CN109773334A - Cut the removal device and cutting method of particle - Google Patents

Cut the removal device and cutting method of particle Download PDF

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Publication number
CN109773334A
CN109773334A CN201910163920.8A CN201910163920A CN109773334A CN 109773334 A CN109773334 A CN 109773334A CN 201910163920 A CN201910163920 A CN 201910163920A CN 109773334 A CN109773334 A CN 109773334A
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China
Prior art keywords
cutting
cut
target area
removal device
particle
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Granted
Application number
CN201910163920.8A
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Chinese (zh)
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CN109773334B (en
Inventor
罗昆
王玉柱
邓颖
朱春辉
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BOE Technology Group Co Ltd
Chengdu BOE Optoelectronics Technology Co Ltd
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BOE Technology Group Co Ltd
Chengdu BOE Optoelectronics Technology Co Ltd
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Priority to CN201910163920.8A priority Critical patent/CN109773334B/en
Publication of CN109773334A publication Critical patent/CN109773334A/en
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Publication of CN109773334B publication Critical patent/CN109773334B/en
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  • Processing Of Stones Or Stones Resemblance Materials (AREA)

Abstract

The present invention provides a kind of removal device and cutting method for cutting particle, and wherein the removal device includes: blowing structure, is used for above cutting board to be cut, towards the target area blow gas of the cutting board to be cut;Air extraction structure is evacuated for surrounding the target area above the cutting board to be cut, so that when cutting to the target area, particle when the blown afloat cutting of the blowing structure can be detached by the air extraction structure.The device passes through while being arranged blowing structure and air extraction structure, and blowing structure is used for the target area blow gas towards cutting board to be cut, generated cutting particle when cutting for blowing afloat to target area;The each position of air extraction structure for above target area is evacuated, and the cutting particle for enabling blowing structure to be blown afloat all is pulled out, and cutting particle is avoided to deposit on institute's cutting substrate.

Description

Cut the removal device and cutting method of particle
Technical field
The present invention relates to processing technique fields, refer in particular to a kind of removal device and cutting method for cutting particle.
Background technique
For the diversified development for adapting to display screen terminal, the display panel of variform is made, cutting has become display Usual technical process in manufacturing process, wherein cutting mode mostly uses laser cutting, particularly with the system of flexible display panels Make, the application of laser cutting is more extensive.
Molecule particle can be generated in laser cutting process, therefore there are subsequent mould group attaching process foreign matter It is the problem of risk, especially close-shaped in cutting, such as when cutting hole shape, since institute's cutting profile has closed spy Point, relative to the edge contour cutting of conventional flexible display screen, the particle generated in laser cutting process is easier Deposition in circular hole, therefore perform the foreign matter in laser cutting process and effectively remove and be of great significance to mould group production yield.
Summary of the invention
The purpose of technical solution of the present invention is to provide a kind of removal device and cutting method for cutting particle, can effectively go Except the particle generated in cutting process, particle is avoided to be deposited on cut substrate.
The embodiment of the present invention provides a kind of removal device for cutting particle, wherein includes:
Blowing structure is used for above cutting board to be cut, towards the target area blow gas of the cutting board to be cut;
Air extraction structure is evacuated for surrounding the target area above the cutting board to be cut, so that when to institute When stating target area and being cut, particle when the blown afloat cutting of the blowing structure can be detached by the air extraction structure.
Optionally, the removal device, wherein the inflatable mouth of the blowing structure on the cutting board to be cut just Projection is located in the target area;
The bleeding point of the air extraction structure is arranged above the cutting board to be cut around the inflatable mouth.
Optionally, the removal device, wherein the bleeding point of the inflatable mouth of the blowing structure and the air extraction structure Between be provided with insulating space, for passing through the laser beam cut to the target area.
Optionally, the removal device, wherein orthographic projection of the insulating space on the cutting board to be cut is formed For closed figure.
Optionally, the removal device, wherein the shape of the closed figure is cut with required for the target area The shape for cutting profile is identical.
Optionally, the removal device, wherein the removal device further include:
For placing the carrying base station of the cutting board to be cut, pass through wherein being provided with cutting material on the carrying base station Hole, the target area are located in cutting material through hole in the orthographic projection on the carrying base station.
Optionally, the removal device, wherein the removal device further include: be set to below the carrying base station Cutting material collection structure.
Optionally, the removal device, wherein the bleeding point is one, and cross section is formed as closed annular;Or Bleeding point described in person be it is multiple, the outer profile that multiple bleeding points are combined the orthographic projection on the cutting board to be cut is formed as Closed annular.
Optionally, the removal device, wherein the inflatable mouth be one, the shape of cross section in the target The shape of cutting profile required for region is identical;Or the inflatable mouth be it is multiple, multiple inflatable mouths are combined, described The shape of the outer profile of orthographic projection is identical as the shape of the cutting profile required for the target area on cutting board to be cut.
The embodiment of the present invention also provides a kind of cutting method, wherein includes:
During the target area for treating cutting substrate is cut, through blowing structure on cutting board to be cut Side, towards the target area blow gas, blows afloat the cutting particle in cutting process, while by air extraction structure described It is evacuated above cutting board to be cut around the target area, so that the cutting particle blown afloat is pulled out.
At least one of specific embodiment of the invention above-mentioned technical proposal has the advantages that
Removal device described in the embodiment of the present invention, while blowing structure and air extraction structure are set, wherein blowing structure is used for Towards the target area blow gas of cutting board to be cut, generated cutting particle when being cut for blowing afloat to target area; The each position of air extraction structure for above target area is evacuated, and the cutting particle for enabling blowing structure to be blown afloat is complete Portion is pulled out, and cutting particle is avoided to deposit on institute's cutting substrate.
Detailed description of the invention
Fig. 1 is the schematic diagram using the first use state of removal device described in the embodiment of the present invention;
Fig. 2 is the planar structure schematic diagram of removal device described in the embodiment of the present invention;
Fig. 3 is in removal device described in the embodiment of the present invention, and a wherein embodiment for the inflatable mouth of blowing structure is cutd open Face structural schematic diagram;
Fig. 4 is in removal device described in the embodiment of the present invention, and a wherein embodiment for the bleeding point of air extraction structure is cutd open Face structural schematic diagram;
Fig. 5 is the schematic diagram of the second use state of removal device described in the embodiment of the present invention.
Specific embodiment
To keep the technical problem to be solved in the present invention, technical solution and advantage clearer, below in conjunction with attached drawing and tool Body embodiment is described in detail.
It is being cut to solve the prior art, when being such as cut by laser, cutting can be generated in cutting process Particle is easy to generate deposition on institute's cutting substrate, influences the problem of cutting the production yield of made mould group, the present invention Embodiment provides a kind of removal device for cutting particle, and blowing structure and air extraction structure is arranged, and in cutting process, blows and takes out Gas acts on simultaneously, for blowing afloat the cutting particle generated in cutting process from institute's cutting substrate, and detaches institute's cutting substrate, Cutting particle is avoided to deposit on institute's cutting substrate.
Specifically, a wherein embodiment for the removal device of particle is cut described in the embodiment of the present invention, as shown in Figure 1, Include:
Blowing structure 100, for being puffed away towards the target area 11 of cutting board 1 to be cut in the top of cutting board 1 to be cut Body;
Air extraction structure 200, for above cutting board 1 to be cut surrounding target region 11 be evacuated so that when to target When region 11 is cut, particle when 100 blown afloat cutting of blowing structure can be detached by air extraction structure 200.
Removal device described in the embodiment of the present invention, while blowing structure 100 and air extraction structure 200 are set, wherein knot of blowing Structure 100 is used for 11 blow gas of target area towards cutting board 1 to be cut, is produced when cutting for blowing afloat to target area 11 Raw cutting particle;The each position of air extraction structure 200 for above target area 11 is evacuated, and blowing structure 100 is made The cutting particle blown afloat can be all pulled out, and cutting particle is avoided to deposit on institute's cutting substrate.
In the embodiment of the present invention, blowing structure 100 may include air compressor and connect with air compressor first Pipeline structure, first pipeline structure include inflatable mouth, and air compressor generates blow gas and passes sequentially through pipeline structure and blow After port, the target area 11 of cutting board 1 to be cut is blowed to;Air extraction structure 200 may include vacuum pumping pump and connect with vacuum pumping pump The second pipeline structure connect, which includes bleeding point, and air-flow when vacuum pumping pump is evacuated can pass through pumping Port enters the second pipeline structure.
Since the cutting particle that air extraction structure 200 needs to make to generate in cutting process detaches cutting board 1 to be cut, optionally, It is provided with particulate collecting structure on the second pipeline structure connecting with vacuum pumping pump, can be such as filter screen, be taken out for collecting From cutting particle.
Optionally, removal device described in the embodiment of the present invention, as depicted in figs. 1 and 2, the inflatable mouth 110 of blowing structure 100 It is located in target area 11 in the orthographic projection on cutting board 1 to be cut;
The bleeding point 210 of air extraction structure 200 is arranged above cutting board 1 to be cut around inflatable mouth.
By above-mentioned mode, what blowing structure 100 to be cut by the face on cutting board 1 to be cut of inflatable mouth 110 Target area 11 is blown downwards, is enabled and is blowed to target in the cutting particle for generate in cutting process to target area 11 The peripheral edge in region 11.In addition, the bleeding point 210 due to air extraction structure 200 is set above cutting board 1 to be cut around inflatable mouth It sets, 200 surrounding target region 11 of air extraction structure is evacuated, blowing structure 100 is blown afloat respectively in target area The cutting particle at 11 edge of domain all siphons away, and cutting particle is avoided to deposit on institute's cutting substrate.
Optionally, the removal device that particle is cut described in the embodiment of the present invention can be applied to be cut by laser, for removing The cutting particle generated in laser cutting process avoids cutting particle from depositing on institute's cutting substrate.
Certainly, the removal device is not limited to can be only applied to be cut by laser, and it is micro- that other cutting process can generate cutting The cutting mode of grain can be applied to the removal device of the embodiment of the present invention.
It should be noted that removal device described in the embodiment of the present invention, cuts by blowing structure and air extraction structure removal When cutting when generated cutting particle, the inflatable mouth 110 of blowing structure 100 is not limited to only be set as in cutting board 1 to be cut The structure that top face target area 11 is blown is evacuated since air extraction structure 200 is arranged around target area 11, Therefore it when the inflatable mouth 110 of blowing structure 100 is relative to target area 11 at an angle, blows afloat and is generated in cutting process When cutting particle, the cutting in each direction can be extracted in such a way that 200 surrounding target region 11 of air extraction structure is evacuated Particle.
A wherein embodiment for removal device described in the embodiment of the present invention, as shown in Fig. 2, the air blowing of blowing structure 100 It is provided with insulating space 300 between mouth 110 and the bleeding point 210 of air extraction structure 200, target area 11 is cut for making Laser beam pass through.
Removal device described in the embodiment of the present invention, blowing structure 100 and air extraction structure 200 are all set in target area 11 Insulating space is arranged between the inflatable mouth 110 of blowing structure 100 and the bleeding point 210 of air extraction structure 200 by making in surface 300, laser beam can be made to pass through removal device, target area 11 is cut by laser, therefore the setting of removal device will not shadow Ring cutting process.
Optionally, orthographic projection of the insulating space 300 on cutting board 1 to be cut is formed as closed figure.
Specifically, by above-mentioned set-up mode, insulating space 300 is formed as sharp around the inflatable mouth of blowing structure 100 Cutting path when light beam is cut, in this way when being cut by laser, laser beam can be along insulating space 300 with a desired trajectory It is mobile, it is cut into the profile of default closed figure on target area 11, can such as be cut into round hole, square hole or other are different Shape hole etc..
Optionally, the shape of the closed figure is identical as the shape of the cutting profile required for target area 11.
For example, when need when target area 11 is cut into round hole, insulating space 300 on cutting board 1 to be cut just It is projected as circle, is cut along the insulating space 300, can cut to form required shape.
In the embodiment of the present invention, optionally, the inflatable mouth 110 of blowing structure 100 is one, cross sectional shape in target area The shape of cutting profile required for domain 11 is identical.For example, when needing the blowing structure when target area 11 is cut into round hole 100 inflatable mouth is formed as round, as shown in Figure 2;When need when target area 11 is cut into square hole, blowing structure 100 Inflatable mouth be formed as rectangular.Using which, the size and required cutting profile of the inflatable mouth of blowing structure 100 can be made Size be adapted, such as slightly smaller than required for cutting profile size, to guarantee effectively blow afloat and cut by blowing structure 100 Cutting particle during cutting.
In addition, it is necessary to explanation, the inflatable mouth 110 of blowing structure 100 is not limited to only can be one, or more A, as shown in figure 3, in the orthographic projection of cutting board 1 to be cut, multiple inflatable mouths 110 can be in array arranged distribution, and multiple blow The chamfered shape that port 110 is combined is identical as the shape of the cutting profile required for target area 11.
In the embodiment of the present invention, the bleeding point 210 of air extraction structure 200 can be one, and cross section is formed as closed ring Shape, as shown in Figure 2.Optionally, the edge shape of the cross section of bleeding point 210 and the cutting profile required for target area 11 Shape is identical.For example, the edge shape of the cross section of bleeding point 210 is when needing when target area 11 is cut into round hole Circle, as shown in Figure 2;When needs are when target area 11 is cut into square hole, the edge shape of the cross section of bleeding point 210 can Think rectangular.Using which, the size of the bleeding point of air extraction structure 200 and the size of required cutting profile can be made mutually to fit Match, be such as slightly larger than the size of required cutting profile, to guarantee effectively extract in cutting process by air extraction structure 200 Cut particle.
It should be noted that the bleeding point 210 of air extraction structure 200 can be not limited to one, or it is multiple, such as scheme Shown in 4, in the orthographic projection of cutting board 1 to be cut, multiple bleeding points 210 can be arranged successively, and multiple bleeding points 210 are combined Chamfered shape be closed ring, and the optionally shape at the edge of closed ring and the cutting profile required for target area 11 It is identical.
In the embodiment of the present invention, optionally, referring to figure 1 and figure 5, the removal device further include:
For placing the carrying base station 400 of cutting board 1 to be cut, wherein being provided with cutting material through hole on carrying base station 400 410, wherein target area 11 is located in cutting material through hole 410 in the orthographic projection on carrying base station 400.
In the embodiment of the present invention, the size of cutting material through hole 410 is greater than the cutting profile required for cutting board 1 to be cut Size.In addition, the target area 11 that cutting board 1 to be cut is cut is placed in bearing substrate before being cut On 400, the surface of cutting material through hole 410.In this way, can be made by the setting of cutting material through hole 410 from base to be cut The cutting material that cuts down on plate 1 is fallen from carrying base station 400, forms cutting material and cutting particle falls channel, avoid Deposition is generated on substrate after dicing.
Optionally, in the embodiment of the present invention, the removal device further includes the cutting material for being set to 400 lower section of carrying base station Collection structure 500, to facilitate cutting to expect and cut collection and the splendid attire of particle.
In the embodiment of the present invention, optionally, the removal device further includes carrying frame body, and wherein blowing structure and pumping are tied Structure can be both secured on the carrying frame body, for realizing being connected and fixed between blowing structure and air extraction structure.
Optionally, it can be also used for cutting for installation laser cutting for installing the carrying frame body of blowing structure and air extraction structure Head is cut, which is slidably mounted on the carrying frame body, and it is mobile relative to carrying frame body when being cut by laser, For being cut along predefined paths.
In the embodiment of the present invention, optionally, the target area 11 on cutting board 1 to be cut is puffed away by blowing structure 100 Body reaches the region on cutting board 1 to be cut, which can be greater than or equal to the cutting profile required for cutting board 1 to be cut.Tool Body, required cutting profile is located within the target area 11 on cutting board 1 to be cut.
Removal device described in the embodiment of the present invention, by blowing structure 100 on the target area 11 of cutting board 1 to be cut to Lower blow gas, as shown in Figure 1, when wanted cutting profile is closed figure, but when the non-complete penetration in cutting profile part, air blowing The blown out air-flow of structure 100 will cut particle and blow the outer edge of cutting board 1 to be cut, can be enclosed using air extraction structure 200 at this time The structure being evacuated around target area 11 blows afloat blowing structure 100 respectively in the cutting particle at 11 edge of target area It all siphons away, cutting particle is avoided to deposit on institute's cutting substrate;When institute's cutting profile is partially completed, as shown in figure 5, to be cut When cutting board 1 forms cutting hole, blowing structure 100 can be continued with and blown to cutting section, so that cutting section is residual The cutting particle stayed can be fallen by cutting material through hole 410, to avoid residual cutting particle on cutting section.
Therefore, using removal device described in the embodiment of the present invention, it can effectively remove and be generated in cutting process Particle avoids particle from being deposited on cut substrate, to reduce the particle wind in mould group attaching process Danger.
On the other hand the embodiment of the present invention also provides a kind of cutting method, the cutting method is using above-mentioned cutting particle Removal device, wherein the cutting method includes:
During the target area for treating cutting substrate is cut, through blowing structure on cutting board to be cut Side, towards the target area blow gas, blows afloat the cutting particle in cutting process, while by air extraction structure described It is evacuated above cutting board to be cut around the target area, so that the cutting particle blown afloat is pulled out.
Using cutting method described in the embodiment of the present invention, so that blowing during treating cutting substrate and being cut It is acted on when with air pump, for blowing afloat the cutting particle generated in cutting process from institute's cutting substrate, and detaches and cut Substrate avoids cutting particle from depositing on institute's cutting substrate.
Optionally, by blowing structure above cutting board to be cut, when towards the target area blow gas, from target The surface in region target area blow gas described in face downward, so as to target area generate in cutting process Cutting particle can blow to the peripheral edge of target area, and when cut closed figure, can make cutting particle blow to The lower section of cutting substrate avoids cutting particle deposition on cutting board to be cut.
Above-described is the preferred embodiment of the present invention, it should be pointed out that the ordinary person of the art is come It says, under the premise of not departing from principle of the present invention, can also make several improvements and retouch, these improvements and modifications should also regard For protection scope of the present invention.

Claims (10)

1. a kind of removal device for cutting particle characterized by comprising
Blowing structure is used for above cutting board to be cut, towards the target area blow gas of the cutting board to be cut;
Air extraction structure is evacuated for surrounding the target area above the cutting board to be cut, so that when to the mesh Mark region is when being cut, and particle when the blown afloat cutting of the blowing structure can be detached by the air extraction structure.
2. removal device according to claim 1, which is characterized in that the inflatable mouth of the blowing structure is described to be cut Orthographic projection on substrate is located in the target area;
The bleeding point of the air extraction structure is arranged above the cutting board to be cut around the inflatable mouth.
3. removal device according to claim 2, which is characterized in that the inflatable mouth of the blowing structure and the pumping are tied It is provided with insulating space between the bleeding point of structure, for passing through the laser beam cut to the target area.
4. removal device according to claim 3, which is characterized in that the insulating space is on the cutting board to be cut Orthographic projection is formed as closed figure.
5. removal device according to claim 4, which is characterized in that the shape of the closed figure in the target area The shape of cutting profile required for domain is identical.
6. removal device according to any one of claims 1 to 5, which is characterized in that the removal device further include:
For placing the carrying base station of the cutting board to be cut, wherein being provided with cutting material through hole, institute on the carrying base station Target area is stated to be located in cutting material through hole in the orthographic projection on the carrying base station.
7. removal device according to claim 6, which is characterized in that the removal device further include: be set to described hold Carry the cutting material collection structure below base station.
8. removal device according to claim 2, which is characterized in that the bleeding point is one, and cross section is formed as sealing The annular closed;Or the bleeding point be it is multiple, multiple bleeding points are combined the orthographic projection on the cutting board to be cut Outer profile is formed as closed annular.
9. removal device according to claim 2, which is characterized in that the inflatable mouth be one, the shape of cross section with The shape of the cutting profile required for the target area is identical;Or the inflatable mouth is multiple, multiple inflatable mouth phases Combination, the shape of the shape Yu the cutting profile required for the target area of the outer profile of orthographic projection on the cutting board to be cut Shape is identical.
10. a kind of cutting method characterized by comprising
During the target area for treating cutting substrate is cut, through blowing structure above cutting board to be cut, court The cutting particle in cutting process is blown afloat in the target area blow gas, while by air extraction structure described to be cut It is evacuated above cutting board around the target area, so that the cutting particle blown afloat is pulled out.
CN201910163920.8A 2019-02-25 2019-02-25 Cutting particle removing device and cutting method Active CN109773334B (en)

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CN201910163920.8A CN109773334B (en) 2019-02-25 2019-02-25 Cutting particle removing device and cutting method

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CN109773334A true CN109773334A (en) 2019-05-21
CN109773334B CN109773334B (en) 2021-10-22

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JPS63295092A (en) * 1987-05-26 1988-12-01 Jido Hosei Syst Gijutsu Kenkyu Kumiai Exhauster for laser beam machine
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CN203992816U (en) * 2014-05-30 2014-12-10 深圳市吉阳自动化科技有限公司 Laser cutting dust arrester and laser die cutting machine
CN104923924A (en) * 2015-06-05 2015-09-23 江苏塞维斯数控科技有限公司 Dedusting laser cutting machine
CN204867812U (en) * 2015-04-30 2015-12-16 深圳光韵达激光应用技术有限公司 Dust collector and laser cutting equipment of laser cutting equipment
CN107584209A (en) * 2016-07-08 2018-01-16 京东方科技集团股份有限公司 Laser cutting device
CN207155036U (en) * 2017-09-21 2018-03-30 艾博特镭射科技徐州有限公司 A kind of novel optical fiber laser cutting machine
CN108568603A (en) * 2018-04-18 2018-09-25 武汉华星光电半导体显示技术有限公司 Cleaning assemblies and clean method, laser cutting device
CN208214593U (en) * 2018-04-12 2018-12-11 成都锦兴机电有限责任公司 A kind of tunica albuginea laser cutting machine
CN109249128A (en) * 2018-10-22 2019-01-22 大族激光科技产业集团股份有限公司 It blows and takes out dirt device and ceramic substrate laser boring method
CN208408917U (en) * 2018-05-16 2019-01-22 雷科股份有限公司 Laser cutting process equipment

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63295092A (en) * 1987-05-26 1988-12-01 Jido Hosei Syst Gijutsu Kenkyu Kumiai Exhauster for laser beam machine
JPH08215866A (en) * 1995-02-16 1996-08-27 Oomu Corp:Kk Engraving method by laser system
JP3406118B2 (en) * 1995-04-19 2003-05-12 ジヤトコ株式会社 Processing equipment using laser beam
TW200639030A (en) * 2005-05-02 2006-11-16 Chi Mei Optoelectronics Corp Cutting apparatus with cleaning device
CN203992816U (en) * 2014-05-30 2014-12-10 深圳市吉阳自动化科技有限公司 Laser cutting dust arrester and laser die cutting machine
CN204867812U (en) * 2015-04-30 2015-12-16 深圳光韵达激光应用技术有限公司 Dust collector and laser cutting equipment of laser cutting equipment
CN104923924A (en) * 2015-06-05 2015-09-23 江苏塞维斯数控科技有限公司 Dedusting laser cutting machine
CN107584209A (en) * 2016-07-08 2018-01-16 京东方科技集团股份有限公司 Laser cutting device
CN207155036U (en) * 2017-09-21 2018-03-30 艾博特镭射科技徐州有限公司 A kind of novel optical fiber laser cutting machine
CN208214593U (en) * 2018-04-12 2018-12-11 成都锦兴机电有限责任公司 A kind of tunica albuginea laser cutting machine
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CN109249128A (en) * 2018-10-22 2019-01-22 大族激光科技产业集团股份有限公司 It blows and takes out dirt device and ceramic substrate laser boring method

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