JPS6328603Y2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an automatic sorting apparatus for semiconductor devices, and more particularly, to an automatic sorting apparatus used for characterizing semiconductor elements having long and thin leads at both ends.

Generally, in the final manufacturing process of semiconductor devices, multiple electrical characteristics are measured, and the manufactured semiconductor devices are sorted and classified according to the device characteristics. Various methods are used for this measurement and sorting, depending on the structure of the element and measurement conditions, but the performance required of a sorter for mass production is high-speed processing and accurate discrimination. .

The semiconductor elements to be selected according to the present invention are glass-sealed diodes 1 as shown in FIG.
(hereinafter referred to as a diode), 2 is a glass sealing part, 3a and 3b are its extraction terminals (hereinafter referred to as leads), and the leads are made of magnetic metal. FIG. 2 is a diagram of an example of the conventional automatic sorting apparatus for semiconductor devices, and the structure and operation thereof will be explained below.

The diodes 1 aligned in a certain direction according to a parts supply plan (not shown) are sent one after another through a chute 4 to a portion where a singulation mechanism 5 is provided. The diodes 1, which are dropped one by one at regular intervals along the chute 4 by the singulation mechanism 5, are fed into a measuring drum 6 which performs an intermittent rotational movement in synchronization with the singulation mechanism 5. The measuring drum 6 transports the diode 1, and has measuring terminals 7 at multiple locations outside the periphery of the measuring drum 6 that contact the leads 3a, 3b of the diode 1, and an attached automatic characteristic measuring device (not shown). ) to measure the characteristics. A charging chute 8 is provided at a location below the measuring drum 6, and a movable chute 9 is provided at the lower end of the charging chute 8 and is rotatably displaced around this chute.
are connected to each other, and this is interlocked with a motor 11 provided within the sorting chamber 10. The movable chute 9 is driven by a measurement judgment signal (classification signal) sent to the motor 11 by an automatic characteristic measuring device (not shown) attached to the measurement contact 7, and is moved so as to face a classification chute 12 to be described later. It's getting old. The upper end entrance of the classification chute 12 is located on the rotation trajectory of the movable chute 9, and
These exit ends are provided at a plurality of locations so as to face the classification storage box 13. The diode 1 introduced into the input chute 8 passes through the movable chute 9 and the classification chute 12 and is stored in the classification storage box 13. At this time, the movable chute 9 is moved to a predetermined classification chute 12 by the motor 11 according to the classification signal. The rotation of the diode 1 is stopped in advance at the position , and the diode 1 is classified.

However, in the case of such automatic sorting equipment, the index cannot be increased as much because the separation of elements is done through a chute through which only one element passes through and an individualization mechanism whose mechanism is operated by electrical signals. Because the movable chute is used to classify the elements, there is a risk of misclassification caused by the stop position of the movable chute shifting, and if the elements pass through the movable chute. ,
There are problems such as the fact that the next classification operation cannot be started until after entering the classification shoot, and even classification takes time.Generally, as an automatic sorting device, accurate and high-speed classification is important. This was extremely inappropriate.

In view of these conventional circumstances, the present invention provides an automatic sorting device that can perform sorting operations such as individualization, measurement, and classification of semiconductor elements at high speed and accurately using an extremely simple and streamlined mechanism. It is something.

The gist of the present invention is to use an automatic sorting device for semiconductor devices having elongated leads at both ends, in which magnets are aligned in parallel so that the lead direction of the semiconductor devices and the main magnetic flux direction match, the semiconductor devices are suspended by magnetic force, and the semiconductor devices are placed in an aligned state. The device has a magnetic box that is housed in a magnetic box, and a semiconductor device holding member consisting of magnets arranged at regular intervals around the periphery. A rotary table that transfers intermittently, a drive mechanism that rotates the rotary table in one direction intermittently, and a drive mechanism that is installed outside the periphery of the rotary table and measures a plurality of semiconductor devices independently for each semiconductor device. A measurement terminal section that performs simultaneous measurements, an automatic characteristic measuring device that is connected to the measurement terminal section and measures various electrical characteristics of the semiconductor element and sends out classification signals, and an extraction fitting that takes out the measured semiconductor element from the holding member of the rotary table. A sliding piece to which the extraction fitting is attached, a solenoid actuator that is excited by the classification signal sent from the automatic characteristic measuring device and causes the sliding piece to reciprocate, and an input device that receives the semiconductor element taken out from the rotary table by the extraction fitting. A take-out and sorting mechanism section that simultaneously performs multiple sorts is provided with take-out mechanisms consisting of shoots at multiple locations outside the periphery of the rotary table, the same number as the number of classifications; a conductive hose that guides the semiconductor devices to the storage section; and the magnet. An automatic sorting device for semiconductor devices is characterized in that it has a plurality of sorting storage sections for arranging semiconductor devices in a floating state, similar to a box.

The details of the present invention will be explained below with reference to Examples. FIG. 3a is an overall view of an automatic sorting device for semiconductor devices according to an embodiment of the present invention, and FIGS. 3b to 3g
3b is a partial view, FIG. 3b is a detailed view of the rotating drum, FIG. 3d is a drive section, FIG. 3e is a measuring contact section, FIG. 3f is a take-out mechanism section, Figure 3g
is the classification box section. As shown in the overall view and detailed partial view, the magnets 14a and 14b are attached to the magnet box 15 so that the main magnetic flux direction coincides with the lead direction of the diode 1, and the magnet box 15 is slightly tapered in the direction of movement. A large number of diodes 1 are stored in a floating state and move forward while being aligned. Furthermore, diodes are provided at regular intervals on the periphery of the rotary table 18, which is disposed at a position where a portion of the periphery enters the open end of the magnetic box 15, and which performs intermittent rotational movement in one direction by the drive mechanism section 22. The leads 3a, b of the diode 1 are held by the magnets 16a, b, which hold the leads 3a, b of the diode 1, and the recess 17 has a shape that is large enough to accommodate one glass sealing part 2. The diode 1 whose sealing part 2 has entered the recess 17 is held stronger than the magnetic force of the magnetic box 15 and is transferred from inside the magnet box 15 to the outside, but the glass sealing part 2 of the diode 1 has already entered the recess 17. Since the diode 1 whose glass sealing part 2 does not fit into the concave part 17 is not securely held by the magnets 16a and 16b, it remains inside the magnet box 15 due to the magnetic force of the magnet box 15 and is rotated intermittently in one direction. The diodes 1 are held by the next magnets 16a, b of the rotary table 18 and the recess 17, and the diodes 1 are separated and held by repeating the above operations.

As described above, the diodes 1 are separated and held without using a mechanical separating mechanism, and the diodes 1 housed in the magnetic box 15 are separated one by one at high speed and placed on the peripheral side of the rotary table 18. The measuring terminal section 29,
It is transferred to the classification and extraction mechanism section 39. The diodes 1, which are individually held on the peripheral side of the rotary table 18 and sequentially transferred to the measurement terminal section 29, are placed at the stop position of the intermittent rotational movement of the rotary table 18, which is provided to efficiently perform multi-item measurements. A plurality of measuring contacts 28 are brought into contact with the leads 3a, b of a plurality of diodes 1 to be measured by springs 25, and each measuring contact 28 is connected to the plurality of measuring contacts 28 in order to efficiently measure multiple items. 28
A plurality of diodes 1 are simultaneously measured at a plurality of locations (measuring contacts 28) by an automatic characteristic measuring device 27 consisting of a measuring device 30 and a register 31, which are configured so that the measurement time is a nearly uniform combination of measurement items.
Diode 1 from automatic characteristic measuring device 27 to
, and synchronizes the measurement judgment of a plurality of diodes with the intermittent rotational movement of the rotary table 18, and performs them simultaneously during the stop time of the rotary table 18, thereby transferring the diodes 1 to be measured in one direction. , and are continuously measured while being held on the rotary table 18. The diodes 1 are measured while being held on the rotary table 18, passed through the measurement terminal section 29, and sequentially transferred to the classification/extraction mechanism section 39. Classification is performed by a classification/extraction mechanism section 39 having the same number of extraction mechanisms 38 at a plurality of locations, and a classification signal shifted by the register 31 of the diode 1 measured by the automatic characteristic measuring device 27 at each measurement contact 28 . The extraction fitting 32 provided on the sliding piece 34 of the extraction mechanism 38 is normally positioned so as not to impede the rotational transfer of the diode 1 held on the rotary table 18 by the spring 36, and also to adjust the timing of the intermittent rotation of the rotary table 18. In synchronization with this, the solenoid actuator 35 is energized by the classification signal shifted by the register 31 of the automatic characteristic measuring device 27 while the rotary table 18 is stopped in intermittent rotation, and the take-out metal fitting 32 is energized.
When the diode 1 is removed from the rotary table 18, the solenoid actuator 35 is released while the rotary table 18 is stopped, and the spring 3 is returned to its original position where it does not interfere with the rotational transfer of the diode 1.
Perform a reciprocating motion returning to step 6. That is, when the diode 1 that has been sequentially transferred and sent to the first extraction mechanism 38 is to be extracted by the first extraction mechanism 28 according to the classification signal sent from the automatic characteristic measuring device 27, the extraction mechanism 38 The solenoid actuator 35 operates, and the diode 1 is taken out from the rotary table 18 using the take-out fitting 32.
Throw it into the opposing feeding chute 37. When the classification signal indicates that the diode 1 is not to be extracted by the first extraction mechanism 38, the extraction mechanism 38 is not operated and the diode 1 passes through the extraction mechanism 38 and is then transferred to the extraction mechanism 38. The diodes 1 are extracted and classified by one of the extraction mechanisms 38 specified by the classification signals sent one after another in synchronization with the intermittent rotational movement of the rotary table 18.

The diodes 1 that are sequentially transferred as described above are simultaneously taken out and sorted according to their characteristics by the take-out mechanisms 38 for each characteristic provided at a plurality of locations.

Note that the holding members (magnets 16, recesses 17) provided at regular intervals on the rotary table 18, the measurement contacts 28 of the measurement terminal section 29, and the classification/extraction mechanism section 3
9 has the same positional relationship with the take-out mechanism 38.
The diodes 1 which are taken out from the rotary table 18 by the take-out mechanism 38 and put into each input chute 37 are placed inside a conductive hose 41 that connects the input chute 37 and the storage box 43 of the alignment storage section 45 to prevent electrostatic damage. magnet 4 so that the lead direction of diode 1 matches the main magnetic flux direction.
2 are balanced in a plurality of rows, and stored in the same number of storage boxes 43 as the number of classifications provided between the magnets 42 in an aligned state.

By storing the diodes 1 in an aligned state, it is possible to achieve a high storage density and also to easily take out the diodes 1 from the storage box 43.

As described above, in the automatic semiconductor device sorting apparatus of the present invention, the magnet box 15, the magnet 16 of the rotary table 18 that rotates in one direction, and the recess 17 are used to quickly and reliably separate the semiconductor devices without using a mechanical singulation mechanism. Diode individualization, retention,
The measurement contact 28 can also be
are installed at a plurality of locations, the measurement of multiple items on the diode is divided into each measurement contact 28, and the plurality of diodes 1 to be measured are transported in one direction and measured simultaneously while being held on the rotary table 18. Similarly, the extraction mechanisms 38 are provided at a plurality of locations, the same number as the number of classifications, and the extraction and classification of the diodes 1 for each characteristic is performed by the extraction mechanism 38 for each characteristic. There is no misclassification, and by operating a plurality of takeout mechanisms 38 simultaneously, classification can be performed in a short time, and furthermore, the measurement and classification can be performed simultaneously during the stop time of the intermittent rotation of the rotary table 18. .

As explained above, according to the present invention, the selection operations of individualizing, measuring, and classifying semiconductor elements can be performed quickly and accurately using an extremely simple and streamlined mechanism.

[Brief explanation of drawings]

FIG. 1 shows semiconductor devices to be sorted according to the present invention, FIG. 2 is an overall view of a conventional sorting device, and FIGS. 3 a to 3 g show an automatic sorting device for semiconductor devices according to an embodiment of the present invention. Figure 3a is the overall view, Figure 3b
is a partial view of the supply section, FIG. 3c is a partial view of the rotating drum,
Fig. 3 d is a partial view of the drive part, Fig. 3 e is a partial view of the measuring contact part, Fig. 3 f is a partial view of the extraction mechanism part, and Fig. 3
Figure g is a partial view of the classification box section. 1...Glass sealed diode (diode),
2...Glass sealing part, 3a, b...Output terminals (leads), 4...Chute, 5...Individuation mechanism,
6... Measuring drum, 7... Measuring contact, 8... Input chute, 9... Movable chute, 10... Sorting chamber, 11... Motor, 12... Sorting chute, 1
3... Classification storage box, 14a, b... Magnet,
15... Magnet box, 16a, b... Magnet, 17... Recess, 18... Rotary table, 19... Motor, 20... Index cam box, 21... Reduction gear, 22... Drive mechanism section , 23... Support shaft, 24... Electrode tip, 25...
... Spring, 26 ... Plate electrode, 27 ... Automatic characteristic measuring device, 28 ... Measurement contact, 29 ... Measurement terminal section, 30 ... Measuring instrument, 31 ... Register, 32
...Takeout fitting, 33...Support, 34...Sliding piece, 35...Solenoid actuator, 36...Spring,
37...Input chute (receiving pipe), 38...
...Take-out mechanism, 39...Classification take-out mechanism section, 40
... Alignment storage section, 41 ... Conductive hose, 42 ...
...Magnet, 43...Storage box, 44...Dolly.

Claims (1)

[Scope of utility model registration request] A magnet box that stores magnets in parallel so that the lead direction of a semiconductor element whose leads are led out from both ends and the main magnetic velocity direction coincides with the main magnetic velocity direction, and in which the semiconductor element is suspended by magnetic force; A rotary table having a semiconductor element holding member made of magnets arranged at intervals and for picking up and transferring the semiconductor elements one by one from the magnetic box, and a plurality of measurement terminals provided outside the periphery of the rotary table. a measuring device that simultaneously measures the electrical characteristics of a plurality of semiconductor elements and generates a classification signal in a state where a plurality of semiconductor elements are held by the holding member of the rotary table; a sliding piece having an extraction fitting for taking out a semiconductor element from a holding member of the rotary table; a driving section for reciprocating the sliding piece in response to a classification signal generated from the measuring device; and a sorting mechanism section, which is a loading chute for receiving semiconductor devices that have been placed and is provided outside the periphery of the rotary table in the same number as the number of classifications, and simultaneously takes out semiconductor devices corresponding to each classification. An automatic sorting device for semiconductor devices characterized by the following.