JPS6338319U - - Google Patents
Info
- Publication number
- JPS6338319U JPS6338319U JP12948486U JP12948486U JPS6338319U JP S6338319 U JPS6338319 U JP S6338319U JP 12948486 U JP12948486 U JP 12948486U JP 12948486 U JP12948486 U JP 12948486U JP S6338319 U JPS6338319 U JP S6338319U
- Authority
- JP
- Japan
- Prior art keywords
- projection
- lens
- projection lens
- projection exposure
- heating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 2
Description
第１図は本考案の一実施例を示す投影露光装置
の概略構成図、第２図は本考案の一実施例の温度
制御装置のブロツク図、第３図は本考案の一実施
例の加熱、冷却素子の部分拡大図、第４図は本考
案の別の実施例の投影レンズ部の斜視図、第５図
はさらに別の実施例の投影レンズ部の斜視図であ
る。
１……光源、２……コンデンサレンズ、３……
原画、４……原画台、５……投影レンズ、５′…
…鏡筒、６……ウエハ、７……ＸＹテーブル、８
……測温素子、９……加熱、冷却素子、１０……
温度制御装置、１０′……制御回路、１１……ク
リーンチヤンバー、１２……増幅器、１３……ス
イツチング素子、１４……温度調節器。
FIG. 1 is a schematic diagram of a projection exposure apparatus according to an embodiment of the present invention, FIG. 2 is a block diagram of a temperature control device according to an embodiment of the present invention, and FIG. 3 is a heating apparatus according to an embodiment of the present invention. , a partially enlarged view of a cooling element, FIG. 4 is a perspective view of a projection lens section according to another embodiment of the present invention, and FIG. 5 is a perspective view of a projection lens section according to yet another embodiment. 1...Light source, 2...Condenser lens, 3...
Original picture, 4... Original picture stand, 5... Projection lens, 5'...
... Lens barrel, 6... Wafer, 7... XY table, 8
... Temperature measuring element, 9 ... Heating, cooling element, 10 ...
Temperature control device, 10'...Control circuit, 11...Clean chamber, 12...Amplifier, 13...Switching element, 14...Temperature controller.
Claims (1)
光するための投影レンズを有する投影露光装置に
おいて、前記投影レンズの鏡筒の所定の位置に測
温素子と加熱、冷却素子とを設けたことを特徴と
する投影露光装置。 In a projection exposure apparatus having a projection lens for projecting and exposing a pattern on a projection original plate onto a photosensitive object surface, a temperature measuring element and a heating and cooling element are provided at predetermined positions of a lens barrel of the projection lens. Characteristic projection exposure equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12948486U JPS6338319U (en) | 1986-08-27 | 1986-08-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12948486U JPS6338319U (en) | 1986-08-27 | 1986-08-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6338319U true JPS6338319U (en) | 1988-03-11 |
Family
ID=31026094
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12948486U Pending JPS6338319U (en) | 1986-08-27 | 1986-08-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6338319U (en) |
-
1986
- 1986-08-27 JP JP12948486U patent/JPS6338319U/ja active Pending
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