JPS633085Y2 - - Google Patents
Info
- Publication number
- JPS633085Y2 JPS633085Y2 JP2258983U JP2258983U JPS633085Y2 JP S633085 Y2 JPS633085 Y2 JP S633085Y2 JP 2258983 U JP2258983 U JP 2258983U JP 2258983 U JP2258983 U JP 2258983U JP S633085 Y2 JPS633085 Y2 JP S633085Y2
- Authority
- JP
- Japan
- Prior art keywords
- opening
- plate
- ion source
- ring
- aperture plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 150000002500 ions Chemical class 0.000 description 23
- 238000005192 partition Methods 0.000 description 10
- 238000004140 cleaning Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000004949 mass spectrometry Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Landscapes
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2258983U JPS59129161U (ja) | 1983-02-18 | 1983-02-18 | アパ−チヤ板の交換機構 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2258983U JPS59129161U (ja) | 1983-02-18 | 1983-02-18 | アパ−チヤ板の交換機構 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS59129161U JPS59129161U (ja) | 1984-08-30 |
JPS633085Y2 true JPS633085Y2 (de) | 1988-01-26 |
Family
ID=30153682
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2258983U Granted JPS59129161U (ja) | 1983-02-18 | 1983-02-18 | アパ−チヤ板の交換機構 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS59129161U (de) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2017010163A1 (ja) * | 2015-07-13 | 2017-01-19 | 株式会社島津製作所 | シャッター |
-
1983
- 1983-02-18 JP JP2258983U patent/JPS59129161U/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS59129161U (ja) | 1984-08-30 |
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