JPS6327857B2 - - Google Patents

Info

Publication number
JPS6327857B2
JPS6327857B2 JP53119211A JP11921178A JPS6327857B2 JP S6327857 B2 JPS6327857 B2 JP S6327857B2 JP 53119211 A JP53119211 A JP 53119211A JP 11921178 A JP11921178 A JP 11921178A JP S6327857 B2 JPS6327857 B2 JP S6327857B2
Authority
JP
Japan
Prior art keywords
layer
poly
film
manufacturing
sio
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53119211A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5546520A (en
Inventor
Sunao Shibata
Hisakazu Iizuka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP11921178A priority Critical patent/JPS5546520A/ja
Priority to US06/077,272 priority patent/US4267011A/en
Publication of JPS5546520A publication Critical patent/JPS5546520A/ja
Publication of JPS6327857B2 publication Critical patent/JPS6327857B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP11921178A 1978-09-29 1978-09-29 Method of manufacturing semiconductor device Granted JPS5546520A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP11921178A JPS5546520A (en) 1978-09-29 1978-09-29 Method of manufacturing semiconductor device
US06/077,272 US4267011A (en) 1978-09-29 1979-09-20 Method for manufacturing a semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11921178A JPS5546520A (en) 1978-09-29 1978-09-29 Method of manufacturing semiconductor device

Publications (2)

Publication Number Publication Date
JPS5546520A JPS5546520A (en) 1980-04-01
JPS6327857B2 true JPS6327857B2 (cs) 1988-06-06

Family

ID=14755679

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11921178A Granted JPS5546520A (en) 1978-09-29 1978-09-29 Method of manufacturing semiconductor device

Country Status (1)

Country Link
JP (1) JPS5546520A (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100264518A1 (en) * 2009-04-15 2010-10-21 Lee Shura Wafer and method for construction, strengthening and homogenization thereof

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5643613B2 (cs) * 1973-12-03 1981-10-14
JPS6022502B2 (ja) * 1976-08-27 1985-06-03 富士通株式会社 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS5546520A (en) 1980-04-01

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