JPS6331120B2 - - Google Patents

Info

Publication number

JPS6331120B2

JPS6331120B2 JP8689982A JP8689982A JPS6331120B2 JP S6331120 B2 JPS6331120 B2 JP S6331120B2 JP 8689982 A JP8689982 A JP 8689982A JP 8689982 A JP8689982 A JP 8689982A JP S6331120 B2 JPS6331120 B2 JP S6331120B2

Authority

JP

Japan

Prior art keywords

protective layer

photoresist substrate

roller

liquid

photoresist

Prior art date

1982-05-22

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000758 substrate Substances 0.000 claims description 18
• 229920002120 photoresistant polymer Polymers 0.000 claims description 17
• 239000011241 protective layer Substances 0.000 claims description 15
• 239000007788 liquid Substances 0.000 claims description 11
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
• 229920005989 resin Polymers 0.000 description 4
• 239000011347 resin Substances 0.000 description 4
• 239000004372 Polyvinyl alcohol Substances 0.000 description 3
• 239000010410 layer Substances 0.000 description 3
• 239000000463 material Substances 0.000 description 3
• 238000000034 method Methods 0.000 description 3
• 229920002451 polyvinyl alcohol Polymers 0.000 description 3
• 239000003960 organic solvent Substances 0.000 description 2
• 230000000149 penetrating effect Effects 0.000 description 2
• -1 polyethylene Polymers 0.000 description 2
• 230000001681 protective effect Effects 0.000 description 2
• 230000008961 swelling Effects 0.000 description 2
• 239000004698 Polyethylene Substances 0.000 description 1
• 239000004743 Polypropylene Substances 0.000 description 1
• 239000004793 Polystyrene Substances 0.000 description 1
• BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 1
• 229910052782 aluminium Inorganic materials 0.000 description 1
• XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1
• 239000003822 epoxy resin Substances 0.000 description 1
• 238000005530 etching Methods 0.000 description 1
• 230000002452 interceptive effect Effects 0.000 description 1
• 229910052751 metal Inorganic materials 0.000 description 1
• 239000002184 metal Substances 0.000 description 1
• 150000002739 metals Chemical class 0.000 description 1
• 229920003023 plastic Polymers 0.000 description 1
• 239000004033 plastic Substances 0.000 description 1
• 229920000647 polyepoxide Polymers 0.000 description 1
• 229920000573 polyethylene Polymers 0.000 description 1
• 229920001155 polypropylene Polymers 0.000 description 1
• 229920002223 polystyrene Polymers 0.000 description 1
• 239000007921 spray Substances 0.000 description 1
• 229910001220 stainless steel Inorganic materials 0.000 description 1
• 239000010935 stainless steel Substances 0.000 description 1
• 239000000126 substance Substances 0.000 description 1