JPS6336926Y2 - - Google Patents

Info

Publication number
JPS6336926Y2
JPS6336926Y2 JP6199183U JP6199183U JPS6336926Y2 JP S6336926 Y2 JPS6336926 Y2 JP S6336926Y2 JP 6199183 U JP6199183 U JP 6199183U JP 6199183 U JP6199183 U JP 6199183U JP S6336926 Y2 JPS6336926 Y2 JP S6336926Y2
Authority
JP
Japan
Prior art keywords
sample
moving
stage
sample stage
objective lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6199183U
Other languages
English (en)
Japanese (ja)
Other versions
JPS59166356U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6199183U priority Critical patent/JPS59166356U/ja
Publication of JPS59166356U publication Critical patent/JPS59166356U/ja
Application granted granted Critical
Publication of JPS6336926Y2 publication Critical patent/JPS6336926Y2/ja
Granted legal-status Critical Current

Links

JP6199183U 1983-04-25 1983-04-25 試料移動装置 Granted JPS59166356U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6199183U JPS59166356U (ja) 1983-04-25 1983-04-25 試料移動装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6199183U JPS59166356U (ja) 1983-04-25 1983-04-25 試料移動装置

Publications (2)

Publication Number Publication Date
JPS59166356U JPS59166356U (ja) 1984-11-07
JPS6336926Y2 true JPS6336926Y2 (enExample) 1988-09-29

Family

ID=30192199

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6199183U Granted JPS59166356U (ja) 1983-04-25 1983-04-25 試料移動装置

Country Status (1)

Country Link
JP (1) JPS59166356U (enExample)

Also Published As

Publication number Publication date
JPS59166356U (ja) 1984-11-07

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