JPS6336045U - - Google Patents
Info
- Publication number
- JPS6336045U JPS6336045U JP12995086U JP12995086U JPS6336045U JP S6336045 U JPS6336045 U JP S6336045U JP 12995086 U JP12995086 U JP 12995086U JP 12995086 U JP12995086 U JP 12995086U JP S6336045 U JPS6336045 U JP S6336045U
- Authority
- JP
- Japan
- Prior art keywords
- chip
- integrated circuit
- pad
- electrical characteristics
- manufacturing apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 238000005259 measurement Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Tests Of Electronic Circuits (AREA)
Description
第１図は本考案にかかる集積回路の製造装置の
一実施例の構成図、第２図は第１図の要部の構成
例を示した図、第３図は第１図装置の動作説明図
、第４図は集積回路の製造装置の従来例の構成図
である。
１……ステージ、２……ウエハ、４……信号発
生器、５……測定部、６……ＣＰＵ、１０……基
準値付与手段、１３……パターン、１４……ハー
ド・パツド。
Fig. 1 is a block diagram of an embodiment of an integrated circuit manufacturing apparatus according to the present invention, Fig. 2 is a diagram showing an example of the structure of the main parts of Fig. 1, and Fig. 3 is an explanation of the operation of the apparatus shown in Fig. 1. FIG. 4 is a configuration diagram of a conventional example of an integrated circuit manufacturing apparatus. DESCRIPTION OF SYMBOLS 1...Stage, 2...Wafer, 4...Signal generator, 5...Measurement section, 6...CPU, 10...Reference value provision means, 13...Pattern, 14...Hard pad.
Claims (1)
電気的特性を測定し、測定結果に応じてＩＣチツ
プの良否を判別する集積回路の製造装置において
、 前記ＩＣチツプの中で正常な電気的特性を有す
るものを用い、パツドは前記ＩＣチツプのパツド
よりも耐久性のある材料で構成されたものになつ
ているリフアレンス用ＩＣチツプを具備したこと
を特徴とする集積回路の製造装置。[Claims for Utility Model Registration] In an integrated circuit manufacturing apparatus that measures the electrical characteristics of each IC chip included in a wafer on a stage and determines whether the IC chip is good or bad according to the measurement results, An integrated circuit comprising a reference IC chip having normal electrical characteristics, the pad being made of a material more durable than the pad of the IC chip. manufacturing equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12995086U JPS6336045U (en) | 1986-08-26 | 1986-08-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12995086U JPS6336045U (en) | 1986-08-26 | 1986-08-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6336045U true JPS6336045U (en) | 1988-03-08 |
Family
ID=31026988
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12995086U Pending JPS6336045U (en) | 1986-08-26 | 1986-08-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6336045U (en) |
-
1986
- 1986-08-26 JP JP12995086U patent/JPS6336045U/ja active Pending
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