JPS63303881A - 金属化層が形成された窒化アルミニウム焼結体およびその製造方法 - Google Patents

金属化層が形成された窒化アルミニウム焼結体およびその製造方法

Info

Publication number
JPS63303881A
JPS63303881A JP63014343A JP1434388A JPS63303881A JP S63303881 A JPS63303881 A JP S63303881A JP 63014343 A JP63014343 A JP 63014343A JP 1434388 A JP1434388 A JP 1434388A JP S63303881 A JPS63303881 A JP S63303881A
Authority
JP
Japan
Prior art keywords
aluminum
sintered body
weight
nitride sintered
aluminum nitride
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP63014343A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0565475B1 (OSRAM
Inventor
Akira Sasame
笹目　彰
Hitoshi Sakagami
坂上　仁之
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP63014343A priority Critical patent/JPS63303881A/ja
Publication of JPS63303881A publication Critical patent/JPS63303881A/ja
Publication of JPH0565475B1 publication Critical patent/JPH0565475B1/ja
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01074—Tungsten [W]

Landscapes

  • Ceramic Products (AREA)
JP63014343A 1987-01-26 1988-01-25 金属化層が形成された窒化アルミニウム焼結体およびその製造方法 Expired - Lifetime JPS63303881A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63014343A JPS63303881A (ja) 1987-01-26 1988-01-25 金属化層が形成された窒化アルミニウム焼結体およびその製造方法

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP1642187 1987-01-26
JP62-16422 1987-01-26
JP62-16421 1987-01-26
JP63014343A JPS63303881A (ja) 1987-01-26 1988-01-25 金属化層が形成された窒化アルミニウム焼結体およびその製造方法

Publications (2)

Publication Number Publication Date
JPS63303881A true JPS63303881A (ja) 1988-12-12
JPH0565475B1 JPH0565475B1 (OSRAM) 1993-09-17

Family

ID=26350264

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63014343A Expired - Lifetime JPS63303881A (ja) 1987-01-26 1988-01-25 金属化層が形成された窒化アルミニウム焼結体およびその製造方法

Country Status (1)

Country Link
JP (1) JPS63303881A (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01249681A (ja) * 1988-03-30 1989-10-04 Sumitomo Electric Ind Ltd 金属化面を有する窒化アルミニウム焼結体及びその製造方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62197375A (ja) * 1986-02-20 1987-09-01 株式会社東芝 窒化アルミニウム基板
JPS6345194A (ja) * 1986-08-13 1988-02-26 住友電気工業株式会社 金属化面を有する窒化アルミニウム焼結体及びその製造方法
JPS6369787A (ja) * 1986-09-12 1988-03-29 住友電気工業株式会社 金属化面を有する窒化アルミニウム焼結体及びその製造方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62197375A (ja) * 1986-02-20 1987-09-01 株式会社東芝 窒化アルミニウム基板
JPS6345194A (ja) * 1986-08-13 1988-02-26 住友電気工業株式会社 金属化面を有する窒化アルミニウム焼結体及びその製造方法
JPS6369787A (ja) * 1986-09-12 1988-03-29 住友電気工業株式会社 金属化面を有する窒化アルミニウム焼結体及びその製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01249681A (ja) * 1988-03-30 1989-10-04 Sumitomo Electric Ind Ltd 金属化面を有する窒化アルミニウム焼結体及びその製造方法

Also Published As

Publication number Publication date
JPH0565475B1 (OSRAM) 1993-09-17

Similar Documents

Publication Publication Date Title
US4961987A (en) Aluminum nitride sintered body with high thermal conductivity and process for producing same
JPH0569797B2 (OSRAM)
KR900005842B1 (ko) 질화 알루미늄 기판
US5529852A (en) Aluminum nitride sintered body having a metallized coating layer on its surface
EP0297511A2 (en) Connection structure between components for semiconductor apparatus
JP5784153B2 (ja) アルミナ質セラミックスおよびそれを用いたセラミック配線基板ならびにセラミックパッケージ
US20100147571A1 (en) Component having a metalized ceramic base
KR930005894B1 (ko) 금속화층이 형성된 질화알루미늄 소결체 및 이의 제조방법
JP3408298B2 (ja) 高熱伝導性窒化けい素メタライズ基板，その製造方法および窒化けい素モジュール
JPH022836B2 (OSRAM)
JPH0323512B2 (OSRAM)
JP2523162B2 (ja) 半導体装置用部材
JP2822518B2 (ja) 窒化アルミニウム焼結体への金属化層形成方法
JPS63303881A (ja) 金属化層が形成された窒化アルミニウム焼結体およびその製造方法
Asai et al. Titanium nitride-molybdenum metallizing method for aluminum nitride
JP2650044B2 (ja) 半導体装置用部品間の接続構造
JPH0748180A (ja) セラミックス−金属接合体
JPS62197375A (ja) 窒化アルミニウム基板
JP2867693B2 (ja) 回路基板
US5830570A (en) Aluminum nitride substrate and process for preparation thereof
JPS62182182A (ja) 金属化面を有する窒化アルミニウム焼結体
JP2616951B2 (ja) 金属化面を有する窒化アルミニウム焼結体及びその製造方法
JPH03146487A (ja) 金属化層を有する窒化アルミニウム焼結体の製造方法
JPH04949B2 (OSRAM)
JPH01103853A (ja) 半導体装置用部品

Legal Events

Date Code Title Description
FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20070917

Year of fee payment: 14

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20080917

Year of fee payment: 15

EXPY Cancellation because of completion of term
FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20080917

Year of fee payment: 15