JPS6330780B2 - - Google Patents

Info

Publication number
JPS6330780B2
JPS6330780B2 JP57120891A JP12089182A JPS6330780B2 JP S6330780 B2 JPS6330780 B2 JP S6330780B2 JP 57120891 A JP57120891 A JP 57120891A JP 12089182 A JP12089182 A JP 12089182A JP S6330780 B2 JPS6330780 B2 JP S6330780B2
Authority
JP
Japan
Prior art keywords
position detection
chip
mark
shows
semiconductor substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57120891A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5911619A (ja
Inventor
Fumitaka Chiba
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP57120891A priority Critical patent/JPS5911619A/ja
Publication of JPS5911619A publication Critical patent/JPS5911619A/ja
Publication of JPS6330780B2 publication Critical patent/JPS6330780B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP57120891A 1982-07-12 1982-07-12 半導体装置の非接触試験方法 Granted JPS5911619A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57120891A JPS5911619A (ja) 1982-07-12 1982-07-12 半導体装置の非接触試験方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57120891A JPS5911619A (ja) 1982-07-12 1982-07-12 半導体装置の非接触試験方法

Publications (2)

Publication Number Publication Date
JPS5911619A JPS5911619A (ja) 1984-01-21
JPS6330780B2 true JPS6330780B2 (US06653308-20031125-C00199.png) 1988-06-21

Family

ID=14797541

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57120891A Granted JPS5911619A (ja) 1982-07-12 1982-07-12 半導体装置の非接触試験方法

Country Status (1)

Country Link
JP (1) JPS5911619A (US06653308-20031125-C00199.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63109873U (US06653308-20031125-C00199.png) * 1986-12-27 1988-07-15

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02191359A (ja) * 1988-01-22 1990-07-27 Matsushita Electric Ind Co Ltd スタンダードセルおよびこれを用いた半導体集積回路装置
JP5102989B2 (ja) * 2006-08-08 2012-12-19 ルネサスエレクトロニクス株式会社 半導体装置の製造方法
US9983257B2 (en) 2015-10-15 2018-05-29 Taiwan Semiconductor Manufacturing Co., Ltd. Test line patterns in split-gate flash technology
US10163522B2 (en) * 2015-10-15 2018-12-25 Taiwan Semiconductor Manufacturing Co., Ltd. Test line letter for embedded non-volatile memory technology

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4916460A (US06653308-20031125-C00199.png) * 1972-05-22 1974-02-13
JPS5150672A (ja) * 1974-10-30 1976-05-04 Hitachi Ltd Kijunfureemu
JPS51110974A (US06653308-20031125-C00199.png) * 1975-03-25 1976-09-30 Sanyo Electric Co
JPS55162219A (en) * 1979-06-05 1980-12-17 Nec Corp Semiconductor wafer

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4916460A (US06653308-20031125-C00199.png) * 1972-05-22 1974-02-13
JPS5150672A (ja) * 1974-10-30 1976-05-04 Hitachi Ltd Kijunfureemu
JPS51110974A (US06653308-20031125-C00199.png) * 1975-03-25 1976-09-30 Sanyo Electric Co
JPS55162219A (en) * 1979-06-05 1980-12-17 Nec Corp Semiconductor wafer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63109873U (US06653308-20031125-C00199.png) * 1986-12-27 1988-07-15

Also Published As

Publication number Publication date
JPS5911619A (ja) 1984-01-21

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