JPS63277590A - 窒化ホウ素るつぼ - Google Patents
窒化ホウ素るつぼInfo
- Publication number
- JPS63277590A JPS63277590A JP10981087A JP10981087A JPS63277590A JP S63277590 A JPS63277590 A JP S63277590A JP 10981087 A JP10981087 A JP 10981087A JP 10981087 A JP10981087 A JP 10981087A JP S63277590 A JPS63277590 A JP S63277590A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- crucible
- thickness
- wall
- over
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 title claims description 26
- 229910052582 BN Inorganic materials 0.000 title claims description 10
- 239000002994 raw material Substances 0.000 claims description 9
- 238000005229 chemical vapour deposition Methods 0.000 claims description 5
- 238000000034 method Methods 0.000 abstract description 17
- 238000003475 lamination Methods 0.000 abstract description 5
- 230000000694 effects Effects 0.000 abstract description 4
- 239000007789 gas Substances 0.000 abstract 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 11
- 239000013078 crystal Substances 0.000 description 7
- 150000001875 compounds Chemical class 0.000 description 6
- JKWMSGQKBLHBQQ-UHFFFAOYSA-N diboron trioxide Chemical compound O=BOB=O JKWMSGQKBLHBQQ-UHFFFAOYSA-N 0.000 description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 5
- 229910002804 graphite Inorganic materials 0.000 description 5
- 239000010439 graphite Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- 229910021529 ammonia Inorganic materials 0.000 description 4
- 229910052796 boron Inorganic materials 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- FAQYAMRNWDIXMY-UHFFFAOYSA-N trichloroborane Chemical compound ClB(Cl)Cl FAQYAMRNWDIXMY-UHFFFAOYSA-N 0.000 description 4
- -1 Boron halide Chemical class 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 238000004299 exfoliation Methods 0.000 description 3
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052810 boron oxide Inorganic materials 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000003112 inhibitor Substances 0.000 description 1
- 238000001451 molecular beam epitaxy Methods 0.000 description 1
- 229910000069 nitrogen hydride Inorganic materials 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 238000004506 ultrasonic cleaning Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
- Crucibles And Fluidized-Bed Furnaces (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10981087A JPS63277590A (ja) | 1987-05-07 | 1987-05-07 | 窒化ホウ素るつぼ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10981087A JPS63277590A (ja) | 1987-05-07 | 1987-05-07 | 窒化ホウ素るつぼ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63277590A true JPS63277590A (ja) | 1988-11-15 |
| JPH0511073B2 JPH0511073B2 (enrdf_load_stackoverflow) | 1993-02-12 |
Family
ID=14519778
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10981087A Granted JPS63277590A (ja) | 1987-05-07 | 1987-05-07 | 窒化ホウ素るつぼ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63277590A (enrdf_load_stackoverflow) |
-
1987
- 1987-05-07 JP JP10981087A patent/JPS63277590A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0511073B2 (enrdf_load_stackoverflow) | 1993-02-12 |
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