JPS633156Y2 - - Google Patents

Info

Publication number
JPS633156Y2
JPS633156Y2 JP1982014153U JP1415382U JPS633156Y2 JP S633156 Y2 JPS633156 Y2 JP S633156Y2 JP 1982014153 U JP1982014153 U JP 1982014153U JP 1415382 U JP1415382 U JP 1415382U JP S633156 Y2 JPS633156 Y2 JP S633156Y2
Authority
JP
Japan
Prior art keywords
mask
photomask
pattern
inspection
cartridge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982014153U
Other languages
English (en)
Japanese (ja)
Other versions
JPS58118731U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1415382U priority Critical patent/JPS58118731U/ja
Publication of JPS58118731U publication Critical patent/JPS58118731U/ja
Application granted granted Critical
Publication of JPS633156Y2 publication Critical patent/JPS633156Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP1415382U 1982-02-05 1982-02-05 Ｌｓｉ検査装置 Granted JPS58118731U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1415382U JPS58118731U (ja) 1982-02-05 1982-02-05 Ｌｓｉ検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1415382U JPS58118731U (ja) 1982-02-05 1982-02-05 Ｌｓｉ検査装置

Publications (2)

Publication Number Publication Date
JPS58118731U JPS58118731U (ja) 1983-08-13
JPS633156Y2 true JPS633156Y2 (enrdf_load_stackoverflow) 1988-01-26

Family

ID=30026627

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1415382U Granted JPS58118731U (ja) 1982-02-05 1982-02-05 Ｌｓｉ検査装置

Country Status (1)

Country Link
JP (1) JPS58118731U (enrdf_load_stackoverflow)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5232271A (en) * 1975-09-08 1977-03-11 Hitachi Ltd Inspection method and equipment for photomask pattern
JPS6019138B2 (ja) * 1977-09-22 1985-05-14 株式会社日立製作所 フオトエツチングにおける現像状態検査方法

Also Published As

Publication number Publication date
JPS58118731U (ja) 1983-08-13

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