JPS6335989U - - Google Patents
Info
- Publication number
- JPS6335989U JPS6335989U JP1986129078U JP12907886U JPS6335989U JP S6335989 U JPS6335989 U JP S6335989U JP 1986129078 U JP1986129078 U JP 1986129078U JP 12907886 U JP12907886 U JP 12907886U JP S6335989 U JPS6335989 U JP S6335989U
- Authority
- JP
- Japan
- Prior art keywords
- column
- rotate
- shaped body
- stage
- precision moving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005259 measurement Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/1822—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors comprising means for aligning the optical axis
- G02B7/1824—Manual alignment
- G02B7/1825—Manual alignment made by screws, e.g. for laser mirrors
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Details Of Measuring And Other Instruments (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Machine Tool Units (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986129078U JPS6335989U (US20030204162A1-20031030-M00001.png) | 1986-08-25 | 1986-08-25 | |
| US07/539,614 US5101301A (en) | 1986-08-25 | 1990-06-18 | High-accuracy traveling table apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986129078U JPS6335989U (US20030204162A1-20031030-M00001.png) | 1986-08-25 | 1986-08-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6335989U true JPS6335989U (US20030204162A1-20031030-M00001.png) | 1988-03-08 |
Family
ID=15000530
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986129078U Pending JPS6335989U (US20030204162A1-20031030-M00001.png) | 1986-08-25 | 1986-08-25 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US5101301A (US20030204162A1-20031030-M00001.png) |
| JP (1) | JPS6335989U (US20030204162A1-20031030-M00001.png) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63140989A (ja) * | 1986-11-20 | 1988-06-13 | アテツク・コ−ポレ−シヨン | 位置決め装置 |
| JPH0475993U (US20030204162A1-20031030-M00001.png) * | 1990-11-13 | 1992-07-02 | ||
| JP2005191150A (ja) * | 2003-12-24 | 2005-07-14 | Nikon Corp | ステージ装置及び露光装置並びにデバイスの製造方法 |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4148627B2 (ja) * | 2000-03-30 | 2008-09-10 | 株式会社東芝 | 荷電粒子ビーム装置及び荷電粒子ビーム装置用試料室 |
| US20060124036A1 (en) * | 2004-11-01 | 2006-06-15 | Bing Xu | Ergodynamic desktop |
| EP2027966B1 (en) | 2007-08-20 | 2010-04-21 | Soonhan Engineering Corp. | Sample traveling stage with flexure mechanism module to absorb the deformation of the slide |
| KR100973530B1 (ko) * | 2007-08-20 | 2010-08-02 | 순환엔지니어링 주식회사 | 슬라이드변형흡수용 유연기구모듈을 이용한 시편이송장치 |
| NL1036735A1 (nl) * | 2008-04-10 | 2009-10-13 | Asml Holding Nv | Shear-layer chuck for lithographic apparatus. |
| CN103990998B (zh) * | 2014-05-20 | 2017-01-25 | 广东工业大学 | 基于应力刚化原理的刚度频率可调二维微动平台 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5790607A (en) * | 1980-11-28 | 1982-06-05 | Fujitsu Ltd | Optical glass fitting device |
| US4492356A (en) * | 1982-02-26 | 1985-01-08 | Hitachi, Ltd. | Precision parallel translation system |
| US4421386A (en) * | 1982-03-03 | 1983-12-20 | Honeywell Inc. | Stress-free window for laser applications |
| JPS6082215A (ja) * | 1983-10-07 | 1985-05-10 | Nippon Steel Corp | 圧延機ロ−ル圧下量の調整制御方法 |
| US4953965A (en) * | 1985-12-26 | 1990-09-04 | Toshiba Machine Company, Ltd. | High-accuracy traveling table apparatus |
-
1986
- 1986-08-25 JP JP1986129078U patent/JPS6335989U/ja active Pending
-
1990
- 1990-06-18 US US07/539,614 patent/US5101301A/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63140989A (ja) * | 1986-11-20 | 1988-06-13 | アテツク・コ−ポレ−シヨン | 位置決め装置 |
| JPH0475993U (US20030204162A1-20031030-M00001.png) * | 1990-11-13 | 1992-07-02 | ||
| JP2005191150A (ja) * | 2003-12-24 | 2005-07-14 | Nikon Corp | ステージ装置及び露光装置並びにデバイスの製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| US5101301A (en) | 1992-03-31 |
