JPS6334780B2 - - Google Patents

Info

Publication number
JPS6334780B2
JPS6334780B2 JP58118795A JP11879583A JPS6334780B2 JP S6334780 B2 JPS6334780 B2 JP S6334780B2 JP 58118795 A JP58118795 A JP 58118795A JP 11879583 A JP11879583 A JP 11879583A JP S6334780 B2 JPS6334780 B2 JP S6334780B2
Authority
JP
Japan
Prior art keywords
wavelength
deuterium lamp
lamp
reaction
necessary
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58118795A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6012128A (ja
Inventor
Atsushi Sekiguchi
Takashi Hiraga
Michio Nagasaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
Original Assignee
Canon Anelva Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Anelva Corp filed Critical Canon Anelva Corp
Priority to JP58118795A priority Critical patent/JPS6012128A/ja
Publication of JPS6012128A publication Critical patent/JPS6012128A/ja
Publication of JPS6334780B2 publication Critical patent/JPS6334780B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
    • B08B7/0057—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like by ultraviolet radiation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP58118795A 1983-06-30 1983-06-30 光化学的表面処理装置 Granted JPS6012128A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58118795A JPS6012128A (ja) 1983-06-30 1983-06-30 光化学的表面処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58118795A JPS6012128A (ja) 1983-06-30 1983-06-30 光化学的表面処理装置

Publications (2)

Publication Number Publication Date
JPS6012128A JPS6012128A (ja) 1985-01-22
JPS6334780B2 true JPS6334780B2 (enrdf_load_stackoverflow) 1988-07-12

Family

ID=14745293

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58118795A Granted JPS6012128A (ja) 1983-06-30 1983-06-30 光化学的表面処理装置

Country Status (1)

Country Link
JP (1) JPS6012128A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0169485B1 (en) * 1984-07-17 1991-12-04 Nec Corporation Method and apparatus for inducing photochemical reaction
JPH0622222B2 (ja) * 1984-09-18 1994-03-23 株式会社東芝 光処理装置
EP2177278B1 (en) * 2007-08-16 2012-06-13 Asahi Glass Company, Limited Method of cleaning substrate
CN102532578A (zh) * 2011-12-30 2012-07-04 北京工业大学 用氘灯uv辐射光对封边条表面处理与表面改性的工艺

Also Published As

Publication number Publication date
JPS6012128A (ja) 1985-01-22

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