JPS6328241B2 - - Google Patents

Info

Publication number
JPS6328241B2
JPS6328241B2 JP1265582A JP1265582A JPS6328241B2 JP S6328241 B2 JPS6328241 B2 JP S6328241B2 JP 1265582 A JP1265582 A JP 1265582A JP 1265582 A JP1265582 A JP 1265582A JP S6328241 B2 JPS6328241 B2 JP S6328241B2
Authority
JP
Japan
Prior art keywords
surface roughness
standard plate
metal
capacitance
roughness measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1265582A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58129203A (ja
Inventor
Shohachiro Yamazaki
Ichiro Kawamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
YAMAZAKI SEIKI KENKYUSHO KK
Original Assignee
YAMAZAKI SEIKI KENKYUSHO KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by YAMAZAKI SEIKI KENKYUSHO KK filed Critical YAMAZAKI SEIKI KENKYUSHO KK
Priority to JP1265582A priority Critical patent/JPS58129203A/ja
Publication of JPS58129203A publication Critical patent/JPS58129203A/ja
Publication of JPS6328241B2 publication Critical patent/JPS6328241B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/34—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring roughness or irregularity of surfaces

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
JP1265582A 1982-01-28 1982-01-28 電気容量式表面あらさ測定機用標準板 Granted JPS58129203A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1265582A JPS58129203A (ja) 1982-01-28 1982-01-28 電気容量式表面あらさ測定機用標準板

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1265582A JPS58129203A (ja) 1982-01-28 1982-01-28 電気容量式表面あらさ測定機用標準板

Publications (2)

Publication Number Publication Date
JPS58129203A JPS58129203A (ja) 1983-08-02
JPS6328241B2 true JPS6328241B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-06-07

Family

ID=11811370

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1265582A Granted JPS58129203A (ja) 1982-01-28 1982-01-28 電気容量式表面あらさ測定機用標準板

Country Status (1)

Country Link
JP (1) JPS58129203A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4689988B2 (ja) * 2004-08-25 2011-06-01 株式会社ミツトヨ 表面性状測定機の校正標本
JP4767614B2 (ja) * 2005-07-28 2011-09-07 株式会社ミツトヨ 粗さ標準片及びその製造方法
JP4690276B2 (ja) * 2006-09-13 2011-06-01 株式会社ミツトヨ 真円度測定装置の較正方法

Also Published As

Publication number Publication date
JPS58129203A (ja) 1983-08-02

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