JPS63310795A - マイクロ波プラズマジェットによるダイヤモンド気相合成方法 - Google Patents

マイクロ波プラズマジェットによるダイヤモンド気相合成方法

Info

Publication number
JPS63310795A
JPS63310795A JP14400687A JP14400687A JPS63310795A JP S63310795 A JPS63310795 A JP S63310795A JP 14400687 A JP14400687 A JP 14400687A JP 14400687 A JP14400687 A JP 14400687A JP S63310795 A JPS63310795 A JP S63310795A
Authority
JP
Japan
Prior art keywords
plasma
diamond
microwave
jet
vapor phase
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14400687A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0449518B2 (enrdf_load_stackoverflow
Inventor
Kazuaki Kurihara
和明 栗原
Kenichi Sasaki
謙一 佐々木
Motonobu Kawarada
河原田　元信
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP14400687A priority Critical patent/JPS63310795A/ja
Publication of JPS63310795A publication Critical patent/JPS63310795A/ja
Publication of JPH0449518B2 publication Critical patent/JPH0449518B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP14400687A 1987-06-11 1987-06-11 マイクロ波プラズマジェットによるダイヤモンド気相合成方法 Granted JPS63310795A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14400687A JPS63310795A (ja) 1987-06-11 1987-06-11 マイクロ波プラズマジェットによるダイヤモンド気相合成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14400687A JPS63310795A (ja) 1987-06-11 1987-06-11 マイクロ波プラズマジェットによるダイヤモンド気相合成方法

Publications (2)

Publication Number Publication Date
JPS63310795A true JPS63310795A (ja) 1988-12-19
JPH0449518B2 JPH0449518B2 (enrdf_load_stackoverflow) 1992-08-11

Family

ID=15352119

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14400687A Granted JPS63310795A (ja) 1987-06-11 1987-06-11 マイクロ波プラズマジェットによるダイヤモンド気相合成方法

Country Status (1)

Country Link
JP (1) JPS63310795A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5126164A (en) * 1988-06-06 1992-06-30 Research Development Corporation Of Japan Method of forming a thin polymeric film by plasma reaction under atmospheric pressure
US6593507B2 (en) 1998-10-23 2003-07-15 Mitsubishi Heavy Industries, Ltd. Method of decomposing organic halide
JP2009533872A (ja) * 2006-04-14 2009-09-17 シリカ テック リミテッド ライアビリティ カンパニー 太陽電池を製作するためのプラズマデポジション装置及び方法
GB2513439A (en) * 2013-03-15 2014-10-29 Agilent Technologies Inc Integrated microwave source and plasma torch and related methods

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5126164A (en) * 1988-06-06 1992-06-30 Research Development Corporation Of Japan Method of forming a thin polymeric film by plasma reaction under atmospheric pressure
US6593507B2 (en) 1998-10-23 2003-07-15 Mitsubishi Heavy Industries, Ltd. Method of decomposing organic halide
US6600084B2 (en) 1998-10-23 2003-07-29 Mitsubishi Heay Industries, Ltd. Method of decomposing organic halide
US6635997B2 (en) 1998-10-23 2003-10-21 Mitsubishi Heavy Industries, Ltd. Microwave plasma generator, method of decomposing organic halide, and system for decomposing organic halide
US6650059B2 (en) 1998-10-23 2003-11-18 Mitsubishi Heavy Industries, Ltd. Method of decomposing organic halide
JP2009533872A (ja) * 2006-04-14 2009-09-17 シリカ テック リミテッド ライアビリティ カンパニー 太陽電池を製作するためのプラズマデポジション装置及び方法
GB2513439A (en) * 2013-03-15 2014-10-29 Agilent Technologies Inc Integrated microwave source and plasma torch and related methods
US9427821B2 (en) 2013-03-15 2016-08-30 Agilent Technologies, Inc. Integrated magnetron plasma torch, and related methods
GB2513439B (en) * 2013-03-15 2019-02-06 Agilent Technologies Inc Integrated microwave source and plasma torch, and related methods

Also Published As

Publication number Publication date
JPH0449518B2 (enrdf_load_stackoverflow) 1992-08-11

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