JPH01102640U - - Google Patents

Info

Publication number
JPH01102640U
JPH01102640U JP20123587U JP20123587U JPH01102640U JP H01102640 U JPH01102640 U JP H01102640U JP 20123587 U JP20123587 U JP 20123587U JP 20123587 U JP20123587 U JP 20123587U JP H01102640 U JPH01102640 U JP H01102640U
Authority
JP
Japan
Prior art keywords
chamber
clean room
exhaust chamber
air conditioner
ceiling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20123587U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP20123587U priority Critical patent/JPH01102640U/ja
Publication of JPH01102640U publication Critical patent/JPH01102640U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
JP20123587U 1987-12-28 1987-12-28 Pending JPH01102640U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20123587U JPH01102640U (enrdf_load_stackoverflow) 1987-12-28 1987-12-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20123587U JPH01102640U (enrdf_load_stackoverflow) 1987-12-28 1987-12-28

Publications (1)

Publication Number Publication Date
JPH01102640U true JPH01102640U (enrdf_load_stackoverflow) 1989-07-11

Family

ID=31491605

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20123587U Pending JPH01102640U (enrdf_load_stackoverflow) 1987-12-28 1987-12-28

Country Status (1)

Country Link
JP (1) JPH01102640U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6176836A (ja) * 1984-09-19 1986-04-19 Hitachi Ltd 空気調和室

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6176836A (ja) * 1984-09-19 1986-04-19 Hitachi Ltd 空気調和室

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