JPS6334468Y2 - - Google Patents
Info
- Publication number
- JPS6334468Y2 JPS6334468Y2 JP1099583U JP1099583U JPS6334468Y2 JP S6334468 Y2 JPS6334468 Y2 JP S6334468Y2 JP 1099583 U JP1099583 U JP 1099583U JP 1099583 U JP1099583 U JP 1099583U JP S6334468 Y2 JPS6334468 Y2 JP S6334468Y2
- Authority
- JP
- Japan
- Prior art keywords
- armature
- linear motor
- armature coil
- field magnet
- motor according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004020 conductor Substances 0.000 claims description 7
- 238000004804 winding Methods 0.000 description 6
- 238000001514 detection method Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011295 pitch Substances 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
Landscapes
- Linear Motors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1099583U JPS59119786U (ja) | 1983-01-31 | 1983-01-31 | 直流リニアモ−タ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1099583U JPS59119786U (ja) | 1983-01-31 | 1983-01-31 | 直流リニアモ−タ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59119786U JPS59119786U (ja) | 1984-08-13 |
| JPS6334468Y2 true JPS6334468Y2 (un) | 1988-09-13 |
Family
ID=30142420
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1099583U Granted JPS59119786U (ja) | 1983-01-31 | 1983-01-31 | 直流リニアモ−タ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59119786U (un) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4399984B2 (ja) * | 1998-03-13 | 2010-01-20 | 株式会社ニコン | リニアモータ製造方法、リニアモータ、該リニアモータを備えたステージ装置、および露光装置 |
-
1983
- 1983-01-31 JP JP1099583U patent/JPS59119786U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59119786U (ja) | 1984-08-13 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS6327946B2 (un) | ||
| JPS6334468Y2 (un) | ||
| JPS62207168A (ja) | 半導体直流リニアモ−タ | |
| JPS611255A (ja) | 有鉄芯型直流リニアモ−タ | |
| JPS59122359A (ja) | 直流発電機を有する直流リニアモ−タ | |
| JPS619161A (ja) | コアレスリニア直流モ−タ | |
| JPH07123345B2 (ja) | 可動マグネット形リニア直流モータ | |
| JPH087827Y2 (ja) | リニア直流ブラシレスモータ | |
| JPH087828Y2 (ja) | リニア直流ブラシレスモータ | |
| JPH0376107B2 (un) | ||
| JPH03104086U (un) | ||
| JPS611256A (ja) | 有鉄芯型直流リニアモ−タ | |
| JPS6393783U (un) | ||
| JPH03113982U (un) | ||
| JPH0739292U (ja) | リニア直流モ−タ | |
| JPS59122355A (ja) | ５極の界磁マグネツトを有する可動マグネツト型直流リニアモ−タ | |
| JPH0315250A (ja) | ｍ相軸方向空隙型コアレス整流子モータ | |
| JPH0434879U (un) | ||
| JPH03113983U (un) | ||
| JPS6270671U (un) | ||
| JPH0550990U (ja) | 可動マグネット形リニア直流モ−タ | |
| JPS62155764A (ja) | 有鉄心型直流リニアモ−タ | |
| JPH0739294U (ja) | リニア直流モ−タ | |
| JPH0739291U (ja) | リニア直流モ−タ | |
| JPH03104082U (un) |