JPS6328241B2 - - Google Patents
Info
- Publication number
- JPS6328241B2 JPS6328241B2 JP1265582A JP1265582A JPS6328241B2 JP S6328241 B2 JPS6328241 B2 JP S6328241B2 JP 1265582 A JP1265582 A JP 1265582A JP 1265582 A JP1265582 A JP 1265582A JP S6328241 B2 JPS6328241 B2 JP S6328241B2
- Authority
- JP
- Japan
- Prior art keywords
- surface roughness
- standard plate
- metal
- capacitance
- roughness measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003746 surface roughness Effects 0.000 claims description 52
- 239000002184 metal Substances 0.000 claims description 10
- 238000004439 roughness measurement Methods 0.000 claims description 9
- 238000005259 measurement Methods 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 6
- 238000003825 pressing Methods 0.000 claims description 2
- 239000011800 void material Substances 0.000 claims 1
- 241001422033 Thestylus Species 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 1
- 238000009760 electrical discharge machining Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/34—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring roughness or irregularity of surfaces
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1265582A JPS58129203A (ja) | 1982-01-28 | 1982-01-28 | 電気容量式表面あらさ測定機用標準板 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1265582A JPS58129203A (ja) | 1982-01-28 | 1982-01-28 | 電気容量式表面あらさ測定機用標準板 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58129203A JPS58129203A (ja) | 1983-08-02 |
| JPS6328241B2 true JPS6328241B2 (enrdf_load_stackoverflow) | 1988-06-07 |
Family
ID=11811370
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1265582A Granted JPS58129203A (ja) | 1982-01-28 | 1982-01-28 | 電気容量式表面あらさ測定機用標準板 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58129203A (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4689988B2 (ja) * | 2004-08-25 | 2011-06-01 | 株式会社ミツトヨ | 表面性状測定機の校正標本 |
| JP4767614B2 (ja) * | 2005-07-28 | 2011-09-07 | 株式会社ミツトヨ | 粗さ標準片及びその製造方法 |
| JP4690276B2 (ja) * | 2006-09-13 | 2011-06-01 | 株式会社ミツトヨ | 真円度測定装置の較正方法 |
-
1982
- 1982-01-28 JP JP1265582A patent/JPS58129203A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58129203A (ja) | 1983-08-02 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2007517216A (ja) | センサ | |
| US4182981A (en) | Apparatus for gauging the shape of a conducting surface | |
| JP2006020823A (ja) | アレイ型静電容量式圧脈波センサおよびこれを備えた脈波測定装置 | |
| JPH0755598A (ja) | 触覚センサおよび触覚イメージャー | |
| JPS6328241B2 (enrdf_load_stackoverflow) | ||
| US4649752A (en) | Shim gap probe | |
| JP2008116371A (ja) | 触覚センサー及びその製造方法 | |
| JP5040008B2 (ja) | 圧力センサ | |
| CN109990928B (zh) | 一种温度压力复合传感器 | |
| JPH0320682B2 (enrdf_load_stackoverflow) | ||
| JPH0617838B2 (ja) | 圧力分布測定用ゴム板 | |
| JPH0450701A (ja) | ハニカムの表面粗度測定法及びそれに用いる表面粗度測定用測定子 | |
| JPS59132328A (ja) | 圧力トランスデユ−サ | |
| US3777558A (en) | Strain-leaf burr height detector | |
| JPS59116501A (ja) | 平面度測定具及び平面度測定方法 | |
| CN101960277A (zh) | 一种使用横梁和膜片的低压传感器 | |
| JP2750583B2 (ja) | 面圧力分布検出装置 | |
| JPS5994028A (ja) | 接触面圧力分布検出器 | |
| KR102666643B1 (ko) | 국부적 압력감지의 정밀도를 향상시킨 압력 감지 시트 | |
| JP6780743B2 (ja) | タッチパネル | |
| SU742793A1 (ru) | Способ определени величины неоднородности распределени структуры волокнистого материала и удельной энергии | |
| RU2028587C1 (ru) | Тонкопленочный датчик давления | |
| JPH0396828A (ja) | 圧力検出器の製造方法 | |
| JPH0345128Y2 (enrdf_load_stackoverflow) | ||
| JP4477195B2 (ja) | 被加工物交点測定用補助具 |