JPS6333626U - - Google Patents

Info

Publication number
JPS6333626U
JPS6333626U JP12750686U JP12750686U JPS6333626U JP S6333626 U JPS6333626 U JP S6333626U JP 12750686 U JP12750686 U JP 12750686U JP 12750686 U JP12750686 U JP 12750686U JP S6333626 U JPS6333626 U JP S6333626U
Authority
JP
Japan
Prior art keywords
turntable
semiconductor wafer
top surface
protection plate
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12750686U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12750686U priority Critical patent/JPS6333626U/ja
Publication of JPS6333626U publication Critical patent/JPS6333626U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP12750686U 1986-08-20 1986-08-20 Pending JPS6333626U (US06265458-20010724-C00056.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12750686U JPS6333626U (US06265458-20010724-C00056.png) 1986-08-20 1986-08-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12750686U JPS6333626U (US06265458-20010724-C00056.png) 1986-08-20 1986-08-20

Publications (1)

Publication Number Publication Date
JPS6333626U true JPS6333626U (US06265458-20010724-C00056.png) 1988-03-04

Family

ID=31022323

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12750686U Pending JPS6333626U (US06265458-20010724-C00056.png) 1986-08-20 1986-08-20

Country Status (1)

Country Link
JP (1) JPS6333626U (US06265458-20010724-C00056.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02138960A (ja) * 1988-11-18 1990-05-28 Sakai Eng Kk 液流式生化学反応装置
JPH05123555A (ja) * 1991-11-05 1993-05-21 Idec Izumi Corp 微細気泡発生方法および微細気泡発生装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02138960A (ja) * 1988-11-18 1990-05-28 Sakai Eng Kk 液流式生化学反応装置
JPH05123555A (ja) * 1991-11-05 1993-05-21 Idec Izumi Corp 微細気泡発生方法および微細気泡発生装置

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