JPS58204590A - フオトレジスト基板の処理装置 - Google Patents

フオトレジスト基板の処理装置

Info

Publication number
JPS58204590A
JPS58204590A JP8689982A JP8689982A JPS58204590A JP S58204590 A JPS58204590 A JP S58204590A JP 8689982 A JP8689982 A JP 8689982A JP 8689982 A JP8689982 A JP 8689982A JP S58204590 A JPS58204590 A JP S58204590A
Authority
JP
Japan
Prior art keywords
roller
photoresist substrate
protective layer
photoresist
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8689982A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6331120B2 (enrdf_load_stackoverflow
Inventor
阿部　靭男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Chemical Corp
Original Assignee
Nippon Synthetic Chemical Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Synthetic Chemical Industry Co Ltd filed Critical Nippon Synthetic Chemical Industry Co Ltd
Priority to JP8689982A priority Critical patent/JPS58204590A/ja
Publication of JPS58204590A publication Critical patent/JPS58204590A/ja
Publication of JPS6331120B2 publication Critical patent/JPS6331120B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
JP8689982A 1982-05-22 1982-05-22 フオトレジスト基板の処理装置 Granted JPS58204590A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8689982A JPS58204590A (ja) 1982-05-22 1982-05-22 フオトレジスト基板の処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8689982A JPS58204590A (ja) 1982-05-22 1982-05-22 フオトレジスト基板の処理装置

Publications (2)

Publication Number Publication Date
JPS58204590A true JPS58204590A (ja) 1983-11-29
JPS6331120B2 JPS6331120B2 (enrdf_load_stackoverflow) 1988-06-22

Family

ID=13899676

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8689982A Granted JPS58204590A (ja) 1982-05-22 1982-05-22 フオトレジスト基板の処理装置

Country Status (1)

Country Link
JP (1) JPS58204590A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6331120B2 (enrdf_load_stackoverflow) 1988-06-22

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