JPS63295092A - Exhauster for laser beam machine - Google Patents

Exhauster for laser beam machine

Info

Publication number
JPS63295092A
JPS63295092A JP62128881A JP12888187A JPS63295092A JP S63295092 A JPS63295092 A JP S63295092A JP 62128881 A JP62128881 A JP 62128881A JP 12888187 A JP12888187 A JP 12888187A JP S63295092 A JPS63295092 A JP S63295092A
Authority
JP
Japan
Prior art keywords
processing
exhaust
concentration
detection means
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62128881A
Other languages
Japanese (ja)
Other versions
JPH033553B2 (en
Inventor
Shigeto Maejima
前島 成人
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JIDO HOSEI SYST GIJUTSU KENKYU KUMIAI
Original Assignee
JIDO HOSEI SYST GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by JIDO HOSEI SYST GIJUTSU KENKYU KUMIAI filed Critical JIDO HOSEI SYST GIJUTSU KENKYU KUMIAI
Priority to JP62128881A priority Critical patent/JPS63295092A/en
Publication of JPS63295092A publication Critical patent/JPS63295092A/en
Publication of JPH033553B2 publication Critical patent/JPH033553B2/ja
Granted legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/1462Nozzles; Features related to nozzles
    • B23K26/1494Maintenance of nozzles

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)

Abstract

PURPOSE:To protect treatment efficiency from degradation due to the fluctuation of concentration of by-product by detecting the concentration of the by-product generated from a work during laser beam machining and controlling the volume of the air in a pumping means according to a detected output. CONSTITUTION:The change of concentration of hydrogen sulfide, by-product developed in a circulating chamber 7 due to the fluctuation of the output is detected successively by a densitometer 13 of hydrogen sulfide and inputted into a control device 15 through a signal line 14. An exhauster 12 is controlled by comparing a detected output with a set value. As a result, the exhauster 12 controls variably a displacement so that the concentration of hydrogen sulfide in the circulating chamber 7 is kept within a certain range. Accordingly, the absorption of laser beam by the atmosphere is kept from changing and the machining accuracy is maintained.

Description

【発明の詳細な説明】 〔産業上の利用分デf〕 この発明は、レーザ光の走査を行うことによって、例え
ば、生地、皮革等を加工するレーザ加工装置の加工部で
生じろガス乃至粉塵などの副次物を送風によって加工部
から除去するための排煙装置に関するものである。
[Detailed Description of the Invention] [Industrial Application Def] The present invention uses laser beam scanning to reduce gas and dust generated in the processing section of a laser processing device that processes fabrics, leather, etc. This invention relates to a smoke evacuation device for removing by-products such as by-products from a processing area by blowing air.

〔従来の技術〕[Conventional technology]

従来、この種の装置として第3図に示すもの(特願昭6
2−10496号)があった。第3図において、符号1
は支持台であり、この例ではコンベアの場合が示されて
いる。このコンベア1の上には被加工物である生地2が
支持されている。
Conventionally, this type of device is shown in Fig. 3 (Japanese Patent Application No. 6
2-10496). In Fig. 3, reference numeral 1
is a support stand, and in this example, a conveyor is shown. A cloth 2, which is a workpiece, is supported on the conveyor 1.

3は生地2に対してレーザ光を二次元的に走査しつつ照
射することによって生地2に裁断その他の加工を施すた
めのレーザ光射出用揺動ミラーである。4は、前記レー
ザ加工装置に設けられ、レーザ光が照射される生地2の
加工部を覆って加工室5を形成するカバー、6は、この
加工室s内のコンベア1上に沿って通気流を生成させる
ために加工室5に設けられた送排気装置であり、ここで
は加工室外部から空気Bを取り入れてコンベア上に通気
流Aを送り出す上流側送風装置8と、その下流で通気流
人を吸引して加工室外のダクト10へ送り出すための下
流側送風装置9と、ダクト10からの排気を吸引して別
のダクト11から外部へ排出するための排風機12とか
ら構成されている。
Reference numeral 3 denotes a laser beam emitting swing mirror for performing cutting and other processing on the fabric 2 by irradiating the fabric 2 with a laser beam while scanning the fabric 2 two-dimensionally. 4 is a cover provided in the laser processing apparatus and forms a processing chamber 5 by covering the processing portion of the fabric 2 to which the laser beam is irradiated; 6 is a cover for providing ventilation flow along the conveyor 1 in the processing chamber s; This is a blower/exhaust device installed in the processing chamber 5 to generate air flow. Here, there is an upstream blower device 8 that takes in air B from outside the processing chamber and sends out a ventilation flow A onto the conveyor, and an air flow fan downstream of the It is comprised of a downstream side blower device 9 for sucking in exhaust gas and sending it out to a duct 10 outside the processing room, and an exhaust fan 12 for sucking exhaust air from the duct 10 and exhausting it to the outside from another duct 11.

次に動作について説明する。まず、コンベア1上におけ
ろ送排気装置6の上流側送風装置8及び下流側送風装置
9との間に、第3図に示すような通気流Aを生成させる
。この通気流人は、加工部位から発生する煙(加工副次
物)を直ちに除去ずろために、なるべく生地2の表面近
くに沿って生成するようにしておく必要がある。送風装
置8゜9及び排風機12は固定的に設定された定格出力
で運転され、これにより、加工室5外部の空気B−上流
側送風装置8−通気流A−下流側送風装置9→ダクト1
0→排風8112−ダクト1】−排気Cの如き第3図の
矢印で示すような一定条件の換気用空気流れが形成され
る。この状態下でレーザ加工装置を作動させて、ミラー
3からコンベア1上の生地2にレーザ光を二次元的に走
査しつつ照射すると、生地2の加工部位からはレーザ光
による加工の副次物として煙が生じるが、この煙は、前
記通気流人によって直ちに加工部から除去されろととも
に、前記換気用空気流れと共に運ばれて、加工室5の外
部へ排気Cとして排出されることになる。
Next, the operation will be explained. First, a ventilation flow A as shown in FIG. 3 is generated between the upstream side blower device 8 and the downstream side blower device 9 of the air blower/exhaust device 6 on the conveyor 1 . This ventilation stream must be generated as close to the surface of the fabric 2 as possible in order to immediately remove smoke (processing by-products) generated from the processed area. The blower 8゜9 and the exhaust fan 12 are operated at a fixedly set rated output, so that the air B outside the processing chamber 5 - the upstream blower 8 - the ventilation flow A - the downstream blower 9 -> the duct 1
0→Exhaust 8112-Duct 1]-Exhaust C A ventilation air flow having a constant condition as shown by the arrow in FIG. 3 is formed. Under this condition, when the laser processing device is operated and the laser beam is irradiated from the mirror 3 to the fabric 2 on the conveyor 1 while scanning it two-dimensionally, by-products of the processing by the laser beam can be seen from the processed part of the fabric 2. However, this smoke is immediately removed from the processing section by the ventilation flow man, is carried along with the ventilation air flow, and is discharged to the outside of the processing chamber 5 as exhaust gas C.

このような構成の従来のレーザ加工装置用排煙装置では
、加工室内での加工皿の変化に応じて加工部位から発生
ずる副次物の量も変わるから、一定条件下の換気用空気
流れのも゛とでは加工室内の加工副次物心度が変化して
しまうという欠点がある。即ち、例えば加工量が増加す
ると加工室内の加工副次物濃度も濃くなり、レーザ光の
吸収・散乱による減衰や生地2への着臭・汚染といった
問題が生じ、↓た加工量が減少した場合は加工室内の加
工副次物の濃度が低下して例えば排気ラインの後段にお
いて排ガス処理を行う場合のエネルギー効率およびガス
処理効率が低下するという問題が生じる。
In the conventional smoke exhaust system for laser processing equipment with such a configuration, the amount of by-products generated from the processing area changes depending on the change of the processing plate in the processing chamber, so the ventilation air flow under certain conditions changes. The former method has the disadvantage that the machining secondary material centering within the machining chamber changes. That is, for example, when the amount of processing increases, the concentration of processing by-products in the processing chamber increases, causing problems such as attenuation due to absorption and scattering of laser light and odor and contamination of the fabric 2, and when the amount of processing decreases. This causes a problem in that the concentration of processing by-products in the processing chamber decreases, resulting in a decrease in energy efficiency and gas treatment efficiency when exhaust gas treatment is performed downstream of the exhaust line, for example.

この発明は前述のような問題点を解決するためになされ
たもので、加工時に生じるガスや粉塵などの加工副次物
によるレーザ光強度変化や生地への着臭・汚染を防止で
きると共に、外部へ排出する排ガス中の加工副次物濃度
を所定値範囲内に収めて、排ガスを処理する゛場合のエ
ネルギー効率およびガス処理効率を設計値近傍に常に維
持することの可能なレーザ加工装置用排煙装置を提供す
ることを目的としている。
This invention was made to solve the above-mentioned problems, and can prevent changes in laser light intensity and odor and contamination of fabrics caused by processing by-products such as gas and dust generated during processing, as well as preventing external An exhaust system for laser processing equipment that can keep the concentration of processing by-products in the exhaust gas emitted to the exhaust gas within a predetermined range and constantly maintain the energy efficiency and gas processing efficiency near the design values when treating the exhaust gas. Intended to provide smoke equipment.

〔問題点を解決するための手段〕[Means for solving problems]

この発明のレーザ加工装置用の排煙装置では、前述の目
的を達成するために、支持台に支持された被加工物にレ
ーザ光を照射することにより前記被加工物を加工するレ
ーザ加工装置用の排煙装置において、前記加工中の被加
工物に対して排煙気流を与える送排気手段、加工中に前
記被加工物から発生する加工副次物の濃度を検出する検
出手段、及びこの検出手段の検出出力に応じて前記送排
気手段の風致を制御する制御手段を備えている。
In order to achieve the above-mentioned object, the smoke evacuation device for a laser processing device of the present invention is for use in a laser processing device that processes a workpiece supported by a support stand by irradiating the workpiece with a laser beam. In the smoke evacuation device, a means for supplying and exhausting smoke air to the workpiece being processed, a detection means for detecting the concentration of processing by-products generated from the workpiece during processing, and a detection means for detecting the concentration of processing by-products generated from the workpiece during processing. A control means is provided for controlling the wind direction of the air supply/exhaust means in accordance with the detection output of the means.

この発明の実施態様において、前記検出手段は、例えば
加工副次物としての硫化水素を検出する硫化水素濃度計
、加工副次物としての炭酸ガスを検出する炭酸ガス濃度
計、加工副次物としての炭化水素を検出する炭化水素濃
度計、或いはまた加工副次物としての粉塵を検出する粉
塵量計測器を含み、これらが被加工物の種類などに応じ
て単独または適当な組合せで適宜用いられろものである
In an embodiment of the present invention, the detection means includes, for example, a hydrogen sulfide concentration meter that detects hydrogen sulfide as a processing by-product, a carbon dioxide concentration meter that detects carbon dioxide gas as a processing by-product, and a carbon dioxide concentration meter that detects carbon dioxide as a processing by-product. This includes a hydrocarbon concentration meter that detects hydrocarbons, and a dust amount meter that detects dust as a by-product of processing, and these can be used alone or in an appropriate combination depending on the type of workpiece. It's a bastard.

またこの発明の別の実施態様においては、前記支持台は
一方の面から他方の面へ気流を通過させる通気性構造に
構成され、且つこの支持台の少なくとも加工部周囲がカ
バーによって囲まれて該カバー内の支持台の一方の面側
に加工室が、他方の面側に循環室が夫々形成されており
、また前記送排気手段は、前記加工室内にて前記循環室
内から吸引した雰囲気気体を前記支持台の一方の面に沿
って流して再び循環室内へ排気する送風装置及び前記加
工室側のカバーに設けられた開口から外気を導入して前
記通気性の支持台を介して循環室から外部へ排気する排
気装置を含み、さらに前記検出手段は前記循環室内で検
出を行い、前記制御手段は前記排気装置の排気風景を制
御するようになされている。
In another embodiment of the present invention, the support base has a breathable structure that allows airflow to pass from one surface to the other surface, and at least the processed portion of the support base is surrounded by a cover. A processing chamber is formed on one side of the support base in the cover, and a circulation chamber is formed on the other side, and the supply/exhaust means is configured to send atmospheric gas sucked from the circulation chamber into the processing chamber. A blower device that blows air along one surface of the support table and exhausts it back into the circulation chamber; and an opening provided in the cover on the processing chamber side that introduces outside air from the circulation chamber through the breathable support table. The exhaust device includes an exhaust device that exhausts the air to the outside, and the detection means performs detection within the circulation chamber, and the control device controls the exhaust environment of the exhaust device.

〔作 用〕[For production]

支持台の加工部に支持された被加工物にレーザ光を照射
することにより前記被加工物を加工すると、加エバター
ンの違いなど加工量の変化によって加工部から発生する
加工副次物の量が変化するが、この発明のレーザ加工装
置用の排煙装置においては、加工中に前記被加工物から
発生する加工副次物の濃度が前記検出手段によって逐次
検出され、この検出手段の検出出力に応じて前記制御手
段が送排気手段の風景を制御し、加工中の被加工物に対
して加工副次物の発生量に応じたυ「煙気流を与えて排
ガス中の副次物濃度をある濃度範囲に保つものである。
When the workpiece supported by the processing section of the support table is processed by irradiating the workpiece with a laser beam, the amount of processing by-products generated from the processing section is reduced due to changes in the amount of processing, such as differences in processing patterns. However, in the smoke evacuation device for a laser processing device of the present invention, the concentration of processing by-products generated from the workpiece during processing is sequentially detected by the detection means, and the detection output of the detection means is Accordingly, the control means controls the flow of the supply/exhaust means, and applies a smoke flow to the workpiece being processed in accordance with the amount of processing by-products generated to reduce the concentration of by-products in the exhaust gas. This is to maintain the concentration within the range.

〔実施例〕〔Example〕

以下、この発明の実施例を図面と共に説明する。 Embodiments of the present invention will be described below with reference to the drawings.

第1図において、通気構造の支持台としてのメンンユコ
ンベア1はその上に被加工物としての生地2を支持し、
加工タイミングに合わせて生地2を図の右方へ搬送可能
である。メツシュコンベア1の加工部分を囲むカバー4
は、その内部にメツシュコンベア1の上方の加工室5と
下方の循環室7とを画定し、加工室4の上方には生地2
の裁断などの加工のためにレーザ光を二次元的に走査し
つつ照射する揺tJJEラー3が配置されている。加工
室5はカバー4の開口から外部空気Bを取り入れ可能で
あり、カバー内からは送排気装置i!I6によって排気
可能である。即ち、送排気装置6は、この実施例では、
メツシュコンベア1の下部の循環室7の一端から吸気し
て生地2上に平行流人として送気する上流側送風装置8
と、この平行流Aを下流で吸気して循環室7内へ戻す下
流側送風装置9と、循環室7内からダクト10を介して
吸気してこれをダクト11から外部へ排気Cとして排出
する排風機12とを含み、これによって前記平行流Aに
加えて生地2およびメツシュコンベア1を加工室5側か
ら循環室7側へ樅に通過する下向流りをも生成させるよ
うになっている。循環室7内にはガス濃度などの検出器
】3が配置され、その検出出力が信号i$ 14によっ
て排気風料制御装置15に与えられている。この制御装
置15は、前記検出器13による検出出力が予め設定し
た範囲内に維持されるように排風機12の回転を制御ず
ろものである。
In FIG. 1, a menyu conveyor 1 serving as a support base for a ventilation structure supports a fabric 2 as a workpiece on it,
The fabric 2 can be conveyed to the right in the figure in accordance with the processing timing. Cover 4 surrounding the processing part of mesh conveyor 1
defines a processing chamber 5 above the mesh conveyor 1 and a circulation chamber 7 below.
A swing tJJE laser 3 is disposed that emits laser light while scanning it two-dimensionally for processing such as cutting. The processing chamber 5 can take in external air B through the opening of the cover 4, and the air supply/exhaust device i! It can be exhausted by I6. That is, in this embodiment, the air supply/exhaust device 6:
Upstream side blower device 8 that takes in air from one end of the circulation chamber 7 at the bottom of the mesh conveyor 1 and sends the air onto the fabric 2 as a parallel flow.
A downstream blower device 9 takes in this parallel flow A downstream and returns it to the circulation chamber 7, and a downstream blower device 9 takes in air from inside the circulation chamber 7 through a duct 10 and discharges it from the duct 11 to the outside as exhaust C. A blower 12 is included, thereby generating, in addition to the parallel flow A, a downward flow that passes the fabric 2 and the mesh conveyor 1 from the processing chamber 5 side to the circulation chamber 7 side through the fir tree. There is. A gas concentration detector [3] is arranged in the circulation chamber 7, and its detection output is given to the exhaust gas control device 15 by a signal i$14. This control device 15 is designed to control the rotation of the exhaust fan 12 so that the output detected by the detector 13 is maintained within a preset range.

次に動作について説明する。Next, the operation will be explained.

例えば被加工物が羊毛生地などの動物性蛋白質を含む生
地である場合、レーザ加工に依って生じろ加工副次物の
ガス中の臭の成分は、第2図のガスクロマトグラフによ
る分析結果に示すように、硫化水素がその殆どを占めて
いる。従ってこの場合には前記検出PJ13として硫化
水素濃度計を用いればよく、加工部の変化による循環室
内の硫化水素濃度の変化はこの硫化水素の検出器13に
よって逐次検出され、信号線14を介して制御装置15
へ入力される。これにより制御装置15では検出器出力
を設定値と比較し、通常の手法によりある不感帯幅で排
風機12の回転を制御する。その結果、Vr風機12は
循環室7内の硫化水素濃度がある範囲内に保たれろよう
にその排気量を可変制御されることになる。
For example, when the workpiece is a fabric containing animal protein, such as wool fabric, the odor components in the processing by-product gas produced by laser processing are shown in the gas chromatograph analysis results shown in Figure 2. As shown, hydrogen sulfide accounts for most of it. Therefore, in this case, a hydrogen sulfide concentration meter may be used as the detection PJ 13, and changes in the hydrogen sulfide concentration in the circulation chamber due to changes in the processing section are sequentially detected by this hydrogen sulfide detector 13, and are transmitted via the signal line 14. Control device 15
is input to. As a result, the control device 15 compares the detector output with a set value and controls the rotation of the exhaust fan 12 within a certain dead zone width using a normal method. As a result, the displacement of the Vr fan 12 is variably controlled so that the hydrogen sulfide concentration in the circulation chamber 7 is maintained within a certain range.

このように、この実施例では加工室5内と循環室7内を
循畷する加工雰囲気中の加工副次物である硫化水素の濃
度を計測し、それがある範囲内に保たれるように排風機
15の回転を制御するので、被加工物である生地2の単
位時間当たりの加工量(加工枚数、加工長さ等)が変化
しても、加工室内での加工用レーザ光の雰囲気による吸
収最が変化したり、或いは加工副次物の奥が生地に付着
したりすることが効果的に抑制されるほか、排ガス処理
を行う場合にも排ガス中の硫化水素濃度がある範囲内に
納まっているので処理装置の効率の低下が防止され、安
定化する。
As described above, in this embodiment, the concentration of hydrogen sulfide, which is a processing by-product, in the processing atmosphere circulating in the processing chamber 5 and the circulation chamber 7 is measured, and the concentration is maintained within a certain range. Since the rotation of the exhaust fan 15 is controlled, even if the amount of processing per unit time (number of processed pieces, processing length, etc.) of the fabric 2, which is the workpiece, changes, it will not change depending on the atmosphere of the processing laser light in the processing room. In addition to effectively suppressing changes in the absorption capacity or the adhesion of processing by-products to the fabric, it also ensures that the hydrogen sulfide concentration in the exhaust gas is within a certain range when exhaust gas treatment is performed. This prevents a decline in the efficiency of the processing equipment and stabilizes it.

尚、前述の実施例では羊毛生地などの加工に隙して最適
な検出器13として硫化水素濃度計を用いた場合を述べ
たが、硫化水素濃度計は一般に長期間の連続使用には信
頼性および安定性に劣るという問題点がある。そこで羊
毛生地などのレーザ加工副次物中に硫化水素と一定比率
で存在すると考えられる炭酸ガスまたは炭化水素の濃度
を代わりに計測ずろことによって硫化水素濃度を推定す
る方式を採用してもよく、このような場合には検出器1
3として炭酸ガス濃度計または炭化水素濃度計を用いる
In the above embodiment, a hydrogen sulfide concentration meter was used as the optimal detector 13 for processing wool fabrics, etc., but hydrogen sulfide concentration meters are generally not reliable for long-term continuous use. There is also the problem of poor stability. Therefore, a method may be adopted in which the hydrogen sulfide concentration is estimated by measuring the concentration of carbon dioxide gas or hydrocarbons, which are thought to exist in a certain ratio with hydrogen sulfide in laser processing by-products such as wool fabrics. In such a case, detector 1
As step 3, use a carbon dioxide concentration meter or a hydrocarbon concentration meter.

またレーザ加工の加工副次物として煤煙等の粉塵の発生
が問題になる場合は、前記検出M13として循環室7内
における循環気流中の粉塵濃度を計測する例えば光電式
などの粉塵検出器を設置する。この場合、循環室内の粉
塵濃度が一定範囲内になるように排風機12が制御され
るが、これによって加工室5内での粉塵によるレーザ光
の吸収および散乱による減衰量に変動が少なくなり、加
工精度の維持と生地の汚染防止とが達成可能である。
In addition, if the generation of dust such as soot as a by-product of laser processing becomes a problem, a dust detector such as a photoelectric type is installed as the detection M13 to measure the dust concentration in the circulating air flow in the circulation chamber 7. do. In this case, the exhaust fan 12 is controlled so that the dust concentration in the circulation chamber is within a certain range, but this reduces fluctuations in the amount of attenuation due to absorption and scattering of the laser beam by the dust in the processing chamber 5. It is possible to maintain processing accuracy and prevent fabric contamination.

尚、前述の実施例では検出器13が単一の計測審である
ばあいを述べたが、検出器13として前記各種ガス濃度
計および粉塵検出器をOF置してもよいことは述べるま
でもない。また検出器の設置場所は循環室内に限定され
るものではなく、循環気流経路内或いはダクト内を含む
排気経路中の適当な位置に配置してもよい。さらに送排
気装置とルて排風機12によりカバー内から吸引排気す
るものを例に挙げたが、逆に加圧室5内に外部から空気
を加圧導入して排気ダクト11から逃がす方式にしても
同様な効果を得ることができる。
Incidentally, in the above-mentioned embodiment, the case where the detector 13 is a single measurement detector has been described, but it goes without saying that the various gas concentration meters and dust detectors described above may be installed as the detector 13. do not have. Further, the installation location of the detector is not limited to the inside of the circulation chamber, but may be placed at an appropriate position in the circulation airflow path or the exhaust path including the inside of the duct. Furthermore, although the example of the supply/exhaust device is one in which air is sucked and exhausted from inside the cover using the exhaust fan 12, a method in which air is pressurized and introduced from the outside into the pressurizing chamber 5 and released through the exhaust duct 11 is used instead. You can also get the same effect.

〔発明の効果〕〔Effect of the invention〕

以上に述べたように、この発明のレーザ加工装置用の排
煙装置においては、加工中に発生する加工副次物の濃度
を測定してそれがある範囲内に納まるように排気量を制
御するから、加工副次物のガス濃度または粉塵濃度の変
動による加工用レーザ光の吸収・散乱の度合いの変化が
抑制され、従って加工精度が低下することがなく、シか
も加工品への着臭や汚染も効果的に防止でき、さらに排
ガス処理を行う場合に処理ガス濃度が安定しているので
ガス処理時のエネルギー効率および除去効率が向上する
ものである。
As described above, in the smoke exhaust device for laser processing equipment of the present invention, the concentration of processing by-products generated during processing is measured and the exhaust amount is controlled so that the concentration falls within a certain range. This suppresses changes in the degree of absorption and scattering of the processing laser beam due to fluctuations in the gas concentration or dust concentration of processing by-products, thereby preventing a decrease in processing accuracy and preventing odor from forming on the processed product. Contamination can also be effectively prevented, and since the concentration of the treated gas is stable during exhaust gas treatment, the energy efficiency and removal efficiency during gas treatment are improved.

【図面の簡単な説明】[Brief explanation of drawings]

第1図はこの発明の実施例に係るレーザ加工装置用の排
煙装置を示す構成図、第2図はガスクロマトグラフによ
る加工副次物ガス成分の分析結果の一例を示す線図、第
3図は従来例に係ろレーザ加工装置用の排煙装置を示す
構成図である。 図中、同一符号は同等まtコは相当部分を示し、1はメ
ツシュコンベア(支持台)、2は生地(被加工物)、3
は揺!1111ミラー、4はカバー、5は加工室、6は
送排気装置、7は循環室、8は上流側送風装置、9は下
流側送風装置、10,11はダクト、12は排風機、1
3は検出器、14は信号線、15は制御装置である。 なお、各図中、同一符号は同−又は相当部分を示す。
Fig. 1 is a configuration diagram showing a smoke evacuation device for a laser processing device according to an embodiment of the present invention, Fig. 2 is a diagram showing an example of analysis results of processing by-product gas components by gas chromatograph, and Fig. 3 1 is a configuration diagram showing a smoke evacuation device for a conventional laser processing device; FIG. In the figure, the same reference numerals indicate corresponding parts, 1 is a mesh conveyor (support stand), 2 is a fabric (workpiece), 3 is
Shake! 1111 mirror, 4 is a cover, 5 is a processing chamber, 6 is a blower/exhaust device, 7 is a circulation room, 8 is an upstream side blower, 9 is a downstream side blower, 10, 11 is a duct, 12 is an exhaust fan, 1
3 is a detector, 14 is a signal line, and 15 is a control device. In each figure, the same reference numerals indicate the same or corresponding parts.

Claims (6)

【特許請求の範囲】[Claims] (1)支持台の加工部に支持された被加工物にレーザ光
を照射することにより前記被加工物を加工するレーザ加
工装置用の排煙装置において、前記加工中の被加工物に
対して排煙気流を与える送排気手段、加工中に前記被加
工物から発生する加工副次物の濃度を検出する検出手段
、及びこの検出手段の検出出力に応じて前記送排気手段
の風量を制御する制御手段を備えたことを特徴とするレ
ーザ加工装置用の排煙装置。
(1) In a smoke exhaust device for a laser processing device that processes a workpiece supported by a processing section of a support stand by irradiating the workpiece with laser light, A supply/exhaust means for providing an exhaust gas flow, a detection means for detecting the concentration of processing by-products generated from the workpiece during processing, and an air volume of the supply/exhaust means is controlled in accordance with a detection output of the detection means. A smoke evacuation device for a laser processing device, characterized by comprising a control means.
(2)検出手段が、加工副次物としての硫化水素を検出
する硫化水素濃度計を含む特許請求の範囲第1項に記載
のレーザ加工装置用の排煙装置。
(2) The smoke evacuation device for a laser processing device according to claim 1, wherein the detection means includes a hydrogen sulfide concentration meter that detects hydrogen sulfide as a processing by-product.
(3)検出手段が、加工副次物としての炭酸ガスを検出
する炭酸ガス濃度計を含む特許請求の範囲第1項に記載
のレーザ加工装置用の排煙装置。
(3) The smoke evacuation device for a laser processing device according to claim 1, wherein the detection means includes a carbon dioxide concentration meter that detects carbon dioxide gas as a processing by-product.
(4)検出手段が、加工副次物としての炭化水素を検出
する炭化水素濃度計を含む特許請求の範囲第1項に記載
のレーザ加工装置用の排煙装置。
(4) The smoke exhaust device for a laser processing device according to claim 1, wherein the detection means includes a hydrocarbon concentration meter that detects hydrocarbons as processing by-products.
(5)検出手段が、加工副次物としての粉塵を検出する
粉塵量計測器を含む特許請求の範囲第1項に記載のレー
ザ加工装置用の排煙装置。
(5) A smoke evacuation device for a laser processing device according to claim 1, wherein the detection means includes a dust amount measuring device that detects dust as a processing by-product.
(6)支持台が一方の面から他方の面へ気流を通過させ
る通気性構造をもち、且つこの支持台の少なくとも加工
部周囲がカバーによって囲まれて該カバー内の支持台の
一方の面側に加工室が、他方の面側に循環室が夫々形成
されていることと、前記送排気手段が、前記加工室内に
て前記循環室内から吸引した雰囲気気体を前記支持台の
一方の面に沿って流して再び循環室内へ排気する送風装
置及び前記加工室側のカバーに設けられた開口から外気
を導入して前記通気性の支持台を介して循環室から外部
へ排気する排気装置を含んでいること、前記検出手段が
前記循環室内で検出を行うものであることと、前記制御
手段が前記排気装置の排気風量を制御するものであるこ
ととを特徴とする特許請求の範囲第1項に記載のレーザ
加工装置用の排煙装置。
(6) The support has a breathable structure that allows airflow to pass from one side to the other, and at least the processed portion of the support is surrounded by a cover, and one side of the support is inside the cover. A processing chamber is formed on one side, and a circulation chamber is formed on the other side, and the supply/exhaust means is configured to send atmospheric gas sucked from the circulation chamber into the processing chamber along one side of the support base. and an exhaust device that introduces outside air from an opening provided in the cover on the side of the processing chamber and exhausts it from the circulation chamber to the outside through the air permeable support base. Claim 1, characterized in that: the detection means performs detection within the circulation chamber; and the control means controls the exhaust air volume of the exhaust device. A smoke evacuation device for the laser processing device described.
JP62128881A 1987-05-26 1987-05-26 Exhauster for laser beam machine Granted JPS63295092A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62128881A JPS63295092A (en) 1987-05-26 1987-05-26 Exhauster for laser beam machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62128881A JPS63295092A (en) 1987-05-26 1987-05-26 Exhauster for laser beam machine

Publications (2)

Publication Number Publication Date
JPS63295092A true JPS63295092A (en) 1988-12-01
JPH033553B2 JPH033553B2 (en) 1991-01-18

Family

ID=14995663

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62128881A Granted JPS63295092A (en) 1987-05-26 1987-05-26 Exhauster for laser beam machine

Country Status (1)

Country Link
JP (1) JPS63295092A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04262888A (en) * 1991-02-15 1992-09-18 Olympus Optical Co Ltd Laser beam machine
JP2009172654A (en) * 2008-01-25 2009-08-06 Fuji Electric Holdings Co Ltd Laser beam machining apparatus
JP2014217862A (en) * 2013-05-09 2014-11-20 大日本印刷株式会社 Laser processing smoke cleaner and laser processing device
CN109773334A (en) * 2019-02-25 2019-05-21 京东方科技集团股份有限公司 Cut the removal device and cutting method of particle
JPWO2019082972A1 (en) * 2017-10-25 2020-11-26 株式会社ニコン Processing equipment and manufacturing method of moving body

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04262888A (en) * 1991-02-15 1992-09-18 Olympus Optical Co Ltd Laser beam machine
JP2009172654A (en) * 2008-01-25 2009-08-06 Fuji Electric Holdings Co Ltd Laser beam machining apparatus
JP2014217862A (en) * 2013-05-09 2014-11-20 大日本印刷株式会社 Laser processing smoke cleaner and laser processing device
JPWO2019082972A1 (en) * 2017-10-25 2020-11-26 株式会社ニコン Processing equipment and manufacturing method of moving body
CN109773334A (en) * 2019-02-25 2019-05-21 京东方科技集团股份有限公司 Cut the removal device and cutting method of particle

Also Published As

Publication number Publication date
JPH033553B2 (en) 1991-01-18

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