JPS6331552B2 - - Google Patents

Info

Publication number
JPS6331552B2
JPS6331552B2 JP56037442A JP3744281A JPS6331552B2 JP S6331552 B2 JPS6331552 B2 JP S6331552B2 JP 56037442 A JP56037442 A JP 56037442A JP 3744281 A JP3744281 A JP 3744281A JP S6331552 B2 JPS6331552 B2 JP S6331552B2
Authority
JP
Japan
Prior art keywords
layer
photoconductive
raw material
compound
general formula
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56037442A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57152464A (en
Inventor
Isamu Shimizu
Kyosuke Ogawa
Hidekazu Inoe
Junichiro Kanbe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP56037442A priority Critical patent/JPS57152464A/ja
Priority to US06/354,898 priority patent/US4468443A/en
Priority to DE19823209055 priority patent/DE3209055A1/de
Publication of JPS57152464A publication Critical patent/JPS57152464A/ja
Publication of JPS6331552B2 publication Critical patent/JPS6331552B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/24—Deposition of silicon only

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Photoreceptors In Electrophotography (AREA)
  • Chemical Vapour Deposition (AREA)
  • Light Receiving Elements (AREA)
JP56037442A 1981-03-12 1981-03-16 Manufacture of photoconductive member Granted JPS57152464A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP56037442A JPS57152464A (en) 1981-03-16 1981-03-16 Manufacture of photoconductive member
US06/354,898 US4468443A (en) 1981-03-12 1982-03-04 Process for producing photoconductive member from gaseous silicon compounds
DE19823209055 DE3209055A1 (de) 1981-03-12 1982-03-12 Verfahren zur herstellung eines fotoleitfaehigen elements

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56037442A JPS57152464A (en) 1981-03-16 1981-03-16 Manufacture of photoconductive member

Publications (2)

Publication Number Publication Date
JPS57152464A JPS57152464A (en) 1982-09-20
JPS6331552B2 true JPS6331552B2 (en, 2012) 1988-06-24

Family

ID=12497619

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56037442A Granted JPS57152464A (en) 1981-03-12 1981-03-16 Manufacture of photoconductive member

Country Status (1)

Country Link
JP (1) JPS57152464A (en, 2012)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57174450A (en) * 1981-04-21 1982-10-27 Canon Inc Production of photoconductive member
JPH0691010B2 (ja) * 1983-01-11 1994-11-14 三井東圧化学株式会社 非晶質薄膜の製法
JPH0644552B2 (ja) * 1983-03-30 1994-06-08 三井東圧化学株式会社 非晶質薄膜の製法
US4637938A (en) * 1983-08-19 1987-01-20 Energy Conversion Devices, Inc. Methods of using selective optical excitation in deposition processes and the detection of new compositions

Also Published As

Publication number Publication date
JPS57152464A (en) 1982-09-20

Similar Documents

Publication Publication Date Title
US4405656A (en) Process for producing photoconductive member
JPS6410069B2 (en, 2012)
JPH0411860B2 (en, 2012)
JPH0360917B2 (en, 2012)
JPS6348054B2 (en, 2012)
JPS6348057B2 (en, 2012)
JPS6331552B2 (en, 2012)
JPS6325069B2 (en, 2012)
JPH0372710B2 (en, 2012)
JPS6331551B2 (en, 2012)
JPS6331554B2 (en, 2012)
JPS6331553B2 (en, 2012)
JPS6410066B2 (en, 2012)
JPS635469B2 (en, 2012)
JPS6145705B2 (en, 2012)
JPS6233305B2 (en, 2012)
JPH0315739B2 (en, 2012)
JPH0456304B2 (en, 2012)
JPS6410067B2 (en, 2012)
JPH0220102B2 (en, 2012)
JPS628782B2 (en, 2012)
JP3412957B2 (ja) 光受容部材の製造方法
JPH0454941B2 (en, 2012)
JPS6346409B2 (en, 2012)
JPS62154673A (ja) 光受容部材