JPS633054U - - Google Patents
Info
- Publication number
- JPS633054U JPS633054U JP9591786U JP9591786U JPS633054U JP S633054 U JPS633054 U JP S633054U JP 9591786 U JP9591786 U JP 9591786U JP 9591786 U JP9591786 U JP 9591786U JP S633054 U JPS633054 U JP S633054U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- scanning
- electron beam
- electron microscope
- detected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 5
- 238000001514 detection method Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9591786U JPS633054U (cs) | 1986-06-25 | 1986-06-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9591786U JPS633054U (cs) | 1986-06-25 | 1986-06-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS633054U true JPS633054U (cs) | 1988-01-09 |
Family
ID=30961084
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9591786U Pending JPS633054U (cs) | 1986-06-25 | 1986-06-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS633054U (cs) |
-
1986
- 1986-06-25 JP JP9591786U patent/JPS633054U/ja active Pending
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