JPS633452B2 - - Google Patents

Info

Publication number
JPS633452B2
JPS633452B2 JP53087157A JP8715778A JPS633452B2 JP S633452 B2 JPS633452 B2 JP S633452B2 JP 53087157 A JP53087157 A JP 53087157A JP 8715778 A JP8715778 A JP 8715778A JP S633452 B2 JPS633452 B2 JP S633452B2
Authority
JP
Japan
Prior art keywords
electron beam
slit
gas
electron
torr
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53087157A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5515205A (en
Inventor
Tadahiro Takigawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP8715778A priority Critical patent/JPS5515205A/ja
Publication of JPS5515205A publication Critical patent/JPS5515205A/ja
Publication of JPS633452B2 publication Critical patent/JPS633452B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
JP8715778A 1978-07-19 1978-07-19 Electronic beam exposure apparatus Granted JPS5515205A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8715778A JPS5515205A (en) 1978-07-19 1978-07-19 Electronic beam exposure apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8715778A JPS5515205A (en) 1978-07-19 1978-07-19 Electronic beam exposure apparatus

Publications (2)

Publication Number Publication Date
JPS5515205A JPS5515205A (en) 1980-02-02
JPS633452B2 true JPS633452B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-01-23

Family

ID=13907145

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8715778A Granted JPS5515205A (en) 1978-07-19 1978-07-19 Electronic beam exposure apparatus

Country Status (1)

Country Link
JP (1) JPS5515205A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58103135A (ja) * 1981-12-15 1983-06-20 Fujitsu Ltd 電子ビ−ム露光方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5856955B2 (ja) * 1976-06-02 1983-12-17 株式会社日立製作所 イオン打込み装置

Also Published As

Publication number Publication date
JPS5515205A (en) 1980-02-02

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