JPS6333146Y2 - - Google Patents
Info
- Publication number
- JPS6333146Y2 JPS6333146Y2 JP7613481U JP7613481U JPS6333146Y2 JP S6333146 Y2 JPS6333146 Y2 JP S6333146Y2 JP 7613481 U JP7613481 U JP 7613481U JP 7613481 U JP7613481 U JP 7613481U JP S6333146 Y2 JPS6333146 Y2 JP S6333146Y2
- Authority
- JP
- Japan
- Prior art keywords
- strain
- pressure
- gauge
- crystal
- bellows
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000013078 crystal Substances 0.000 claims description 32
- 230000004044 response Effects 0.000 claims description 10
- 230000008859 change Effects 0.000 claims description 9
- 239000002131 composite material Substances 0.000 claims description 7
- 239000010453 quartz Substances 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 239000000853 adhesive Substances 0.000 description 6
- 230000001070 adhesive effect Effects 0.000 description 6
- 230000008878 coupling Effects 0.000 description 5
- 238000010168 coupling process Methods 0.000 description 5
- 238000005859 coupling reaction Methods 0.000 description 5
- 230000008901 benefit Effects 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7613481U JPS6333146Y2 (enrdf_load_stackoverflow) | 1981-05-26 | 1981-05-26 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7613481U JPS6333146Y2 (enrdf_load_stackoverflow) | 1981-05-26 | 1981-05-26 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57188139U JPS57188139U (enrdf_load_stackoverflow) | 1982-11-29 |
JPS6333146Y2 true JPS6333146Y2 (enrdf_load_stackoverflow) | 1988-09-05 |
Family
ID=29871840
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7613481U Expired JPS6333146Y2 (enrdf_load_stackoverflow) | 1981-05-26 | 1981-05-26 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6333146Y2 (enrdf_load_stackoverflow) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6263828A (ja) * | 1985-09-06 | 1987-03-20 | Yokogawa Electric Corp | 振動式トランスジューサ |
-
1981
- 1981-05-26 JP JP7613481U patent/JPS6333146Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS57188139U (enrdf_load_stackoverflow) | 1982-11-29 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US4751849A (en) | Force-sensitive resonator load cell | |
US20100018318A1 (en) | Pressure sensor | |
US8667849B2 (en) | Pressure sensor | |
JP3416887B2 (ja) | 結合力変換器および温度センサ | |
US7895896B2 (en) | Pressure sensor | |
US4382385A (en) | Digital differential pressure transducer | |
JPS604836A (ja) | 振動クオ−ツダイアフラム圧力感知器 | |
JPS59126261A (ja) | はり共振器力変換器を有する加速度計 | |
JPS5856425B2 (ja) | 力変換機構 | |
CN101281071A (zh) | 一种双谐振梁式微机械压力传感器 | |
JPH0666655A (ja) | 共振圧力センサー | |
JP2012093135A (ja) | 圧力センサー | |
Cheng et al. | Design and fabrication of a resonant pressure sensor by combination of DETF quartz resonator and silicon diaphragm | |
JP3982564B2 (ja) | モノリシック加速度計量トランスデューサ | |
EP0777116B1 (en) | Pressure sensor with rectangular layers and transverse transducer | |
JP2012037415A (ja) | 圧力センサー | |
JPS6333146Y2 (enrdf_load_stackoverflow) | ||
US6269696B1 (en) | Temperature compensated oscillating accelerometer with force multiplier | |
JPS62124462A (ja) | 振動要素付き加速度計 | |
Paros | Precision Digital Pressure | |
JPS6333145Y2 (enrdf_load_stackoverflow) | ||
Wang et al. | Effect of transverse force on the performance of quartz resonator force sensors | |
JPS6110197Y2 (enrdf_load_stackoverflow) | ||
JPS5856428B2 (ja) | 水晶振動子を用いた圧力センサ | |
JPS6333144Y2 (enrdf_load_stackoverflow) |