JPS63285553A - Electrophotographic sensitive body - Google Patents
Electrophotographic sensitive bodyInfo
- Publication number
- JPS63285553A JPS63285553A JP12052587A JP12052587A JPS63285553A JP S63285553 A JPS63285553 A JP S63285553A JP 12052587 A JP12052587 A JP 12052587A JP 12052587 A JP12052587 A JP 12052587A JP S63285553 A JPS63285553 A JP S63285553A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- photoconductive layer
- inter
- photoconductive
- intermediate layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010410 layer Substances 0.000 claims abstract description 49
- 239000002344 surface layer Substances 0.000 claims abstract description 20
- 229910021417 amorphous silicon Inorganic materials 0.000 claims abstract description 17
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 5
- 230000003287 optical effect Effects 0.000 claims abstract description 5
- 229910052710 silicon Inorganic materials 0.000 claims abstract 4
- 239000004065 semiconductor Substances 0.000 claims abstract 2
- 108091008695 photoreceptors Proteins 0.000 claims description 31
- 239000000758 substrate Substances 0.000 claims description 3
- 238000010030 laminating Methods 0.000 abstract 1
- 239000000463 material Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 230000014759 maintenance of location Effects 0.000 description 4
- 206010034972 Photosensitivity reaction Diseases 0.000 description 3
- 230000036211 photosensitivity Effects 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 239000011669 selenium Substances 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- WUPHOULIZUERAE-UHFFFAOYSA-N 3-(oxolan-2-yl)propanoic acid Chemical compound OC(=O)CCC1CCCO1 WUPHOULIZUERAE-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- CJPQIRJHIZUAQP-MRXNPFEDSA-N benalaxyl-M Chemical compound CC=1C=CC=C(C)C=1N([C@H](C)C(=O)OC)C(=O)CC1=CC=CC=C1 CJPQIRJHIZUAQP-MRXNPFEDSA-N 0.000 description 1
- 229910052980 cadmium sulfide Inorganic materials 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910052711 selenium Inorganic materials 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
- G03G5/00—Recording members for original recording by exposure, e.g. to light, to heat, to electrons; Manufacture thereof; Selection of materials therefor
- G03G5/02—Charge-receiving layers
- G03G5/04—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor
- G03G5/08—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic
- G03G5/082—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic and not being incorporated in a bonding material, e.g. vacuum deposited
- G03G5/08214—Silicon-based
- G03G5/08235—Silicon-based comprising three or four silicon-based layers
Landscapes
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Photoreceptors In Electrophotography (AREA)
Abstract
Description
【発明の詳細な説明】
く技術分野〉
本発明は電子写真感光体に関し、特に光導電層が主にア
モルファスシリコンa −S iからなル感光体に関す
るものである。DETAILED DESCRIPTION OF THE INVENTION Technical Field The present invention relates to an electrophotographic photoreceptor, and more particularly to a photoreceptor in which a photoconductive layer is mainly made of amorphous silicon a-Si.
〈従来技術〉
現在実用化されている電子写真プロセスに供し得る感光
体としては、基本的には高い抵抗値と高い感光度の両者
を兼ね備えることが要求され、このような特性をもつ材
料として従来から硫化カドミウム粉末を有機樹脂中に分
散した樹脂分散型と、アモルファスセレン(a−Se)
やアモルファス(1! vン砒素(a −Asz Se
s )等のアモルファス材料によるものの2種類が最も
広く用いられてきた。<Prior art> A photoreceptor that can be used in the electrophotographic process currently in practical use is basically required to have both high resistance and high photosensitivity. resin-dispersed type, in which cadmium sulfide powder is dispersed in organic resin, and amorphous selenium (a-Se).
or amorphous (1!vn arsenic (a -Asz Se
Two types have been most widely used: those based on amorphous materials such as s).
しかしこれ等いずれの材料も公害等の理由から代替材料
の開発が望まれ、近年では上記感光体材料ニ代ってアモ
ルファスシリコンが注目を浴びている。However, it is desired to develop alternative materials for all of these materials due to pollution and other reasons, and in recent years, amorphous silicon has been attracting attention as an alternative to the above-mentioned photoreceptor materials.
アモルファスシリコンは無公害であることに加えて高い
光感度を有すると共に、更には非常に硬いという性質を
有し、すぐれた感光体材料になり得ると期待されている
。しかしアモルファスシリコンのみでは、電子写真プロ
セスの間中における帯電電荷の保持特性を示すに十分な
抵抗値を持つには至らず、アモルファスシリコンを電子
写真感光体として用いるには、高い光感度を保ちながら
高い帯電電位を保持させるための工夫が必要であった。In addition to being non-polluting, amorphous silicon has high photosensitivity and is extremely hard, and is expected to be an excellent photoreceptor material. However, amorphous silicon alone does not have a sufficient resistance value to exhibit charge retention characteristics throughout the electrophotographic process, and in order to use amorphous silicon as an electrophotographic photoreceptor, it is necessary to use amorphous silicon while maintaining high photosensitivity. It was necessary to devise a way to maintain a high charging potential.
このような工夫の一つとして、感光体となるアモルファ
スシリコン層自体を高抵抗化することが提案されている
が、アモルファスシリコンの優れた光導電特性(強い光
学吸収、電子及び正孔の比較的大きいドリフト移動度、
長波長感度等)を有効に用いるためには、上記のように
光導電層自体を高抵抗化して高い帯電能を得るより、表
面(及び基板)にエネルギーバンドギャップの大きなブ
ロッキング層を設けて帯電の保持を計る方が望ましい。As one such measure, it has been proposed to increase the resistance of the amorphous silicon layer itself that serves as the photoreceptor. large drift mobility,
In order to effectively utilize long-wavelength sensitivity, etc., it is necessary to provide a blocking layer with a large energy bandgap on the surface (and substrate) for charging, rather than increasing the resistance of the photoconductive layer itself to obtain high charging ability as described above. It is preferable to measure the retention of
また、この種のエネルギーバンドギャップの大きな表面
層は、帯電の保持ばかりでなく、電子写真プロセスにお
ける過酷なコロナイオンの衝撃から感光体を保護し、さ
らに環境の変化(温度、湿度等)による特性の変動を少
なくする表面保護膜として、表口安定化のために、必要
不可欠のものと考えられる。この表面層は、表面保護膜
としては、エネルギーバンドギャップの大きい方が当然
好ましい。In addition, this type of surface layer with a large energy bandgap not only maintains charge, but also protects the photoreceptor from harsh corona ion bombardment in the electrophotographic process, and also protects the photoreceptor from changes in the environment (temperature, humidity, etc.). It is considered to be essential for surface stabilization as a surface protective film that reduces fluctuations in the surface area. Naturally, it is preferable for this surface layer to have a large energy band gap as a surface protective film.
上記のようにエネルギーバンドギャップの大きい表面層
を設けることは、帯電保持だけではなく表面保護の面か
らも好ましい。しかし光導電層であるアモルファスシリ
コンの表面に続けて直ちにエネルギーバンドギャップの
大きい層を形成した場合には、電子写真用感光体として
は望ましくない特性が表われる。Providing a surface layer with a large energy bandgap as described above is preferable not only from the viewpoint of charge retention but also from the viewpoint of surface protection. However, if a layer with a large energy band gap is formed immediately after the surface of the amorphous silicon that is the photoconductive layer, characteristics undesirable for an electrophotographic photoreceptor will appear.
その一つとしてまず機械的な不安定さがある。One of them is mechanical instability.
アモルファスシリコン光stamIICエネルキーキャ
ップの大きな表面層を形成すると、両者の熱膨張係数の
違いから、表面層と光導電層間での安定した接着性が得
られず剥離する。When a large surface layer of an amorphous silicon optical stam IIC energy keycap is formed, stable adhesion between the surface layer and the photoconductive layer cannot be obtained due to the difference in thermal expansion coefficient between the two, resulting in peeling.
またエネルギーバンドギャップの大きい表面層を光導電
層に直接形成すると、電気的にも望ましくない特性が表
われる。即ち電子写真プロセスの過程において、予め表
面積に帯電を施こした感光体に対して、光照射がなされ
ると、光によって光導電層に上記表面層がもつ表面帯電
電荷と逆極性の電荷が生成され、この電荷が光導電層を
移動して上記表面帯電電荷を静電気的に打ち消すように
作用する。しかし上記のように表面層のエネルギーバン
ドギャップが大きい場合には、両者の境界でのギャップ
が非常に大きくなって滑らかな電荷の移動が行われず、
表面層と光導電層の界面近接に蓄積し、それが残留電位
となって表われる。この残留電位は好ましいものではな
く、残留電位が増加する場合は感光体の特性の劣化の原
因となる。Furthermore, if a surface layer with a large energy band gap is directly formed on the photoconductive layer, undesirable electrical characteristics will appear. In other words, during the electrophotographic process, when a photoreceptor whose surface area has been charged in advance is irradiated with light, the light generates charges on the photoconductive layer that have the opposite polarity to the surface charges of the surface layer. This charge moves through the photoconductive layer and acts to electrostatically cancel out the surface charge. However, when the energy bandgap of the surface layer is large as mentioned above, the gap at the boundary between the two becomes extremely large, preventing smooth charge transfer.
It accumulates near the interface between the surface layer and the photoconductive layer, and appears as a residual potential. This residual potential is not desirable, and when the residual potential increases, it causes deterioration of the characteristics of the photoreceptor.
また、残留電位は蓄積キャリアーに対して横方向の移動
をしばしば誘起し、画質のボケという問題の原因にもな
ってくる。Furthermore, the residual potential often induces lateral movement of accumulated carriers, causing the problem of blurring of image quality.
上述のように、エネルギーバンドギャップの大きな表面
層は、帯電の保持、表面の保護という点で必要不可欠の
ものであるが、それによって機械的、電気的な問題が付
随的に発生し、電子写真プロセスニ満足し得るアモルフ
ァスシリコン感光体を得るには至っていない。As mentioned above, a surface layer with a large energy band gap is indispensable in terms of charge retention and surface protection, but it also causes mechanical and electrical problems, making it difficult for electrophotography. However, it has not yet been possible to obtain an amorphous silicon photoreceptor that satisfies the process requirements.
また、現在までのアモルファスシリコンを主成分とする
光導電層を有する電子写真感光体においては、正帯電或
いは負帯電のいずれか一方の帯電用に使途が限定されて
いる。このため、前記光導電層のキャリア走行能は正帯
電用のものにおいてはホール(hole )のみが大き
く、これとは逆に、負帯電用のものにおいてはエレクト
ロン(electron)のみが大きく、両者とも、充
分に大きな走行能を有する電子写真感光体は存在しなか
った。つまシ、既存の電子写真感光体では、正及び負の
いずれの帯電時にも良好な感度を有するものがなかった
。Further, in electrophotographic photoreceptors that have a photoconductive layer containing amorphous silicon as a main component, the use thereof is limited to either positive charging or negative charging. Therefore, in the carrier migration ability of the photoconductive layer, only holes are large in the photoconductive layer for positive charging, and on the contrary, only electrons are large in the photoconductive layer for negative charging, and both are large. However, there was no electrophotographic photoreceptor with sufficiently large running ability. However, none of the existing electrophotographic photoreceptors has good sensitivity when charged either positively or negatively.
〈発明の目的〉
本発明の目的ハ、アモルファス−シリコンa−Sit主
成分とする光導電層と、該光導電層て比べて大きな光学
的バンド・ギャップを持った表面層を有する電子写真感
光体において、問題となる高い残留電位の存在、該残留
電位が引き起こす画像のカプリ及び横流れを防止するこ
とである。<Object of the Invention> The object of the present invention is to provide an electrophotographic photoreceptor having a photoconductive layer containing amorphous silicon a-Sit as a main component and a surface layer having a larger optical band gap than the photoconductive layer. In this case, the problem is to prevent the existence of a problematic high residual potential, and the image capriulation and cross-flow caused by the residual potential.
又、本発明の他の目的は、正・負の両極性帯電を可能と
する電子写真感光体を提供することである。Another object of the present invention is to provide an electrophotographic photoreceptor that can be charged in both positive and negative polarities.
又、本発明のさらに他の目的は、初期画像はもとより、
50万枚等の多数枚の複写後にあっても、初期画像同様
の良好な画像が得られる電子写真感光体を提供すること
である。Further, another object of the present invention is to obtain not only the initial image but also the initial image.
It is an object of the present invention to provide an electrophotographic photoreceptor capable of obtaining an image as good as an initial image even after copying a large number of copies, such as 500,000 copies.
〈実施例〉 以下、本発明の構成を図面を参照しつつ説明する。<Example> Hereinafter, the configuration of the present invention will be explained with reference to the drawings.
図は本発明の実施例に係る電子写真感光体の構造を示す
図であって、図中、工は導電性基本、2は下部層、3は
光導電層、4け中間層、5は表面層(表面ブロッキング
層)である。なお、前記下部層2は本発明の必須要件で
はない。The figure is a diagram showing the structure of an electrophotographic photoreceptor according to an embodiment of the present invention. layer (surface blocking layer). Note that the lower layer 2 is not an essential requirement of the present invention.
木実施例では、前記下部層2が窒素Nを含んだアモルフ
ァス・シリコンa −5i カラKD 、前E表面層4
が炭素Cf:含んだアモルファス・シリコンa −B
より成っている。In the wooden embodiment, the lower layer 2 is amorphous silicon containing nitrogen N, and the front E surface layer 4
is carbon Cf: amorphous silicon containing a-B
It consists of
各層について、成膜条件を下記男1表乃至@4表に示す
。The film forming conditions for each layer are shown in Tables 1 to 4 below.
第1表
窮2表
瀉3表
上記条件の下で作製した感光体を正帯電用複写機に搭載
したところ、画像のカプリ及び横流れの全くない良好な
初期画像が得られ、50万枚の通紙後も、感光体特性は
もちろん、コピー画質についても劣化は全く見られなか
った。Table 1 Table 2 Table 3 When the photoreceptor manufactured under the above conditions was installed in a positively charging copying machine, a good initial image with no image capri or cross-flow was obtained, and 500,000 copies were printed. Even after printing, no deterioration was observed not only in photoreceptor characteristics but also in copy image quality.
さらに、前記感光体を負帯電用の複写機に搭載したとこ
ろ、上述した正帯電時と全く同様の結果が得られた。Furthermore, when the photoreceptor was installed in a negatively charged copying machine, the same results as those obtained when positively charged were obtained.
なお、前記中間層4のギャップ(バンド)間準位置度は
、前記光導電層3のギャップ(バンド)間準位密度より
大きくなっている。Note that the inter-gap (band) quasi-position degree of the intermediate layer 4 is greater than the inter-gap (band) level density of the photoconductive layer 3.
本発明は、上記実施例に限定されることなく、種々の変
更を加えることができるが、これらは当業者が想到し得
るものである。The present invention is not limited to the above-described embodiments, and various modifications can be made, which can be conceived by those skilled in the art.
く効 果〉
以上の様に本発明に係る電子写真感光体によれば、表面
層と光導電層との間に、ある特定条件(ギャップ間準位
密度の大きさを規定すること等)の中間層を設けること
により、正・負両帯電が可能な電子写真感光体が得られ
、広範囲な利用を図ることができる。Effect> As described above, according to the electrophotographic photoreceptor according to the present invention, certain conditions (such as regulating the size of the inter-gap level density) are satisfied between the surface layer and the photoconductive layer. By providing the intermediate layer, an electrophotographic photoreceptor that can be charged both positively and negatively can be obtained, and can be used in a wide range of applications.
【図面の簡単な説明】
図は本発明の実施例に係る電子写真感光体の構造図であ
る。
1・・・導電性基体、 2・・・下部層、 3・・・光
導電層、 4・・・中間層、 5・・・表面層。BRIEF DESCRIPTION OF THE DRAWINGS The figure is a structural diagram of an electrophotographic photoreceptor according to an embodiment of the present invention. DESCRIPTION OF SYMBOLS 1... Conductive substrate, 2... Lower layer, 3... Photoconductive layer, 4... Intermediate layer, 5... Surface layer.
Claims (1)
を主成分とする光導電層と、該光導電層に比べて大きな
光学的バンド・キャップを持った表面層を有する電子写
真感光体において、上記光導電層と上記表面層との間に
中間層を設けたことを特徴とする電子写真感光体。 2、上記表面層が、少なくともSi、Cを含むことを特
徴とする特許請求の範囲第1項記載の電子写真感光体。 3、上記中間層が、少なくともSi、C、H、P、Bを
含むアモルファス半導体から成ることを特徴とする特許
請求の範囲第2項記載の電子写真感光体。 4、上記光導電層がB及びPを含むことを特徴とする特
許請求の範囲第1項記載の電子写真感光体。 5、上記中間層のギャップ間準位密度が、上記光導電層
のギャップ間準位密度より大きいことを特徴とする特許
請求の範囲第1項記載の電子写真感光体。[Claims] 1. A photoconductive layer mainly composed of amorphous silicon containing H and a surface layer having a larger optical band gap than the photoconductive layer on a conductive substrate. An electrophotographic photoreceptor, characterized in that an intermediate layer is provided between the photoconductive layer and the surface layer. 2. The electrophotographic photoreceptor according to claim 1, wherein the surface layer contains at least Si and C. 3. The electrophotographic photoreceptor according to claim 2, wherein the intermediate layer is made of an amorphous semiconductor containing at least Si, C, H, P, and B. 4. The electrophotographic photoreceptor according to claim 1, wherein the photoconductive layer contains B and P. 5. The electrophotographic photoreceptor according to claim 1, wherein the inter-gap level density of the intermediate layer is higher than the inter-gap level density of the photoconductive layer.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12052587A JPS63285553A (en) | 1987-05-18 | 1987-05-18 | Electrophotographic sensitive body |
US07/443,818 US5164281A (en) | 1987-05-15 | 1989-11-29 | Photosensitive body for electrophotography containing amorphous silicon layers |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12052587A JPS63285553A (en) | 1987-05-18 | 1987-05-18 | Electrophotographic sensitive body |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63285553A true JPS63285553A (en) | 1988-11-22 |
Family
ID=14788417
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12052587A Pending JPS63285553A (en) | 1987-05-15 | 1987-05-18 | Electrophotographic sensitive body |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63285553A (en) |
-
1987
- 1987-05-18 JP JP12052587A patent/JPS63285553A/en active Pending
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