja) 半導体露光装置
JPH03117829U (enrdf_load_stackoverflow)
JPS58105553U (ja) 画像形成装置に於ける露光装置
JPS62186151U (enrdf_load_stackoverflow)
JPS61158999U (enrdf_load_stackoverflow)
JPS60166144U (ja) 投影露光装置
JPS63172129U (enrdf_load_stackoverflow)
JPS6157519U (enrdf_load_stackoverflow)
JPH0479417U (enrdf_load_stackoverflow)
JPS614955U (ja) 縮小投影露光装置
JPS59138842U (ja) 被写体位置決め指示装置
JPS6033342U (ja) フィルム拡大装置
JPS63115213U (enrdf_load_stackoverflow)
JPS60102898U (ja) パネルの絵柄面積率測定装置における光源光量調整装置
JPS59144410U (ja) 熱間鋼板の平面形状測定装置
JPH01160828U (enrdf_load_stackoverflow)
JPS6429646U (enrdf_load_stackoverflow)