JPS6335414U - - Google Patents

Info

Publication number
JPS6335414U
JPS6335414U JP13054586U JP13054586U JPS6335414U JP S6335414 U JPS6335414 U JP S6335414U JP 13054586 U JP13054586 U JP 13054586U JP 13054586 U JP13054586 U JP 13054586U JP S6335414 U JPS6335414 U JP S6335414U
Authority
JP
Japan
Prior art keywords
cleaning device
clean
room
blowing
local cleaning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13054586U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0248771Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13054586U priority Critical patent/JPH0248771Y2/ja
Publication of JPS6335414U publication Critical patent/JPS6335414U/ja
Application granted granted Critical
Publication of JPH0248771Y2 publication Critical patent/JPH0248771Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Filtering Of Dispersed Particles In Gases (AREA)
  • Ventilation (AREA)
JP13054586U 1986-08-27 1986-08-27 Expired JPH0248771Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13054586U JPH0248771Y2 (enrdf_load_stackoverflow) 1986-08-27 1986-08-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13054586U JPH0248771Y2 (enrdf_load_stackoverflow) 1986-08-27 1986-08-27

Publications (2)

Publication Number Publication Date
JPS6335414U true JPS6335414U (enrdf_load_stackoverflow) 1988-03-07
JPH0248771Y2 JPH0248771Y2 (enrdf_load_stackoverflow) 1990-12-20

Family

ID=31028146

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13054586U Expired JPH0248771Y2 (enrdf_load_stackoverflow) 1986-08-27 1986-08-27

Country Status (1)

Country Link
JP (1) JPH0248771Y2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009257680A (ja) * 2008-04-17 2009-11-05 Denso Corp 作業設備および作業設備における局所クリーンルーム
JP2013509294A (ja) * 2009-10-30 2013-03-14 スリーエム イノベイティブ プロパティズ カンパニー フィルタ装置及び使用方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4443350B2 (ja) * 2004-08-27 2010-03-31 株式会社大気社 空調設備

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009257680A (ja) * 2008-04-17 2009-11-05 Denso Corp 作業設備および作業設備における局所クリーンルーム
JP2013509294A (ja) * 2009-10-30 2013-03-14 スリーエム イノベイティブ プロパティズ カンパニー フィルタ装置及び使用方法

Also Published As

Publication number Publication date
JPH0248771Y2 (enrdf_load_stackoverflow) 1990-12-20

Similar Documents

Publication Publication Date Title
JPS6335414U (enrdf_load_stackoverflow)
JPH0273533U (enrdf_load_stackoverflow)
JPS60140034A (ja) クリ−ンル−ム
JPS60146247U (ja) 天井吹出器具
JPH0354339Y2 (enrdf_load_stackoverflow)
JPS6034279Y2 (ja) 無塵室装置
JPH0252032U (enrdf_load_stackoverflow)
JPH0230836U (enrdf_load_stackoverflow)
JPS61116943U (enrdf_load_stackoverflow)
JPS6238530U (enrdf_load_stackoverflow)
JPS62189532U (enrdf_load_stackoverflow)
JPH0427339U (enrdf_load_stackoverflow)
JPH01102640U (enrdf_load_stackoverflow)
JPS626631U (enrdf_load_stackoverflow)
JPS6277743U (enrdf_load_stackoverflow)
JPS61138947U (enrdf_load_stackoverflow)
JPS62112031U (enrdf_load_stackoverflow)
JPS642609U (enrdf_load_stackoverflow)
JPS62173621U (enrdf_load_stackoverflow)
JPS6189716U (enrdf_load_stackoverflow)
JPS61101314U (enrdf_load_stackoverflow)
JPH02109933U (enrdf_load_stackoverflow)
JPS6310122U (enrdf_load_stackoverflow)
JPS61153397U (enrdf_load_stackoverflow)
JPH0373856U (enrdf_load_stackoverflow)