JPS6334208Y2 - - Google Patents
Info
- Publication number
- JPS6334208Y2 JPS6334208Y2 JP16361482U JP16361482U JPS6334208Y2 JP S6334208 Y2 JPS6334208 Y2 JP S6334208Y2 JP 16361482 U JP16361482 U JP 16361482U JP 16361482 U JP16361482 U JP 16361482U JP S6334208 Y2 JPS6334208 Y2 JP S6334208Y2
- Authority
- JP
- Japan
- Prior art keywords
- gate valve
- sample
- chamber
- wall
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000523 sample Substances 0.000 description 61
- 238000011109 contamination Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16361482U JPS5966850U (ja) | 1982-10-27 | 1982-10-27 | 試料導入装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16361482U JPS5966850U (ja) | 1982-10-27 | 1982-10-27 | 試料導入装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5966850U JPS5966850U (ja) | 1984-05-04 |
| JPS6334208Y2 true JPS6334208Y2 (cg-RX-API-DMAC10.html) | 1988-09-12 |
Family
ID=30358946
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16361482U Granted JPS5966850U (ja) | 1982-10-27 | 1982-10-27 | 試料導入装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5966850U (cg-RX-API-DMAC10.html) |
-
1982
- 1982-10-27 JP JP16361482U patent/JPS5966850U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5966850U (ja) | 1984-05-04 |
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