JPS6328515Y2 - - Google Patents
Info
- Publication number
- JPS6328515Y2 JPS6328515Y2 JP1982093409U JP9340982U JPS6328515Y2 JP S6328515 Y2 JPS6328515 Y2 JP S6328515Y2 JP 1982093409 U JP1982093409 U JP 1982093409U JP 9340982 U JP9340982 U JP 9340982U JP S6328515 Y2 JPS6328515 Y2 JP S6328515Y2
- Authority
- JP
- Japan
- Prior art keywords
- oven
- ionization chamber
- heat
- ion source
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- 230000002093 peripheral effect Effects 0.000 claims description 4
- 150000002500 ions Chemical class 0.000 description 27
- 239000000463 material Substances 0.000 description 16
- 230000000694 effects Effects 0.000 description 7
- 230000005855 radiation Effects 0.000 description 6
- 230000017525 heat dissipation Effects 0.000 description 5
- 238000009413 insulation Methods 0.000 description 4
- 239000011651 chromium Substances 0.000 description 3
- 238000009833 condensation Methods 0.000 description 3
- 230000005494 condensation Effects 0.000 description 3
- 238000000605 extraction Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 238000010884 ion-beam technique Methods 0.000 description 3
- 229910052715 tantalum Inorganic materials 0.000 description 3
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 239000002784 hot electron Substances 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9340982U JPS58195961U (ja) | 1982-06-21 | 1982-06-21 | イオン源装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9340982U JPS58195961U (ja) | 1982-06-21 | 1982-06-21 | イオン源装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58195961U JPS58195961U (ja) | 1983-12-26 |
| JPS6328515Y2 true JPS6328515Y2 (es) | 1988-08-01 |
Family
ID=30224211
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9340982U Granted JPS58195961U (ja) | 1982-06-21 | 1982-06-21 | イオン源装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58195961U (es) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS513039A (es) * | 1974-06-27 | 1976-01-12 | Shell Sekyu | |
| JPS5125359A (es) * | 1974-08-24 | 1976-03-01 | Genzaburo Toryama | |
| JPS5193280A (es) * | 1975-02-14 | 1976-08-16 |
-
1982
- 1982-06-21 JP JP9340982U patent/JPS58195961U/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS513039A (es) * | 1974-06-27 | 1976-01-12 | Shell Sekyu | |
| JPS5125359A (es) * | 1974-08-24 | 1976-03-01 | Genzaburo Toryama | |
| JPS5193280A (es) * | 1975-02-14 | 1976-08-16 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58195961U (ja) | 1983-12-26 |
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