JPS6335414U - - Google Patents

Info

Publication number
JPS6335414U
JPS6335414U JP13054586U JP13054586U JPS6335414U JP S6335414 U JPS6335414 U JP S6335414U JP 13054586 U JP13054586 U JP 13054586U JP 13054586 U JP13054586 U JP 13054586U JP S6335414 U JPS6335414 U JP S6335414U
Authority
JP
Japan
Prior art keywords
cleaning device
clean
room
blowing
local cleaning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13054586U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0248771Y2 (it
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13054586U priority Critical patent/JPH0248771Y2/ja
Publication of JPS6335414U publication Critical patent/JPS6335414U/ja
Application granted granted Critical
Publication of JPH0248771Y2 publication Critical patent/JPH0248771Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Filtering Of Dispersed Particles In Gases (AREA)
  • Ventilation (AREA)
JP13054586U 1986-08-27 1986-08-27 Expired JPH0248771Y2 (it)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13054586U JPH0248771Y2 (it) 1986-08-27 1986-08-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13054586U JPH0248771Y2 (it) 1986-08-27 1986-08-27

Publications (2)

Publication Number Publication Date
JPS6335414U true JPS6335414U (it) 1988-03-07
JPH0248771Y2 JPH0248771Y2 (it) 1990-12-20

Family

ID=31028146

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13054586U Expired JPH0248771Y2 (it) 1986-08-27 1986-08-27

Country Status (1)

Country Link
JP (1) JPH0248771Y2 (it)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009257680A (ja) * 2008-04-17 2009-11-05 Denso Corp 作業設備および作業設備における局所クリーンルーム
JP2013509294A (ja) * 2009-10-30 2013-03-14 スリーエム イノベイティブ プロパティズ カンパニー フィルタ装置及び使用方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4443350B2 (ja) * 2004-08-27 2010-03-31 株式会社大気社 空調設備

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009257680A (ja) * 2008-04-17 2009-11-05 Denso Corp 作業設備および作業設備における局所クリーンルーム
JP4525789B2 (ja) * 2008-04-17 2010-08-18 株式会社デンソー 作業設備および作業設備における局所クリーンルーム
JP2013509294A (ja) * 2009-10-30 2013-03-14 スリーエム イノベイティブ プロパティズ カンパニー フィルタ装置及び使用方法

Also Published As

Publication number Publication date
JPH0248771Y2 (it) 1990-12-20

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