JPS6152987B2 - - Google Patents

Info

Publication number
JPS6152987B2
JPS6152987B2 JP12262778A JP12262778A JPS6152987B2 JP S6152987 B2 JPS6152987 B2 JP S6152987B2 JP 12262778 A JP12262778 A JP 12262778A JP 12262778 A JP12262778 A JP 12262778A JP S6152987 B2 JPS6152987 B2 JP S6152987B2
Authority
JP
Japan
Prior art keywords
layer
poly
film
manufacturing
semiconductor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12262778A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5550660A (en
Inventor
Sunao Shibata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP12262778A priority Critical patent/JPS5550660A/ja
Priority to US06/078,783 priority patent/US4309224A/en
Publication of JPS5550660A publication Critical patent/JPS5550660A/ja
Publication of JPS6152987B2 publication Critical patent/JPS6152987B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP12262778A 1978-10-06 1978-10-06 Manufacturing of semiconductor device Granted JPS5550660A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP12262778A JPS5550660A (en) 1978-10-06 1978-10-06 Manufacturing of semiconductor device
US06/078,783 US4309224A (en) 1978-10-06 1979-09-25 Method for manufacturing a semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12262778A JPS5550660A (en) 1978-10-06 1978-10-06 Manufacturing of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5550660A JPS5550660A (en) 1980-04-12
JPS6152987B2 true JPS6152987B2 (cs) 1986-11-15

Family

ID=14840637

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12262778A Granted JPS5550660A (en) 1978-10-06 1978-10-06 Manufacturing of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5550660A (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01179582U (cs) * 1988-06-10 1989-12-22
JPH0421520U (cs) * 1990-06-14 1992-02-24

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01179582U (cs) * 1988-06-10 1989-12-22
JPH0421520U (cs) * 1990-06-14 1992-02-24

Also Published As

Publication number Publication date
JPS5550660A (en) 1980-04-12

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