JPS6336129B2 - - Google Patents

Info

Publication number
JPS6336129B2
JPS6336129B2 JP56049860A JP4986081A JPS6336129B2 JP S6336129 B2 JPS6336129 B2 JP S6336129B2 JP 56049860 A JP56049860 A JP 56049860A JP 4986081 A JP4986081 A JP 4986081A JP S6336129 B2 JPS6336129 B2 JP S6336129B2
Authority
JP
Japan
Prior art keywords
film
electrode
deposited
deposited film
vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56049860A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57164521A (en
Inventor
Tatsuya Nakamura
Takeshi Hamabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP56049860A priority Critical patent/JPS57164521A/ja
Publication of JPS57164521A publication Critical patent/JPS57164521A/ja
Publication of JPS6336129B2 publication Critical patent/JPS6336129B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
JP56049860A 1981-04-01 1981-04-01 Method of removing deposited film Granted JPS57164521A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56049860A JPS57164521A (en) 1981-04-01 1981-04-01 Method of removing deposited film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56049860A JPS57164521A (en) 1981-04-01 1981-04-01 Method of removing deposited film

Publications (2)

Publication Number Publication Date
JPS57164521A JPS57164521A (en) 1982-10-09
JPS6336129B2 true JPS6336129B2 (enrdf_load_stackoverflow) 1988-07-19

Family

ID=12842800

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56049860A Granted JPS57164521A (en) 1981-04-01 1981-04-01 Method of removing deposited film

Country Status (1)

Country Link
JP (1) JPS57164521A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59202617A (ja) * 1983-04-30 1984-11-16 日本メクトロン株式会社 コンデンサ・モジユ−ルおよびその製造法
JPH0630331B2 (ja) * 1987-02-19 1994-04-20 太陽通信工業株式会社 高圧用コンデンサの製造装置

Also Published As

Publication number Publication date
JPS57164521A (en) 1982-10-09

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