JPS63291430A - 半導体ウェハテスト装置 - Google Patents

半導体ウェハテスト装置

Info

Publication number
JPS63291430A
JPS63291430A JP62127623A JP12762387A JPS63291430A JP S63291430 A JPS63291430 A JP S63291430A JP 62127623 A JP62127623 A JP 62127623A JP 12762387 A JP12762387 A JP 12762387A JP S63291430 A JPS63291430 A JP S63291430A
Authority
JP
Japan
Prior art keywords
current
contact
probe
probe needles
probe needle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62127623A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0531822B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Eiki Arasawa
荒沢　永樹
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP62127623A priority Critical patent/JPS63291430A/ja
Publication of JPS63291430A publication Critical patent/JPS63291430A/ja
Publication of JPH0531822B2 publication Critical patent/JPH0531822B2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02D—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN INFORMATION AND COMMUNICATION TECHNOLOGIES [ICT], I.E. INFORMATION AND COMMUNICATION TECHNOLOGIES AIMING AT THE REDUCTION OF THEIR OWN ENERGY USE
    • Y02D30/00—Reducing energy consumption in communication networks
    • Y02D30/70—Reducing energy consumption in communication networks in wireless communication networks

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP62127623A 1987-05-25 1987-05-25 半導体ウェハテスト装置 Granted JPS63291430A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62127623A JPS63291430A (ja) 1987-05-25 1987-05-25 半導体ウェハテスト装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62127623A JPS63291430A (ja) 1987-05-25 1987-05-25 半導体ウェハテスト装置

Publications (2)

Publication Number Publication Date
JPS63291430A true JPS63291430A (ja) 1988-11-29
JPH0531822B2 JPH0531822B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-05-13

Family

ID=14964665

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62127623A Granted JPS63291430A (ja) 1987-05-25 1987-05-25 半導体ウェハテスト装置

Country Status (1)

Country Link
JP (1) JPS63291430A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012530915A (ja) * 2009-06-22 2012-12-06 カスケード・マイクロテク・ドレスデン・ゲゼルシャフト・ミト・ベシュレンクテル・ハフツング 試験対象物の測定方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012530915A (ja) * 2009-06-22 2012-12-06 カスケード・マイクロテク・ドレスデン・ゲゼルシャフト・ミト・ベシュレンクテル・ハフツング 試験対象物の測定方法

Also Published As

Publication number Publication date
JPH0531822B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-05-13

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