JPS6328241B2 - - Google Patents
Info
- Publication number
- JPS6328241B2 JPS6328241B2 JP1265582A JP1265582A JPS6328241B2 JP S6328241 B2 JPS6328241 B2 JP S6328241B2 JP 1265582 A JP1265582 A JP 1265582A JP 1265582 A JP1265582 A JP 1265582A JP S6328241 B2 JPS6328241 B2 JP S6328241B2
- Authority
- JP
- Japan
- Prior art keywords
- surface roughness
- standard plate
- metal
- capacitance
- roughness measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003746 surface roughness Effects 0.000 claims description 52
- 239000002184 metal Substances 0.000 claims description 10
- 238000004439 roughness measurement Methods 0.000 claims description 9
- 238000005259 measurement Methods 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 6
- 238000003825 pressing Methods 0.000 claims description 2
- 239000011800 void material Substances 0.000 claims 1
- 241001422033 Thestylus Species 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 1
- 238000009760 electrical discharge machining Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/34—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring roughness or irregularity of surfaces
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1265582A JPS58129203A (ja) | 1982-01-28 | 1982-01-28 | 電気容量式表面あらさ測定機用標準板 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1265582A JPS58129203A (ja) | 1982-01-28 | 1982-01-28 | 電気容量式表面あらさ測定機用標準板 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58129203A JPS58129203A (ja) | 1983-08-02 |
| JPS6328241B2 true JPS6328241B2 (enrdf_load_stackoverflow) | 1988-06-07 |
Family
ID=11811370
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1265582A Granted JPS58129203A (ja) | 1982-01-28 | 1982-01-28 | 電気容量式表面あらさ測定機用標準板 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58129203A (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4689988B2 (ja) * | 2004-08-25 | 2011-06-01 | 株式会社ミツトヨ | 表面性状測定機の校正標本 |
| JP4767614B2 (ja) * | 2005-07-28 | 2011-09-07 | 株式会社ミツトヨ | 粗さ標準片及びその製造方法 |
| JP4690276B2 (ja) * | 2006-09-13 | 2011-06-01 | 株式会社ミツトヨ | 真円度測定装置の較正方法 |
-
1982
- 1982-01-28 JP JP1265582A patent/JPS58129203A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58129203A (ja) | 1983-08-02 |
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