JPS6333952Y2 - - Google Patents

Info

Publication number
JPS6333952Y2
JPS6333952Y2 JP1981003633U JP363381U JPS6333952Y2 JP S6333952 Y2 JPS6333952 Y2 JP S6333952Y2 JP 1981003633 U JP1981003633 U JP 1981003633U JP 363381 U JP363381 U JP 363381U JP S6333952 Y2 JPS6333952 Y2 JP S6333952Y2
Authority
JP
Japan
Prior art keywords
door
heat
vacuum
seal
seal rubber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1981003633U
Other languages
English (en)
Japanese (ja)
Other versions
JPS57121666U (ru
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1981003633U priority Critical patent/JPS6333952Y2/ja
Publication of JPS57121666U publication Critical patent/JPS57121666U/ja
Application granted granted Critical
Publication of JPS6333952Y2 publication Critical patent/JPS6333952Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Furnace Housings, Linings, Walls, And Ceilings (AREA)
  • Furnace Details (AREA)
JP1981003633U 1981-01-14 1981-01-14 Expired JPS6333952Y2 (ru)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981003633U JPS6333952Y2 (ru) 1981-01-14 1981-01-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981003633U JPS6333952Y2 (ru) 1981-01-14 1981-01-14

Publications (2)

Publication Number Publication Date
JPS57121666U JPS57121666U (ru) 1982-07-28
JPS6333952Y2 true JPS6333952Y2 (ru) 1988-09-08

Family

ID=29802073

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981003633U Expired JPS6333952Y2 (ru) 1981-01-14 1981-01-14

Country Status (1)

Country Link
JP (1) JPS6333952Y2 (ru)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5656400B2 (ja) * 2009-12-28 2015-01-21 キヤノンアネルバ株式会社 真空熱処理装置および半導体デバイスの製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5920638A (ja) * 1982-07-27 1984-02-02 Nippon Sekisoo Kogyo Kk 配設部材に取付け片を形成する方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5920638A (ja) * 1982-07-27 1984-02-02 Nippon Sekisoo Kogyo Kk 配設部材に取付け片を形成する方法

Also Published As

Publication number Publication date
JPS57121666U (ru) 1982-07-28

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