JPS6333952Y2 - - Google Patents

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Publication number
JPS6333952Y2
JPS6333952Y2 JP1981003633U JP363381U JPS6333952Y2 JP S6333952 Y2 JPS6333952 Y2 JP S6333952Y2 JP 1981003633 U JP1981003633 U JP 1981003633U JP 363381 U JP363381 U JP 363381U JP S6333952 Y2 JPS6333952 Y2 JP S6333952Y2
Authority
JP
Japan
Prior art keywords
door
heat
vacuum
seal
seal rubber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1981003633U
Other languages
Japanese (ja)
Other versions
JPS57121666U (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1981003633U priority Critical patent/JPS6333952Y2/ja
Publication of JPS57121666U publication Critical patent/JPS57121666U/ja
Application granted granted Critical
Publication of JPS6333952Y2 publication Critical patent/JPS6333952Y2/ja
Expired legal-status Critical Current

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  • Furnace Housings, Linings, Walls, And Ceilings (AREA)
  • Furnace Details (AREA)

Description

【考案の詳細な説明】 本考案は金属熱処理用真空炉において2室以上
の各室を仕切る中間扉装置に関するものである。
[Detailed Description of the Invention] The present invention relates to an intermediate door device for partitioning two or more chambers in a vacuum furnace for metal heat treatment.

従来のこの種、中間扉装置としては、第1図に
示す如く、炉本体a内に加熱室bを設け、被熱処
理物を加熱室bで加熱処理するようにした構成に
おいて上記加熱室bを開閉させる耐熱扉(防熱
扉)cを、シリンダdにより昇降する開閉用バー
eにリンクfを介して連結すると共に、炉本体a
内に設けられる他の室とを仕切る真空シール扉g
を、シリンダhにより昇降する開閉用バーiにリ
ンクjを介して連結し、耐熱扉cと真空シール扉
gとは別個のシリンダd,hにて独立に開閉動作
されるようにし、真空シール扉gは炉本体aの受
け座k部にシールゴムlを介在させてシールされ
るようにしてある。
As shown in FIG. 1, a conventional intermediate door device of this type has a configuration in which a heating chamber b is provided in a furnace body a, and the object to be heat-treated is heat-treated in the heating chamber b. A heat-resistant door (heat-insulating door) c to be opened and closed is connected via a link f to an opening/closing bar e that is raised and lowered by a cylinder d, and the furnace body a
Vacuum seal door g that separates the interior from other rooms
is connected via a link j to an opening/closing bar i that is raised and lowered by a cylinder h, and the heat-resistant door c and the vacuum seal door g are opened and closed independently by separate cylinders d and h, and the vacuum seal door g is sealed by interposing a sealing rubber l to the receiving seat k of the furnace body a.

しかし、この従来方式では、断熱扉と真空シー
ル扉は独立していて開閉が別個に行われているた
め、機構が複雑であり、スペースも多く必要とな
つて中間扉部の寸法が大きくなり、炉全長も長く
なる欠点がある。又、真空シール扉gを開けた場
合、シールゴムlが露出し、隣接の加熱室からの
輻射熱によりシールゴムが損われ、そのためシー
ルゴムの頻繁な交換作業が必要であつた。
However, in this conventional method, the insulation door and the vacuum seal door are independent and open and close separately, so the mechanism is complex, a lot of space is required, and the size of the intermediate door becomes large. The disadvantage is that the overall length of the furnace is also longer. Furthermore, when the vacuum seal door g is opened, the seal rubber l is exposed and is damaged by radiant heat from the adjacent heating chamber, requiring frequent replacement of the seal rubber.

本考案は、かかる欠点を除去し、単純な構成で
且つシールゴムの長寿命化を図れるようにしよう
とするもので、2以上の熱処理室を有し室と室と
の間に真空シール扉と耐熱扉とからなる中間扉を
有する真空炉において、上記真空シール扉用のシ
ールゴム全面を熱遮蔽し得るよう複数に分割した
熱遮蔽板を互いに別個に移動可能に備え、上記真
空シール扉及び耐熱扉の開閉と、上記各熱遮蔽板
のシールゴム前面への移動及び退避とを連動させ
たことを特徴とするものである。
The present invention aims to eliminate such drawbacks and to extend the life of the seal rubber with a simple structure.It has two or more heat treatment chambers, and a vacuum seal door is installed between the chambers. In a vacuum furnace having an intermediate door consisting of a door, a heat shielding plate divided into a plurality of parts is movable separately from each other so as to heat-shield the entire surface of the seal rubber for the vacuum sealing door, and The present invention is characterized in that the opening/closing and the movement and retraction of each of the heat shielding plates to the front surface of the seal rubber are linked.

以下、図面にもとづき本考案の実施例を説明す
る。
Embodiments of the present invention will be described below based on the drawings.

第2図は本考案の一実施例図で、2室式真空炉
の中間扉として採用した全体を示すものである。
すなわち、高温耐火物3を真空容器1内に有して
形成した加熱室2と、フアン5を備えたガスフア
ン冷却室4と、両室2,4間の中間扉部分6で区
画した2室ガスフアン冷却真空炉において、加熱
室2の高温耐火物3の一端を開閉させる耐熱扉
(防熱扉)7を、真空容器1と一体の受け座8に
当接して真空容器1をシールするための真空シー
ル扉9に連結し、シリンダ10により昇降させら
れる鉛直の開閉用バー11に、上記真空シール扉
9を開閉用リンク12を介して連結せしめ、シリ
ンダ10の操作により真空シール扉9と耐熱扉7
とが同時に開閉されるようにした中間扉部分6を
構成する。
FIG. 2 is a diagram showing one embodiment of the present invention, and shows the entire structure adopted as an intermediate door of a two-chamber vacuum furnace.
That is, a heating chamber 2 formed by having a high-temperature refractory 3 in a vacuum container 1, a gas fan cooling chamber 4 equipped with a fan 5, and a two-chamber gas fan partitioned by an intermediate door portion 6 between both chambers 2 and 4. In a cooling vacuum furnace, a vacuum seal is used to seal the vacuum container 1 by bringing a heat-resistant door 7 that opens and closes one end of the high-temperature refractory 3 of the heating chamber 2 into contact with a receiving seat 8 that is integrated with the vacuum container 1. The vacuum seal door 9 is connected to a vertical opening/closing bar 11 connected to the door 9 and raised and lowered by a cylinder 10 via an opening/closing link 12, and the vacuum seal door 9 and the heat-resistant door 7 are opened by operating the cylinder 10.
This constitutes an intermediate door portion 6 which can be opened and closed at the same time.

上記構成とした中間扉部分6は、第3図に示す
如き真空容器1内に前部加熱室2aと後部加熱室
2bを有する連続式真空炉の中間扉部分としても
採用できる。
The intermediate door portion 6 configured as described above can also be employed as an intermediate door portion of a continuous vacuum furnace having a front heating chamber 2a and a rear heating chamber 2b in the vacuum vessel 1 as shown in FIG.

本考案の中間扉装置は、上記構成において、真
空容器1と一体の受け座8に取り付けたシールゴ
ム13を、扉7,9の開放時に熱遮蔽するように
したことに特徴を有する。
The intermediate door device of the present invention is characterized in that, in the above configuration, the seal rubber 13 attached to the receiving seat 8 integrated with the vacuum container 1 is designed to shield heat when the doors 7 and 9 are opened.

すなわち、第4図乃至第6図に示す如く、受け
座8の開口部に沿つて形成した凹溝内にシールゴ
ム13が嵌合してあり、該シールゴム13の前面
を真空シール扉9の開放時に覆うための熱遮蔽板
を、数分割(実施例では3分割)14a,14
b,14cして備え、左右のL形の熱遮蔽板14
aと14bは、斜めに配したガイド15,16に
沿いシリンダ17,18により受け座8と平行に
斜め上下方向へ開閉されるようにし、又下部の熱
遮蔽板14cはレバー装置等の適宜の方法で上下
動させられるようにし、シリンダ10(第2,3
図参照)の作動で開閉用バー11が上昇させら
れ、リンク12を介して真空シール扉9が開くと
き、同時にシリンダ17,18が伸長されあるい
はレバー装置等が作動させられ、又真空シール扉
9を閉じる動作が開始すると自動的に熱遮蔽板1
4a,14b,14cがシールゴム13の前面よ
り退避するように電気的に接続させる等により連
動させる。19は被熱処理物である。
That is, as shown in FIGS. 4 to 6, a seal rubber 13 is fitted into a groove formed along the opening of the receiving seat 8, and the front surface of the seal rubber 13 is inserted into the groove when the vacuum seal door 9 is opened. The heat shielding plate for covering is divided into several parts (in the example, it is divided into three parts) 14a, 14
b, 14c, and left and right L-shaped heat shielding plates 14
a and 14b are opened and closed diagonally up and down in parallel with the receiving seat 8 by cylinders 17 and 18 along diagonally arranged guides 15 and 16, and the lower heat shield plate 14c is opened and closed by an appropriate lever device or the like. The cylinder 10 (second and third
When the opening/closing bar 11 is raised and the vacuum seal door 9 is opened via the link 12, the cylinders 17 and 18 are simultaneously extended or a lever device or the like is actuated, and the vacuum seal door 9 is also extended. When the operation to close the heat shield plate 1 starts, the heat shield plate 1 is automatically closed.
4a, 14b, and 14c are interlocked by being electrically connected so that they are retracted from the front surface of the seal rubber 13. 19 is an object to be heat treated.

上記構成としてあるので、第2図や第3図にお
いて、加熱室2,2a内で被熱処理物19が熱処
理されるまでは、耐熱扉7及び真空シール扉9は
第2図、第3図の如く閉じられており、真空シー
ル扉用のシールゴム13は第4図の如く真空シー
ル扉9閉時の真空シールを行つている。
With the above configuration, the heat-resistant door 7 and the vacuum seal door 9 in FIGS. The seal rubber 13 for the vacuum seal door performs a vacuum seal when the vacuum seal door 9 is closed as shown in FIG.

被熱処理物19が熱処理されると、扉7及び9
を開けるが、本考案では1本の開閉用バー11で
同時に両扉7,9を開けるので、開閉用バー11
やシリンダ10は1本でよく、それだけ中間扉部
分6の幅寸法を従来方式に比して狭くすることが
でき、炉全長も短かくすることができる。
When the heat-treated object 19 is heat-treated, the doors 7 and 9
However, in the present invention, both doors 7 and 9 are opened at the same time with one opening/closing bar 11, so the opening/closing bar 11
Since only one cylinder 10 is required, the width of the intermediate door portion 6 can be made narrower than in the conventional system, and the overall length of the furnace can also be shortened.

シリンダ10により開閉用バー11を上昇させ
始めると、これまで退避していた熱遮蔽板14
a,14bの移動用シリンダ17,18及び熱遮
蔽板14cの作動用レバー装置等に動作指令を与
え、扉7,9の開動作と併行して各熱遮蔽板14
a,14b,14cをシールゴム13方向へ移動
させる。熱遮蔽板14aと14bはガイド15,
16に沿いながら斜め方向より移動させられて第
6図の如く一致させられ、又熱遮蔽板14cは上
昇させられてシールゴム13の前面にセツトされ
る。これにより真空シール扉9、耐熱扉7の開時
に隣接の加熱室等の高温部分及び加熱されている
耐熱扉7の内壁と被熱処理物からの輻射熱から熱
遮蔽でき、シールゴム13を保護することができ
る。
When the cylinder 10 starts to raise the opening/closing bar 11, the heat shielding plate 14, which had been evacuated until now,
An operation command is given to the moving cylinders 17 and 18 of a and 14b and the operating lever device of the heat shield plate 14c, and each heat shield plate 14 is opened in parallel with the opening operation of the doors 7 and 9.
a, 14b, and 14c are moved toward the seal rubber 13. The heat shield plates 14a and 14b are connected to the guide 15,
The heat shield plate 14c is moved obliquely along the line 16 and brought into alignment as shown in FIG. As a result, when the vacuum seal door 9 and the heat-resistant door 7 are opened, the heat can be shielded from the radiant heat from the high-temperature parts of the adjacent heating chamber, the heated inner wall of the heat-resistant door 7, and the object to be heat-treated, and the seal rubber 13 can be protected. can.

尚、熱遮蔽板14a,14bはシリンダ17,
18により移動させるようにしたが、他の手段に
よることは任意であり、又扉7,9の開動作と電
気的に関連させて熱遮蔽板14a,14b,14
cを動作させる以外に機械的に連動させるように
することもできる。又熱遮蔽板の分割は3分割以
外でもよい。又、上記の実施例では、シールゴム
13を受け座8に取り付けた場合を示したが、シ
ールゴム13を真空シール扉9に取り付けること
も可能である。この場合は真空シール扉9の開時
にシールゴムのうち下側に位置している部分を遮
蔽板14でカバーさせるようにすれば充分である
が、シールゴムの前面すべてをカバーさせるよう
にしてもよい。この熱遮蔽板は扉9の開閉と連動
して移動できるようにする。
Note that the heat shield plates 14a and 14b are connected to the cylinder 17,
Although the heat shield plates 14a, 14b, 14 are moved by the heat shield plates 14a, 14b, 14 in electrical connection with the opening operation of the doors 7, 9, it is optional to use other means.
In addition to operating c, it is also possible to make them mechanically interlock. Further, the division of the heat shield plate may be other than three. Further, in the above embodiment, the seal rubber 13 is attached to the receiving seat 8, but it is also possible to attach the seal rubber 13 to the vacuum seal door 9. In this case, it is sufficient to cover the lower portion of the seal rubber with the shielding plate 14 when the vacuum seal door 9 is opened, but it is also possible to cover the entire front surface of the seal rubber. This heat shield plate can be moved in conjunction with the opening and closing of the door 9.

以上述べた如く本考案の装置によれば、複数に
分割した熱遮蔽板と別個に移動可能とし、真空シ
ール扉等の開閉と連動させているので高温にさら
される真空シールゴム全面を保護することができ
るので、高価なシールゴムの寿命を延ばすことが
でき、これによつてシールゴムの交換作業も省
け、保守及び設備の稼動効果をも高めることがで
きる。
As described above, according to the device of the present invention, the heat shield plate is divided into multiple parts and is movable separately, and is linked to the opening and closing of the vacuum seal door, etc., so that the entire surface of the vacuum seal rubber exposed to high temperatures can be protected. As a result, the life of the expensive seal rubber can be extended, thereby eliminating the need to replace the seal rubber, and improving the efficiency of maintenance and equipment operation.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来の真空炉の中間扉部分の説明図、
第2図は本考案の装置を採用する2室式真空炉の
断面図、第3図は同じく連続式真空炉の断面図、
第4図は第2図及び第3図におけるA部の拡大
図、第5図は扉開時のシールゴムの保護の状態を
示す断面図、第6図は第5図のB矢視図である。 1……真空容器、2……加熱室、7……耐熱
扉、9……真空シール扉、10……シリンダ、1
1……開閉用バー、13……シールゴム、14
a,14b,14c……熱遮蔽板、15,16…
…ガイド、17,18……シリンダ。
Figure 1 is an explanatory diagram of the intermediate door of a conventional vacuum furnace.
Fig. 2 is a sectional view of a two-chamber vacuum furnace employing the device of the present invention, and Fig. 3 is a sectional view of a continuous vacuum furnace.
Figure 4 is an enlarged view of part A in Figures 2 and 3, Figure 5 is a sectional view showing the state of protection of the seal rubber when the door is opened, and Figure 6 is a view taken in the direction of arrow B in Figure 5. . 1... Vacuum container, 2... Heating chamber, 7... Heat resistant door, 9... Vacuum seal door, 10... Cylinder, 1
1... Opening/closing bar, 13... Seal rubber, 14
a, 14b, 14c...heat shielding plate, 15, 16...
...Guide, 17,18...Cylinder.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 2以上の熱処理室を有し室と室との間に真空シ
ール扉と耐熱扉とからなる中間扉を有する真空炉
において、上記真空シール扉用のシールゴム全面
を熱遮蔽し得るよう複数に分割した熱遮蔽板を互
いに別個に移動可能に備え、上記真空シール扉及
び耐熱扉の開閉と、上記各熱遮蔽板のシールゴム
前面への移動及び退避とを連動させたことを特徴
とする真空炉用中間扉装置。
In a vacuum furnace having two or more heat treatment chambers and an intermediate door consisting of a vacuum seal door and a heat-resistant door between the chambers, the entire surface of the seal rubber for the vacuum seal door is divided into multiple parts so as to be able to shield heat. An intermediate for a vacuum furnace, characterized in that the heat shield plates are movable separately from each other, and the opening and closing of the vacuum seal door and the heat-resistant door are linked with the movement and retreat of each of the heat shield plates to the front surface of the seal rubber. door device.
JP1981003633U 1981-01-14 1981-01-14 Expired JPS6333952Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981003633U JPS6333952Y2 (en) 1981-01-14 1981-01-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981003633U JPS6333952Y2 (en) 1981-01-14 1981-01-14

Publications (2)

Publication Number Publication Date
JPS57121666U JPS57121666U (en) 1982-07-28
JPS6333952Y2 true JPS6333952Y2 (en) 1988-09-08

Family

ID=29802073

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981003633U Expired JPS6333952Y2 (en) 1981-01-14 1981-01-14

Country Status (1)

Country Link
JP (1) JPS6333952Y2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5656400B2 (en) * 2009-12-28 2015-01-21 キヤノンアネルバ株式会社 Vacuum heat treatment apparatus and semiconductor device manufacturing method

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5920638A (en) * 1982-07-27 1984-02-02 Nippon Sekisoo Kogyo Kk Method for forming fitting piece on arrangement member

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5920638A (en) * 1982-07-27 1984-02-02 Nippon Sekisoo Kogyo Kk Method for forming fitting piece on arrangement member

Also Published As

Publication number Publication date
JPS57121666U (en) 1982-07-28

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