JPS63318015A - Oxide superconductor and its manufacture - Google Patents
Oxide superconductor and its manufactureInfo
- Publication number
- JPS63318015A JPS63318015A JP62151209A JP15120987A JPS63318015A JP S63318015 A JPS63318015 A JP S63318015A JP 62151209 A JP62151209 A JP 62151209A JP 15120987 A JP15120987 A JP 15120987A JP S63318015 A JPS63318015 A JP S63318015A
- Authority
- JP
- Japan
- Prior art keywords
- superconductor
- exposed portion
- passivation film
- ceramics
- oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002887 superconductor Substances 0.000 title claims abstract description 21
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- 239000000463 material Substances 0.000 claims abstract description 23
- 238000002161 passivation Methods 0.000 claims abstract description 15
- 239000000919 ceramic Substances 0.000 claims abstract description 13
- 238000010304 firing Methods 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 2
- 230000002542 deteriorative effect Effects 0.000 abstract description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 1
- 229910052788 barium Inorganic materials 0.000 description 4
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 229910052727 yttrium Inorganic materials 0.000 description 4
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 229920001721 polyimide Polymers 0.000 description 3
- BTGZYWWSOPEHMM-UHFFFAOYSA-N [O].[Cu].[Y].[Ba] Chemical compound [O].[Cu].[Y].[Ba] BTGZYWWSOPEHMM-UHFFFAOYSA-N 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
- 229920005575 poly(amic acid) Polymers 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- 229910052706 scandium Inorganic materials 0.000 description 2
- SIXSYDAISGFNSX-UHFFFAOYSA-N scandium atom Chemical compound [Sc] SIXSYDAISGFNSX-UHFFFAOYSA-N 0.000 description 2
- 229910052712 strontium Inorganic materials 0.000 description 2
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 2
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 1
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- 229910017583 La2O Inorganic materials 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 239000011575 calcium Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000002195 synergetic effect Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
- H10N60/0268—Manufacture or treatment of devices comprising copper oxide
- H10N60/0661—Processes performed after copper oxide formation, e.g. patterning
- H10N60/0716—Passivating
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Structure Of Printed Boards (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は酸化物超電導体とその製法に係り、特に高温超
電導特性の長寿命化を図る酸化物超電導体とその製法に
関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an oxide superconductor and a method for producing the same, and particularly to an oxide superconductor and a method for producing the same that aim to extend the life of high-temperature superconducting properties.
従来、酸化物系の超電導材料及びその製法については、
ツァイト シュリフト フユーアフイジ−ク B64
(1987年)第189頁から第193頁(Zeits
chift fur Physik B 64 (19
86)PP189−193) 、サイエンス235(1
987年)第567頁から第569頁(Science
、 235 (1987) P P 567−569)
、及びフィジカル レヴユー レターズ58 (198
7年)第908頁から第910頁(Physical
Review Letters 58 (1987)
PP (908−910)などにおいて論じられている
。Conventionally, regarding oxide-based superconducting materials and their manufacturing methods,
Zeit Schrift Fuyufujiku B64
(1987) pp. 189-193 (Zeits
chift fur Physik B 64 (19
86) PP189-193), Science 235(1)
987), pp. 567 to 569 (Science
, 235 (1987) P P 567-569)
, and Physical Revue Letters 58 (198
7th year) pages 908 to 910 (Physical
Review Letters 58 (1987)
PP (908-910) and others.
ペロブスカイト系セラミクス超電導体の超電導転移温度
は一般に従来の合金系のものより高温となる反面、超電
導特性を長時間維持することは困難であった。Although the superconducting transition temperature of perovskite ceramic superconductors is generally higher than that of conventional alloys, it has been difficult to maintain superconducting properties for a long time.
本発明の目的は超電導特性を長時間維持させることの可
能な酸化物超電導体とその製法を提供することにある。An object of the present invention is to provide an oxide superconductor that can maintain superconducting properties for a long time and a method for producing the same.
上記目的を達成すべく、本発明の酸化物超電導体はペロ
ブスカイト系セラミクスから成る超電導体の露出部分を
パッシベーション膜にて被覆したことを特徴とする。In order to achieve the above object, the oxide superconductor of the present invention is characterized in that the exposed portion of the superconductor made of perovskite ceramics is covered with a passivation film.
上記構成のものは、ペロブスカイト系セラミクスから成
る超電導体のグリーンボディ若しくは焼結体の少なくと
も露出部分にパッシベーション素材を塗布して後、この
素材を焼成することにより前記露出部分にパッシベーシ
ョン膜を形成して達成される。In the above configuration, a passivation material is applied to at least the exposed portion of a green body or sintered body of a superconductor made of perovskite ceramics, and then this material is fired to form a passivation film on the exposed portion. achieved.
パッシベーション膜は超電導セラミクスの多孔露出部へ
の水分等の浸入を防止すると共に酸化物の安定性に貢献
する。この作用の相乗効果により超電導体の吸湿劣化等
が防止されるから超電導体の長寿命化が図れる。The passivation film prevents moisture from entering the exposed porous parts of the superconducting ceramic and contributes to the stability of the oxide. The synergistic effect of this action prevents the superconductor from deteriorating due to moisture absorption, thereby extending the life of the superconductor.
以下、本発明の実施例を図面に従って説明する。 Embodiments of the present invention will be described below with reference to the drawings.
本実施例はプリントコイル状超電導コイルに本発明を適
用したものである。即ち絶縁基板3」二に所定パターン
で超電導コイル1を配置し、これをパッシベーション膜
で覆ったものである。In this embodiment, the present invention is applied to a printed coil superconducting coil. That is, superconducting coils 1 are arranged in a predetermined pattern on an insulating substrate 3'' and covered with a passivation film.
第1図に示したものはプリントコイル状のものであるが
本発明の適用製品形態はこれに限定されず、線材、薄層
体、板状物のいずれにも適用し得る。また製品によって
は必ずしも絶縁基板3は要しない。Although the product shown in FIG. 1 is in the form of a printed coil, the product form to which the present invention can be applied is not limited to this, and can be applied to any of wire rods, thin layered products, and plate-like products. Furthermore, depending on the product, the insulating substrate 3 is not necessarily required.
次に製法の一例を第2図にて説明する。先すペロブスカ
イト系セラミクスグリーンボディを用意する。この用意
の仕方はバルクでも良く、また絶縁基板3上に所定パタ
ーンで超電導素材を配設したものでも良い。Next, an example of the manufacturing method will be explained with reference to FIG. First, prepare a perovskite ceramic green body. This preparation may be done in bulk or by disposing the superconducting material in a predetermined pattern on the insulating substrate 3.
次いで第1次焼成において上記素材(グリーンボディ)
を焼結する。焼成温度は例えば後記のように900〜1
100℃である。Then, in the first firing, the above material (green body)
sinter. The firing temperature is, for example, 900-1 as described below.
The temperature is 100°C.
放冷altパッシベーション膜素材を塗布する。ノ1ッ
シベーション材料は例えばマグネシア(MgO)、アル
ミナ(AQ203) 、サファイアの各粉末を溶媒に分
数したもの、ポリイミド系樹脂やポリイミドイソインド
ロキナゾリンジオン(P I Q)系樹脂、並びにこれ
らのポリアミック酸、ポリアミド酸等、有機、無機を問
わない。これらを第2次焼成することによりマグネシア
膜、アルミナ膜、サファイア膜、ポリイミド膜、PIQ
膜が形成される。Apply cooled alt passivation film material. Examples of insulating materials include fractions of magnesia (MgO), alumina (AQ203), and sapphire powders in solvents, polyimide resins, polyimide isoindoquinazolinedione (PIQ) resins, and polyamic acids thereof. , polyamic acid, etc., whether organic or inorganic. By secondary firing these, magnesia film, alumina film, sapphire film, polyimide film, PIQ
A film is formed.
但し、第2次焼成の温度は第1次焼成の温度よりも低く
する必要がある。これは超電導特性を喪失させぬ為であ
る。However, the temperature of the second firing must be lower than the temperature of the first firing. This is to prevent loss of superconducting properties.
以下、本実施例に適用し得る超電導材を概略説明する。Hereinafter, superconducting materials applicable to this example will be schematically explained.
(77に対応)−(液体N2温度対応)本実施例に用い
る高温超電導材は、例えばイツトリウム、バリウム、銅
の三元系酸化物(セラミクス)であり、液体窒素中で1
.5テスラの磁場を加えると超電導が破れ、超電導状態
で電流量を0.02A/ffl乃至0.2A/c+#に
変化させても維持し得る、科学技術庁金属材料研究所開
発の材料である(昭和62年3月3日付日刊工業新聞参
照)。(corresponds to 77) - (corresponds to liquid N2 temperature) The high temperature superconducting material used in this example is, for example, a ternary oxide (ceramics) of yttrium, barium, and copper.
.. This material was developed by the Science and Technology Agency's Institute for Metals and Materials, and its superconductivity breaks when a 5 Tesla magnetic field is applied, and the superconducting state can be maintained even when the amount of current changes from 0.02A/ffl to 0.2A/c+#. (Refer to the Nikkan Kogyo Shimbun dated March 3, 1986).
(123に対応)
本実施例で使用する高温超電導材は、例えば化学式が一
般式ABO,で示される所謂キューピックペロブス力イ
トであり、その具体例を挙げれば(αx−Xβx)’C
u O3−yで表わされる。(Corresponding to 123) The high-temperature superconducting material used in this example is, for example, a so-called cupic perobsite whose chemical formula is represented by the general formula ABO, and a specific example thereof is (αx-Xβx)'C
It is represented by u O3-y.
上記中、Xは0≦X≦1.yは0≦y<1+ αtβは
夫々スカンジウム(Sc)、イツトリウム(Y)、ラン
タン(La)の如き周期表■族a亜族に属する元素や、
カルシウム(C,a)、ストロンチウム(Sr)、バリ
ウム(Ba)の如き周期表■族a亜族に属する元素を示
す。In the above, X is 0≦X≦1. y is 0≦y<1+ αtβ is an element belonging to subgroup A of group II of the periodic table, such as scandium (Sc), yttrium (Y), and lanthanum (La), respectively;
Indicates elements belonging to subgroup a of group I of the periodic table, such as calcium (C, a), strontium (Sr), and barium (Ba).
このような所謂高温超電導材の製法は、例えばLa2O
3、Y2O3等のIIIa族元素の酸化物とBaco3
.5rC03、Ca、GO,等のIla族元素の炭酸塩
と、酸化銅(Cu O)とを各粉末状態で混合し焼結し
て得られる。バリウム0.6、イツトリウム0.4(従
ってx=0.4)、銅1、酸素3(従ってy=0)の割
合で900〜1100℃下に熱して焼き固めたペロブス
カイトは、超電導開始温度が123に以上、完全に抵抗
ゼロとなる超電導終了点は約90に以上である。The manufacturing method of such a so-called high-temperature superconducting material is, for example, La2O
3. Oxides of group IIIa elements such as Y2O3 and Baco3
.. It is obtained by mixing a carbonate of a group Ila element such as 5rC03, Ca, GO, etc. and copper oxide (CuO) in powder form and sintering the mixture. Perovskite, which is heated and hardened at 900 to 1100°C in the ratio of 0.6 barium, 0.4 yttrium (therefore, x = 0.4), 1 copper, and 3 oxygen (therefore, y = 0), has a superconducting onset temperature. The superconducting end point at which the resistance becomes completely zero is approximately 90 or more.
(−40℃対応)
本実施例に用いる高温超電導材は、例えばカリフォルニ
ア大学ローレンス・バークレー研究所やヒユーストン大
学のポール・チュー教授の研究グループの開発した酸化
物系新物質を使用し得る(昭和62年度3月5日付読売
新聞、昭和62年度5月24日付読売新聞参照)。(Compatible with -40℃) The high temperature superconducting material used in this example may be a new oxide-based material developed by the research group of Professor Paul Chu of the University of California, Lawrence Berkeley Laboratory or Hyuston College. (See Yomiuri Shimbun dated March 5, 1982; Yomiuri Shimbun dated May 24, 1986).
(−13℃対応)
本実施例に用いる高温超電導材は、例えば米国ニューヨ
ークのエナージ・コンバージョン・デバイス社の発見に
よるイツトリウム・バリウム・銅酸素糸のペロブスカイ
ト型セラミクス超電導材を使用し得る(昭和62年5月
29日付日本経済新聞参照)。(Compatible with -13℃) The high-temperature superconducting material used in this example may be, for example, a perovskite-type ceramic superconducting material of yttrium-barium-copper-oxygen thread discovered by Energy Conversion Devices Inc. of New York, USA (1988). (See Nihon Keizai Shimbun, May 29).
(7°C対応)
本実施例に用いる高温超電導材は、例えば米国のエナジ
ー・コンバージョン・デバイス社が発表したイツトリウ
ム・バリウム・銅の酸化物にフッ素を加えたペロブスカ
イト型セラミクス超電導材を使用し得る(昭和62年度
6月9日付日本経済新聞参照)。(Compatible with 7°C) The high-temperature superconducting material used in this example may be, for example, a perovskite-type ceramic superconducting material made by adding fluorine to yttrium-barium-copper oxides published by Energy Conversion Devices, Inc. of the United States. (Refer to the Nihon Keizai Shimbun dated June 9, 1988).
(35°C対応)
モスクワ大グループの発表によるイツトリウム・バリウ
ム・銅の酸化物にスカンジウム・ストロンチウム及び他
の金属元素を含む材料を使用し得る(昭和62年6月9
日付日本経済新聞参照)。(Compatible with 35°C) Materials containing scandium, strontium, and other metal elements can be used in oxides of yttrium, barium, and copper, as announced by the Moscow University Group (June 9, 1988).
(See Nihon Keizai Shimbun, dated).
以上説明した通り、本発明によれば、超電導特性を長時
間維持させることが可能である。As explained above, according to the present invention, it is possible to maintain superconducting properties for a long time.
第1図は本発明の一実施例に係る酸化物超電導性の断面
図、第2図は本発明の一実施例に係る酸化超電導体の製
法のフロー図である。
1・・・超電導コイル、2・・・パッシベーション膜、
3・・・絶縁基板。FIG. 1 is a cross-sectional view of an oxide superconductor according to an embodiment of the present invention, and FIG. 2 is a flow diagram of a method for manufacturing an oxide superconductor according to an embodiment of the present invention. 1... superconducting coil, 2... passivation film,
3...Insulating substrate.
Claims (1)
出部分をパッシベーション膜にて被覆したことを特徴と
する酸化物超電導体。 2、ペロブスカイト系セラミクスから成る超電導体のグ
リーンボディ若しくは焼結体の少なくとも露出部分にパ
ッシベーション素材を塗布して後該素材を焼成すること
により前記露出部分ににパッシベーション膜を形成する
ことを特徴とする酸化物超電導体の製法。[Claims] 1. An oxide superconductor characterized in that an exposed portion of a superconductor made of perovskite ceramics is covered with a passivation film. 2. A passivation film is formed on the exposed portion by applying a passivation material to at least the exposed portion of the green body or sintered body of the superconductor made of perovskite ceramics and then firing the material. Method for manufacturing oxide superconductors.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62151209A JPS63318015A (en) | 1987-06-19 | 1987-06-19 | Oxide superconductor and its manufacture |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62151209A JPS63318015A (en) | 1987-06-19 | 1987-06-19 | Oxide superconductor and its manufacture |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63318015A true JPS63318015A (en) | 1988-12-26 |
Family
ID=15513622
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62151209A Pending JPS63318015A (en) | 1987-06-19 | 1987-06-19 | Oxide superconductor and its manufacture |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63318015A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6410512A (en) * | 1987-07-01 | 1989-01-13 | Matsushita Electric Ind Co Ltd | Superconductor structure |
US5114910A (en) * | 1990-11-01 | 1992-05-19 | Hughes Aircraft Company | Passivation of thin film oxide superconductors |
US5272133A (en) * | 1990-11-01 | 1993-12-21 | Hughes Aircraft Company | Passivation of thin film oxide superconductors |
US5288697A (en) * | 1991-05-15 | 1994-02-22 | Basf Aktiengesellschaft | Production of thin protective polyimide layers on high temperature superconductors |
-
1987
- 1987-06-19 JP JP62151209A patent/JPS63318015A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6410512A (en) * | 1987-07-01 | 1989-01-13 | Matsushita Electric Ind Co Ltd | Superconductor structure |
JPH07106895B2 (en) * | 1987-07-01 | 1995-11-15 | 松下電器産業株式会社 | Superconductor structure |
US5114910A (en) * | 1990-11-01 | 1992-05-19 | Hughes Aircraft Company | Passivation of thin film oxide superconductors |
US5272133A (en) * | 1990-11-01 | 1993-12-21 | Hughes Aircraft Company | Passivation of thin film oxide superconductors |
US5288697A (en) * | 1991-05-15 | 1994-02-22 | Basf Aktiengesellschaft | Production of thin protective polyimide layers on high temperature superconductors |
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