JPS6338319U - - Google Patents

Info

Publication number
JPS6338319U
JPS6338319U JP12948486U JP12948486U JPS6338319U JP S6338319 U JPS6338319 U JP S6338319U JP 12948486 U JP12948486 U JP 12948486U JP 12948486 U JP12948486 U JP 12948486U JP S6338319 U JPS6338319 U JP S6338319U
Authority
JP
Japan
Prior art keywords
projection
lens
projection lens
projection exposure
heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12948486U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12948486U priority Critical patent/JPS6338319U/ja
Publication of JPS6338319U publication Critical patent/JPS6338319U/ja
Pending legal-status Critical Current

Links

JP12948486U 1986-08-27 1986-08-27 Pending JPS6338319U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12948486U JPS6338319U (enrdf_load_stackoverflow) 1986-08-27 1986-08-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12948486U JPS6338319U (enrdf_load_stackoverflow) 1986-08-27 1986-08-27

Publications (1)

Publication Number Publication Date
JPS6338319U true JPS6338319U (enrdf_load_stackoverflow) 1988-03-11

Family

ID=31026094

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12948486U Pending JPS6338319U (enrdf_load_stackoverflow) 1986-08-27 1986-08-27

Country Status (1)

Country Link
JP (1) JPS6338319U (enrdf_load_stackoverflow)

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