JPS6337501B2 - - Google Patents

Info

Publication number
JPS6337501B2
JPS6337501B2 JP58159867A JP15986783A JPS6337501B2 JP S6337501 B2 JPS6337501 B2 JP S6337501B2 JP 58159867 A JP58159867 A JP 58159867A JP 15986783 A JP15986783 A JP 15986783A JP S6337501 B2 JPS6337501 B2 JP S6337501B2
Authority
JP
Japan
Prior art keywords
crystal substrate
crystal
wavelength
compound semiconductor
composition distribution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58159867A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6050936A (ja
Inventor
Masaru Koseto
Junjiro Goto
Hiroshi Hidaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP58159867A priority Critical patent/JPS6050936A/ja
Publication of JPS6050936A publication Critical patent/JPS6050936A/ja
Publication of JPS6337501B2 publication Critical patent/JPS6337501B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP58159867A 1983-08-30 1983-08-30 化合物半導体結晶の組成分布評価法 Granted JPS6050936A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58159867A JPS6050936A (ja) 1983-08-30 1983-08-30 化合物半導体結晶の組成分布評価法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58159867A JPS6050936A (ja) 1983-08-30 1983-08-30 化合物半導体結晶の組成分布評価法

Publications (2)

Publication Number Publication Date
JPS6050936A JPS6050936A (ja) 1985-03-22
JPS6337501B2 true JPS6337501B2 (enrdf_load_stackoverflow) 1988-07-26

Family

ID=15702944

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58159867A Granted JPS6050936A (ja) 1983-08-30 1983-08-30 化合物半導体結晶の組成分布評価法

Country Status (1)

Country Link
JP (1) JPS6050936A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03114701U (enrdf_load_stackoverflow) * 1990-03-07 1991-11-26

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2741932B2 (ja) * 1989-12-15 1998-04-22 松下電工株式会社 便器水洗装置
JP2742459B2 (ja) * 1989-12-15 1998-04-22 松下電工株式会社 便器水洗装置
JP4043660B2 (ja) * 1999-09-10 2008-02-06 日鉱金属株式会社 化合物半導体ウェハに含まれる特定元素の組成比のマッピング装置
JP2021170005A (ja) * 2020-04-15 2021-10-28 株式会社コーセー 結晶構造の分布評価方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5193665A (enrdf_load_stackoverflow) * 1975-02-14 1976-08-17
JPS57206045A (en) * 1981-06-12 1982-12-17 Fujitsu Ltd Method for checking silicon wafer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03114701U (enrdf_load_stackoverflow) * 1990-03-07 1991-11-26

Also Published As

Publication number Publication date
JPS6050936A (ja) 1985-03-22

Similar Documents

Publication Publication Date Title
JP3636651B2 (ja) 放射線検査システム及び検査方法
US3610934A (en) Automatic focusing system utilizing means for alternately directing light over two paths having slightly different lengths
JPS5928884B2 (ja) 距離検出方式
US5981949A (en) Locating defects in solid material
CA2304500A1 (en) Sensor apparatus
US4061578A (en) Infrared detection and imaging, method and apparatus
US4526468A (en) Method for determining the phase of phase transformable light scattering material
JPS6337501B2 (enrdf_load_stackoverflow)
US3856407A (en) Automatic focusing device
JPS636520A (ja) 電気光学的画像装置
US3495518A (en) Photographic camera device
JPS6245965B2 (enrdf_load_stackoverflow)
US5008542A (en) Method and system for automated measurement of whole-wafer etch pit density in GaAs
US20240063240A1 (en) Light state imaging pixel
US4798947A (en) Focusing technique for an optical sensing system
USRE30099E (en) Distance detecting device
Scholiers et al. Stokes-spectro-polarimetry with a two-dimensional diode array
Monro Performance Evaluation of CCD Imagers
US2794361A (en) Electric photometer
US12205966B1 (en) Sensor with long wavelength infrared polarization sensitive pixels
JPH0528949B2 (enrdf_load_stackoverflow)
JPS62501935A (ja) カラ−引伸器又は複写器
JPH0554621B2 (enrdf_load_stackoverflow)
JP3243784B2 (ja) 作業テーブルの位置決め装置
Niles et al. Radiometric calibration of a video fluorescence microscope for the quantitative imaging of resonance energy transfer