JPS6333952Y2 - - Google Patents
Info
- Publication number
- JPS6333952Y2 JPS6333952Y2 JP1981003633U JP363381U JPS6333952Y2 JP S6333952 Y2 JPS6333952 Y2 JP S6333952Y2 JP 1981003633 U JP1981003633 U JP 1981003633U JP 363381 U JP363381 U JP 363381U JP S6333952 Y2 JPS6333952 Y2 JP S6333952Y2
- Authority
- JP
- Japan
- Prior art keywords
- door
- heat
- vacuum
- seal
- seal rubber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010438 heat treatment Methods 0.000 claims description 12
- 238000001816 cooling Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000638 solvent extraction Methods 0.000 description 1
Landscapes
- Furnace Housings, Linings, Walls, And Ceilings (AREA)
- Furnace Details (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1981003633U JPS6333952Y2 (ru) | 1981-01-14 | 1981-01-14 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1981003633U JPS6333952Y2 (ru) | 1981-01-14 | 1981-01-14 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57121666U JPS57121666U (ru) | 1982-07-28 |
JPS6333952Y2 true JPS6333952Y2 (ru) | 1988-09-08 |
Family
ID=29802073
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1981003633U Expired JPS6333952Y2 (ru) | 1981-01-14 | 1981-01-14 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6333952Y2 (ru) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5656400B2 (ja) * | 2009-12-28 | 2015-01-21 | キヤノンアネルバ株式会社 | 真空熱処理装置および半導体デバイスの製造方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5920638A (ja) * | 1982-07-27 | 1984-02-02 | Nippon Sekisoo Kogyo Kk | 配設部材に取付け片を形成する方法 |
-
1981
- 1981-01-14 JP JP1981003633U patent/JPS6333952Y2/ja not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5920638A (ja) * | 1982-07-27 | 1984-02-02 | Nippon Sekisoo Kogyo Kk | 配設部材に取付け片を形成する方法 |
Also Published As
Publication number | Publication date |
---|---|
JPS57121666U (ru) | 1982-07-28 |
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