JPS6328515Y2 - - Google Patents

Info

Publication number
JPS6328515Y2
JPS6328515Y2 JP1982093409U JP9340982U JPS6328515Y2 JP S6328515 Y2 JPS6328515 Y2 JP S6328515Y2 JP 1982093409 U JP1982093409 U JP 1982093409U JP 9340982 U JP9340982 U JP 9340982U JP S6328515 Y2 JPS6328515 Y2 JP S6328515Y2
Authority
JP
Japan
Prior art keywords
oven
ionization chamber
heat
ion source
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982093409U
Other languages
English (en)
Japanese (ja)
Other versions
JPS58195961U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9340982U priority Critical patent/JPS58195961U/ja
Publication of JPS58195961U publication Critical patent/JPS58195961U/ja
Application granted granted Critical
Publication of JPS6328515Y2 publication Critical patent/JPS6328515Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP9340982U 1982-06-21 1982-06-21 イオン源装置 Granted JPS58195961U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9340982U JPS58195961U (ja) 1982-06-21 1982-06-21 イオン源装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9340982U JPS58195961U (ja) 1982-06-21 1982-06-21 イオン源装置

Publications (2)

Publication Number Publication Date
JPS58195961U JPS58195961U (ja) 1983-12-26
JPS6328515Y2 true JPS6328515Y2 (OSRAM) 1988-08-01

Family

ID=30224211

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9340982U Granted JPS58195961U (ja) 1982-06-21 1982-06-21 イオン源装置

Country Status (1)

Country Link
JP (1) JPS58195961U (OSRAM)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5815705B2 (ja) * 1974-06-27 1983-03-26 株式会社明電舎 発電設備における熱回収方法
JPS5440761B2 (OSRAM) * 1974-08-24 1979-12-05
JPS5193280A (OSRAM) * 1975-02-14 1976-08-16

Also Published As

Publication number Publication date
JPS58195961U (ja) 1983-12-26

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