JPH0255036U - - Google Patents

Info

Publication number
JPH0255036U
JPH0255036U JP13331688U JP13331688U JPH0255036U JP H0255036 U JPH0255036 U JP H0255036U JP 13331688 U JP13331688 U JP 13331688U JP 13331688 U JP13331688 U JP 13331688U JP H0255036 U JPH0255036 U JP H0255036U
Authority
JP
Japan
Prior art keywords
air
clean room
chamber
supply port
air supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13331688U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0444980Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13331688U priority Critical patent/JPH0444980Y2/ja
Publication of JPH0255036U publication Critical patent/JPH0255036U/ja
Application granted granted Critical
Publication of JPH0444980Y2 publication Critical patent/JPH0444980Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP13331688U 1988-10-12 1988-10-12 Expired JPH0444980Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13331688U JPH0444980Y2 (enrdf_load_stackoverflow) 1988-10-12 1988-10-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13331688U JPH0444980Y2 (enrdf_load_stackoverflow) 1988-10-12 1988-10-12

Publications (2)

Publication Number Publication Date
JPH0255036U true JPH0255036U (enrdf_load_stackoverflow) 1990-04-20
JPH0444980Y2 JPH0444980Y2 (enrdf_load_stackoverflow) 1992-10-22

Family

ID=31391066

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13331688U Expired JPH0444980Y2 (enrdf_load_stackoverflow) 1988-10-12 1988-10-12

Country Status (1)

Country Link
JP (1) JPH0444980Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0444980Y2 (enrdf_load_stackoverflow) 1992-10-22

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