JPS6328645B2 - - Google Patents

Info

Publication number
JPS6328645B2
JPS6328645B2 JP57217570A JP21757082A JPS6328645B2 JP S6328645 B2 JPS6328645 B2 JP S6328645B2 JP 57217570 A JP57217570 A JP 57217570A JP 21757082 A JP21757082 A JP 21757082A JP S6328645 B2 JPS6328645 B2 JP S6328645B2
Authority
JP
Japan
Prior art keywords
reactive gas
container
gas
silane
fluoride
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57217570A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59105804A (ja
Inventor
Shunpei Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Priority to JP57217570A priority Critical patent/JPS59105804A/ja
Publication of JPS59105804A publication Critical patent/JPS59105804A/ja
Publication of JPS6328645B2 publication Critical patent/JPS6328645B2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Photovoltaic Devices (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Silicon Compounds (AREA)
JP57217570A 1982-12-11 1982-12-11 半導体用反応性気体精製方法 Granted JPS59105804A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57217570A JPS59105804A (ja) 1982-12-11 1982-12-11 半導体用反応性気体精製方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57217570A JPS59105804A (ja) 1982-12-11 1982-12-11 半導体用反応性気体精製方法

Publications (2)

Publication Number Publication Date
JPS59105804A JPS59105804A (ja) 1984-06-19
JPS6328645B2 true JPS6328645B2 (enExample) 1988-06-09

Family

ID=16706334

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57217570A Granted JPS59105804A (ja) 1982-12-11 1982-12-11 半導体用反応性気体精製方法

Country Status (1)

Country Link
JP (1) JPS59105804A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59162119A (ja) * 1983-03-03 1984-09-13 Semiconductor Energy Lab Co Ltd 気相反応用シラン精製方法
CN102628546A (zh) * 2012-04-17 2012-08-08 南京特种气体厂有限公司 硅烷纯化与灌装用冷阱系统

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57122904A (en) * 1981-01-23 1982-07-31 Toshiba Corp Removal of accumulated substance in cold trap apparatus

Also Published As

Publication number Publication date
JPS59105804A (ja) 1984-06-19

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