JPS6330351U - - Google Patents
Info
- Publication number
- JPS6330351U JPS6330351U JP12251386U JP12251386U JPS6330351U JP S6330351 U JPS6330351 U JP S6330351U JP 12251386 U JP12251386 U JP 12251386U JP 12251386 U JP12251386 U JP 12251386U JP S6330351 U JPS6330351 U JP S6330351U
- Authority
- JP
- Japan
- Prior art keywords
- ion beam
- target
- beam sputtering
- substrate
- sputtered
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12251386U JPH0734925Y2 (ja) | 1986-08-09 | 1986-08-09 | イオンビ−ムスパツタリング装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12251386U JPH0734925Y2 (ja) | 1986-08-09 | 1986-08-09 | イオンビ−ムスパツタリング装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6330351U true JPS6330351U (enExample) | 1988-02-27 |
| JPH0734925Y2 JPH0734925Y2 (ja) | 1995-08-09 |
Family
ID=31012769
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12251386U Expired - Lifetime JPH0734925Y2 (ja) | 1986-08-09 | 1986-08-09 | イオンビ−ムスパツタリング装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0734925Y2 (enExample) |
-
1986
- 1986-08-09 JP JP12251386U patent/JPH0734925Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0734925Y2 (ja) | 1995-08-09 |